GB2454793B - Assignment of particles to processes of origin - Google Patents

Assignment of particles to processes of origin

Info

Publication number
GB2454793B
GB2454793B GB0820835A GB0820835A GB2454793B GB 2454793 B GB2454793 B GB 2454793B GB 0820835 A GB0820835 A GB 0820835A GB 0820835 A GB0820835 A GB 0820835A GB 2454793 B GB2454793 B GB 2454793B
Authority
GB
United Kingdom
Prior art keywords
assignment
origin
particles
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0820835A
Other languages
English (en)
Other versions
GB2454793A (en
GB0820835D0 (en
Inventor
Maximilian Staudacher
Linus Goerlitz
Fred Hamprecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB0820835D0 publication Critical patent/GB0820835D0/en
Publication of GB2454793A publication Critical patent/GB2454793A/en
Application granted granted Critical
Publication of GB2454793B publication Critical patent/GB2454793B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1429—Signal processing
    • G01N15/1433—Signal processing using image recognition
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB0820835A 2007-11-13 2008-11-13 Assignment of particles to processes of origin Expired - Fee Related GB2454793B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007054099A DE102007054099A1 (de) 2007-11-13 2007-11-13 Zuordnung von Partikeln zu Entstehungsprozessen

Publications (3)

Publication Number Publication Date
GB0820835D0 GB0820835D0 (en) 2008-12-24
GB2454793A GB2454793A (en) 2009-05-20
GB2454793B true GB2454793B (en) 2011-10-05

Family

ID=40194621

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0820835A Expired - Fee Related GB2454793B (en) 2007-11-13 2008-11-13 Assignment of particles to processes of origin

Country Status (2)

Country Link
DE (1) DE102007054099A1 (de)
GB (1) GB2454793B (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040047500A1 (en) * 1997-08-07 2004-03-11 Junichi Taguchi Inspecting method and apparatus for repeated micro-miniature patterns
US20060008151A1 (en) * 2004-06-30 2006-01-12 National Instruments Corporation Shape feature extraction and classification
US6999614B1 (en) * 1999-11-29 2006-02-14 Kla-Tencor Corporation Power assisted automatic supervised classifier creation tool for semiconductor defects
US20080029699A1 (en) * 2006-08-06 2008-02-07 Hitachi High- Technologies Corporation Charged Particle Beam System, Sample Processing Method, and Semiconductor Inspection System

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005004599A1 (de) 2005-02-01 2006-08-10 Infineon Technologies Ag Verfahren und Anordnung zur Vermessung eines Messobjekts auf einem Halbleiterwafer mit einem Messgerät und Verwendung des Verfahrens

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040047500A1 (en) * 1997-08-07 2004-03-11 Junichi Taguchi Inspecting method and apparatus for repeated micro-miniature patterns
US6999614B1 (en) * 1999-11-29 2006-02-14 Kla-Tencor Corporation Power assisted automatic supervised classifier creation tool for semiconductor defects
US20060008151A1 (en) * 2004-06-30 2006-01-12 National Instruments Corporation Shape feature extraction and classification
US20080029699A1 (en) * 2006-08-06 2008-02-07 Hitachi High- Technologies Corporation Charged Particle Beam System, Sample Processing Method, and Semiconductor Inspection System

Also Published As

Publication number Publication date
GB2454793A (en) 2009-05-20
GB0820835D0 (en) 2008-12-24
DE102007054099A1 (de) 2009-05-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20141113