GB2411302B - Acoustic filters and resonators - Google Patents

Acoustic filters and resonators

Info

Publication number
GB2411302B
GB2411302B GB0501315A GB0501315A GB2411302B GB 2411302 B GB2411302 B GB 2411302B GB 0501315 A GB0501315 A GB 0501315A GB 0501315 A GB0501315 A GB 0501315A GB 2411302 B GB2411302 B GB 2411302B
Authority
GB
United Kingdom
Prior art keywords
resonators
acoustic filters
acoustic
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0501315A
Other languages
English (en)
Other versions
GB0501315D0 (en
GB2411302A (en
Inventor
Richard C Ruby
John D Larson Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Agilent Technologies Inc
Original Assignee
Avago Technologies General IP Singapore Pte Ltd
Avago Technologies Wireless IP Singapore Pte Ltd
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies General IP Singapore Pte Ltd, Avago Technologies Wireless IP Singapore Pte Ltd, Agilent Technologies Inc filed Critical Avago Technologies General IP Singapore Pte Ltd
Publication of GB0501315D0 publication Critical patent/GB0501315D0/en
Publication of GB2411302A publication Critical patent/GB2411302A/en
Application granted granted Critical
Publication of GB2411302B publication Critical patent/GB2411302B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
GB0501315A 2004-02-23 2005-01-21 Acoustic filters and resonators Expired - Fee Related GB2411302B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/785,525 US7038559B2 (en) 2004-02-23 2004-02-23 Vertically separated acoustic filters and resonators

Publications (3)

Publication Number Publication Date
GB0501315D0 GB0501315D0 (en) 2005-03-02
GB2411302A GB2411302A (en) 2005-08-24
GB2411302B true GB2411302B (en) 2007-04-18

Family

ID=34274940

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0501315A Expired - Fee Related GB2411302B (en) 2004-02-23 2005-01-21 Acoustic filters and resonators

Country Status (3)

Country Link
US (5) US7038559B2 (OSRAM)
JP (1) JP4683947B2 (OSRAM)
GB (1) GB2411302B (OSRAM)

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US7038559B2 (en) * 2004-02-23 2006-05-02 Ruby Richard C Vertically separated acoustic filters and resonators
JP2006060385A (ja) * 2004-08-18 2006-03-02 Matsushita Electric Ind Co Ltd 共振器及びそれを用いるフィルタ
US7248131B2 (en) * 2005-03-14 2007-07-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Monolithic vertical integration of an acoustic resonator and electronic circuitry
US7665028B2 (en) 2005-07-13 2010-02-16 Microsoft Corporation Rich drag drop user interface
US7623007B2 (en) * 2005-10-19 2009-11-24 Panasonic Corporation Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
US20070093229A1 (en) * 2005-10-20 2007-04-26 Takehiko Yamakawa Complex RF device and method for manufacturing the same
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
JP2008172711A (ja) 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
JP5226409B2 (ja) * 2008-07-17 2013-07-03 太陽誘電株式会社 共振デバイス、通信モジュール、通信装置、共振デバイスの製造方法
US9520856B2 (en) 2009-06-24 2016-12-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
CA2801011C (en) 2010-06-01 2019-02-26 Dsm Ip Assests B.V. Extraction of lipid from cells and products therefrom
US9099983B2 (en) 2011-02-28 2015-08-04 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US9608592B2 (en) 2014-01-21 2017-03-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic wave resonator (FBAR) having stress-relief
US9154103B2 (en) 2012-01-30 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator
US9667220B2 (en) 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising heater and sense resistors
US9667218B2 (en) 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising feedback circuit
DE102013102206B4 (de) 2013-03-06 2016-04-07 Epcos Ag Bauelement mit gestapelten funktionalen Strukturen und Verfahren zur Herstellung
CN106029624B (zh) 2013-12-20 2021-12-07 帝斯曼知识产权资产管理有限公司 用于从微生物细胞获得微生物油的方法
AU2014369045B2 (en) 2013-12-20 2020-02-27 Dsm Ip Assets B.V. Processes for obtaining microbial oil from microbial cells
NZ721417A (en) 2013-12-20 2022-07-01 Dsm Ip Assets Bv Processes for obtaining microbial oil from microbial cells
AR098896A1 (es) 2013-12-20 2016-06-22 Dsm Ip Assets Bv Proceso para obtener aceite microbiano a partir de células microbianas
TWI646189B (zh) 2013-12-20 2019-01-01 荷蘭商Ｄｓｍ智慧財產有限公司 用於從微生物細胞獲得微生物油之方法（五）
JP6454299B2 (ja) * 2016-05-13 2019-01-16 太陽誘電株式会社 弾性波デバイス
US11616488B2 (en) * 2016-09-30 2023-03-28 Intel Corporation FBAR devices having multiple epitaxial layers stacked on a same substrate
US10804880B2 (en) * 2018-12-03 2020-10-13 X-Celeprint Limited Device structures with acoustic wave transducers and connection posts
US11274035B2 (en) 2019-04-24 2022-03-15 X-Celeprint Limited Overhanging device structures and related methods of manufacture
US12162747B2 (en) 2018-12-03 2024-12-10 X-Celeprint Limited Enclosed cavity structures
US12438518B2 (en) * 2020-04-20 2025-10-07 Suzhou Huntersun Electronics Co., Ltd. Bulk acoustic wave resonator and fabrication method therefor
CN112187212B (zh) * 2020-09-18 2021-12-07 杭州星阖科技有限公司 一种声学谐振器组件及滤波器
US12334906B2 (en) * 2021-12-30 2025-06-17 Raytheon Company Multi-layer resonator assembly and method for fabricating same

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WO2002058233A1 (en) * 2001-01-18 2002-07-25 Infineon Technologies Ag Filter devices and method for fabricating filter devices
US20020109564A1 (en) * 2001-02-09 2002-08-15 Asia Pacific Microsystem, Inc. Bulk acoustic wave filter and its package
US20030128081A1 (en) * 2002-01-09 2003-07-10 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
US20040164367A1 (en) * 2003-02-21 2004-08-26 Jae-Yeong Park Duplexer filter having film bulk acoustic resonator and semiconductor package thereof
EP1482638A2 (en) * 2003-05-29 2004-12-01 Samsung Electronics Co., Ltd. Film bulk acoustic resonator having supports and manufacturing method therefor
WO2005043753A1 (en) * 2003-10-30 2005-05-12 Agilent Technologies, Inc. Pass bandwidth control in decoupled stacked bulk acoustic resonator devices

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US6466107B2 (en) * 1999-12-14 2002-10-15 Murata Manufacturing Co., Ltd. Ladder filter comprising stacked piezoelectric resonators
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WO2002058233A1 (en) * 2001-01-18 2002-07-25 Infineon Technologies Ag Filter devices and method for fabricating filter devices
US20020109564A1 (en) * 2001-02-09 2002-08-15 Asia Pacific Microsystem, Inc. Bulk acoustic wave filter and its package
US20030128081A1 (en) * 2002-01-09 2003-07-10 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
US20040164367A1 (en) * 2003-02-21 2004-08-26 Jae-Yeong Park Duplexer filter having film bulk acoustic resonator and semiconductor package thereof
EP1482638A2 (en) * 2003-05-29 2004-12-01 Samsung Electronics Co., Ltd. Film bulk acoustic resonator having supports and manufacturing method therefor
WO2005043753A1 (en) * 2003-10-30 2005-05-12 Agilent Technologies, Inc. Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9361312B2 (en) 2003-03-27 2016-06-07 Microsoft Technology Licensing, Llc System and method for filtering and organizing items based on metadata
US9361313B2 (en) 2003-03-27 2016-06-07 Microsoft Technology Licensing, Llc System and method for filtering and organizing items based on common elements

Also Published As

Publication number Publication date
US7563475B2 (en) 2009-07-21
US20110047783A1 (en) 2011-03-03
US20050184830A1 (en) 2005-08-25
US7038559B2 (en) 2006-05-02
US7841055B2 (en) 2010-11-30
JP2005244966A (ja) 2005-09-08
GB0501315D0 (en) 2005-03-02
US20060158284A1 (en) 2006-07-20
US20060016070A1 (en) 2006-01-26
GB2411302A (en) 2005-08-24
JP4683947B2 (ja) 2011-05-18
US7312675B2 (en) 2007-12-25
US20060152305A1 (en) 2006-07-13

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20130725 AND 20130731

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20140121