GB2348491B - Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam - Google Patents

Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam

Info

Publication number
GB2348491B
GB2348491B GB0013801A GB0013801A GB2348491B GB 2348491 B GB2348491 B GB 2348491B GB 0013801 A GB0013801 A GB 0013801A GB 0013801 A GB0013801 A GB 0013801A GB 2348491 B GB2348491 B GB 2348491B
Authority
GB
United Kingdom
Prior art keywords
intensities
ratio
laser beam
polarized light
light components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0013801A
Other versions
GB2348491A (en
GB0013801D0 (en
Inventor
Masao Watanabe
Akiko Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP09148998A external-priority patent/JP3830267B2/en
Priority claimed from JP9450498A external-priority patent/JPH11295231A/en
Priority claimed from JP10180933A external-priority patent/JP2000009654A/en
Application filed by Advantest Corp filed Critical Advantest Corp
Priority claimed from GB9907852A external-priority patent/GB2335982B/en
Publication of GB0013801D0 publication Critical patent/GB0013801D0/en
Publication of GB2348491A publication Critical patent/GB2348491A/en
Application granted granted Critical
Publication of GB2348491B publication Critical patent/GB2348491B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB0013801A 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam Expired - Fee Related GB2348491B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP09148998A JP3830267B2 (en) 1998-04-03 1998-04-03 Surface inspection apparatus and method
JP9450498A JPH11295231A (en) 1998-04-07 1998-04-07 Device and method for inspecting surface
JP10180933A JP2000009654A (en) 1998-06-26 1998-06-26 Device and method for inspecting surface
GB9907852A GB2335982B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S-and P- polarized light components of a laser beam

Publications (3)

Publication Number Publication Date
GB0013801D0 GB0013801D0 (en) 2000-07-26
GB2348491A GB2348491A (en) 2000-10-04
GB2348491B true GB2348491B (en) 2001-10-03

Family

ID=27451887

Family Applications (4)

Application Number Title Priority Date Filing Date
GB0013801A Expired - Fee Related GB2348491B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam
GB0013796A Expired - Fee Related GB2349693B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam
GB0013803A Expired - Fee Related GB2348492B (en) 1998-04-03 1999-04-06 Surface inspection method and device for determining the roughness of an inspected surface
GB0013800A Expired - Fee Related GB2348490B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam

Family Applications After (3)

Application Number Title Priority Date Filing Date
GB0013796A Expired - Fee Related GB2349693B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam
GB0013803A Expired - Fee Related GB2348492B (en) 1998-04-03 1999-04-06 Surface inspection method and device for determining the roughness of an inspected surface
GB0013800A Expired - Fee Related GB2348490B (en) 1998-04-03 1999-04-06 Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam

Country Status (1)

Country Link
GB (4) GB2348491B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113231742B (en) * 2021-03-25 2022-09-20 广东工业大学 Detection method for antibacterial surface of grating structure

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62223650A (en) * 1986-03-26 1987-10-01 Hitachi Ltd Method and device for inspection
JPS62223649A (en) * 1986-03-26 1987-10-01 Hitachi Ltd Method and device for inspection
JPH0518889A (en) * 1991-07-15 1993-01-26 Mitsubishi Electric Corp Method and device for inspecting foreign matter
EP0677731A2 (en) * 1994-03-25 1995-10-18 Omron Corporation Optical sensor device
JPH10206314A (en) * 1997-01-27 1998-08-07 Takuwa:Kk Measuring method for road surface condition and device therefore
JPH10206315A (en) * 1997-01-27 1998-08-07 Takuwa:Kk Measuring method for road surface condition and device therefor
JPH116795A (en) * 1997-06-16 1999-01-12 Advantest Corp Method and device for analyzing contamination degree of metal surface

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246593B2 (en) * 1973-06-20 1977-11-25
JPH05288671A (en) * 1992-04-07 1993-11-02 Nippon Steel Corp Measuring method by infrared spectroscopy method for surface of steel plate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62223650A (en) * 1986-03-26 1987-10-01 Hitachi Ltd Method and device for inspection
JPS62223649A (en) * 1986-03-26 1987-10-01 Hitachi Ltd Method and device for inspection
JPH0518889A (en) * 1991-07-15 1993-01-26 Mitsubishi Electric Corp Method and device for inspecting foreign matter
EP0677731A2 (en) * 1994-03-25 1995-10-18 Omron Corporation Optical sensor device
JPH10206314A (en) * 1997-01-27 1998-08-07 Takuwa:Kk Measuring method for road surface condition and device therefore
JPH10206315A (en) * 1997-01-27 1998-08-07 Takuwa:Kk Measuring method for road surface condition and device therefor
JPH116795A (en) * 1997-06-16 1999-01-12 Advantest Corp Method and device for analyzing contamination degree of metal surface

Also Published As

Publication number Publication date
GB2348490A (en) 2000-10-04
GB2348492A (en) 2000-10-04
GB2349693A (en) 2000-11-08
GB2349693B (en) 2001-03-28
GB2348492B (en) 2001-08-15
GB2348490B (en) 2001-03-28
GB0013796D0 (en) 2000-07-26
GB0013800D0 (en) 2000-07-26
GB2348491A (en) 2000-10-04
GB0013803D0 (en) 2000-07-26
GB0013801D0 (en) 2000-07-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030406