GB2446005B - Apparatus and method relating to removal of selected particles from a charged particle beam - Google Patents

Apparatus and method relating to removal of selected particles from a charged particle beam

Info

Publication number
GB2446005B
GB2446005B GB0701265.1A GB0701265A GB2446005B GB 2446005 B GB2446005 B GB 2446005B GB 0701265 A GB0701265 A GB 0701265A GB 2446005 B GB2446005 B GB 2446005B
Authority
GB
United Kingdom
Prior art keywords
removal
charged particle
particle beam
method relating
selected particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0701265.1A
Other versions
GB2446005A (en
GB0701265D0 (en
Inventor
Derek Aitken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Superion Ltd
Original Assignee
Superion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Superion Ltd filed Critical Superion Ltd
Priority to GB0701265.1A priority Critical patent/GB2446005B/en
Publication of GB0701265D0 publication Critical patent/GB0701265D0/en
Publication of GB2446005A publication Critical patent/GB2446005A/en
Application granted granted Critical
Publication of GB2446005B publication Critical patent/GB2446005B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/20—Magnetic deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/22—Electrostatic deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/443—Dynamic spectrometers
    • H01J49/446—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
GB0701265.1A 2007-01-23 2007-01-23 Apparatus and method relating to removal of selected particles from a charged particle beam Expired - Fee Related GB2446005B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0701265.1A GB2446005B (en) 2007-01-23 2007-01-23 Apparatus and method relating to removal of selected particles from a charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0701265.1A GB2446005B (en) 2007-01-23 2007-01-23 Apparatus and method relating to removal of selected particles from a charged particle beam

Publications (3)

Publication Number Publication Date
GB0701265D0 GB0701265D0 (en) 2007-02-28
GB2446005A GB2446005A (en) 2008-07-30
GB2446005B true GB2446005B (en) 2012-03-21

Family

ID=37846814

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0701265.1A Expired - Fee Related GB2446005B (en) 2007-01-23 2007-01-23 Apparatus and method relating to removal of selected particles from a charged particle beam

Country Status (1)

Country Link
GB (1) GB2446005B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2478265B (en) * 2008-09-03 2013-06-19 Superion Ltd Apparatus and method relating to the focusing of charged particles
GB2467548B (en) 2009-02-04 2013-02-27 Nu Instr Ltd Detection arrangements in mass spectrometers
CN103681204B (en) * 2012-09-08 2016-09-07 复旦大学 Inductivity coupled plasma mass spectrometry ion transmission system
US9767984B2 (en) * 2014-09-30 2017-09-19 Fei Company Chicane blanker assemblies for charged particle beam systems and methods of using the same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07191169A (en) * 1993-12-24 1995-07-28 Toshiba Corp Ion deflecting magnet and method for ion deflecting
EP0952607A2 (en) * 1998-04-20 1999-10-27 Micromass Limited Simultaneous detection isotopic ratio mass spectrometer
US20020100880A1 (en) * 1999-10-15 2002-08-01 Jin-Liang Chen Apparatus for decelerating ion beams for reducing the energy contamination
US6710358B1 (en) * 2000-02-25 2004-03-23 Advanced Ion Beam Technology, Inc. Apparatus and method for reducing energy contamination of low energy ion beams
WO2006060378A2 (en) * 2004-11-30 2006-06-08 Purser Kenneth H Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
WO2008042664A2 (en) * 2006-09-29 2008-04-10 Varian Semiconductor Equipment Associates, Inc. Technique for improved ion beam transport
WO2008042094A2 (en) * 2006-09-29 2008-04-10 Axcelis Technologies, Inc. New and improved beam line architecture for ion implanter

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07191169A (en) * 1993-12-24 1995-07-28 Toshiba Corp Ion deflecting magnet and method for ion deflecting
EP0952607A2 (en) * 1998-04-20 1999-10-27 Micromass Limited Simultaneous detection isotopic ratio mass spectrometer
US20020100880A1 (en) * 1999-10-15 2002-08-01 Jin-Liang Chen Apparatus for decelerating ion beams for reducing the energy contamination
US6710358B1 (en) * 2000-02-25 2004-03-23 Advanced Ion Beam Technology, Inc. Apparatus and method for reducing energy contamination of low energy ion beams
WO2006060378A2 (en) * 2004-11-30 2006-06-08 Purser Kenneth H Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
WO2008042664A2 (en) * 2006-09-29 2008-04-10 Varian Semiconductor Equipment Associates, Inc. Technique for improved ion beam transport
WO2008042094A2 (en) * 2006-09-29 2008-04-10 Axcelis Technologies, Inc. New and improved beam line architecture for ion implanter

Also Published As

Publication number Publication date
GB2446005A (en) 2008-07-30
GB0701265D0 (en) 2007-02-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20120621