GB2329758A - A semiconductor laser diode bar assembly - Google Patents

A semiconductor laser diode bar assembly Download PDF

Info

Publication number
GB2329758A
GB2329758A GB9819708A GB9819708A GB2329758A GB 2329758 A GB2329758 A GB 2329758A GB 9819708 A GB9819708 A GB 9819708A GB 9819708 A GB9819708 A GB 9819708A GB 2329758 A GB2329758 A GB 2329758A
Authority
GB
United Kingdom
Prior art keywords
assembly
diode bar
base plate
heat sink
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9819708A
Other versions
GB2329758A8 (en
GB9819708D0 (en
GB2329758B (en
Inventor
Peter Hutchinson Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
GEC Marconi Ltd
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Marconi Ltd, Marconi Co Ltd filed Critical GEC Marconi Ltd
Publication of GB9819708D0 publication Critical patent/GB9819708D0/en
Publication of GB2329758A publication Critical patent/GB2329758A/en
Publication of GB2329758A8 publication Critical patent/GB2329758A8/en
Application granted granted Critical
Publication of GB2329758B publication Critical patent/GB2329758B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0233Mounting configuration of laser chips
    • H01S5/02345Wire-bonding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0235Method for mounting laser chips
    • H01S5/02355Fixing laser chips on mounts
    • H01S5/02365Fixing laser chips on mounts by clamping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0235Method for mounting laser chips
    • H01S5/02355Fixing laser chips on mounts
    • H01S5/0237Fixing laser chips on mounts by soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02407Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02415Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling by using a thermo-electric cooler [TEC], e.g. Peltier element
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02469Passive cooling, e.g. where heat is removed by the housing as a whole or by a heat pipe without any active cooling element like a TEC
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4018Lasers electrically in series

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Semiconductor Lasers (AREA)

Abstract

A semiconductor laser diode bar assembly comprises a plurality of sub-assemblies 1a,1 b each including a copper base plate 2a,2b in which is mounted a plurality of heat pipes 3, for distributing heat within the base plate from a region under a diode bar 4a,4b mounted to the base plate. The sub-assemblies 1a,1b are releasably mounted on a common heat sink 7 and may be electrically isolated from said heat sink by electrically insulating layer 11. Incorporation of the heat pipes into the base plate of each sub-assembly, which base plate forms an electrode for the diode bar, results in more efficient cooling of the diode bar 4. The other electrode of the diode bar may be provided by a conductive layer 6. The heart sink 7 may include a Peltier cooling device and a thermocouple.

Description

A SEMICONDUCTOR LASER DIODE BAR ASSEMBLY The present invention relates to a semiconductor laser diode bar assembly for pumping a laser cavity.
In order to efficiently pump a laser cavity, the laser diode bar must operate at a specified frequency. This frequency is temperature dependent and therefore the diode bar must be maintained at a constant specified operating temperature, a typical requirement may be for the diode bar to operate at 55 +1 C.
The requirement that the temperature of the diode bar be kept at a relatively low constant temperature is particularly problematic because of the small size of the diode bar usually employed. In some applications a footprint area of the diode bar may be as small as 20 mm2 and yet produce 100 W of heat. A further complication arises from the requirement that the diode bar be substantially distortion-free in order to avoid alignment problems and this normally precludes sandwiching the diode bar between two heat sinks.
In addition to the above, a significant electrical power supply is required for the diode bar and therefore substantial electrodes have to be applied to opposite surfaces of the diode bar. Because diode bars form part of an electrical circuit powering them they must be electrically insulated from any electrically conductive heat sink, resulting in a multi-layer device where each interface provides a potential thermal barrier.
A further complication arises in many applications where a compact design is required, which normally necessitates cooling by Peltier devices in order to avoid the complications with having a fluid-cooled heat sink, but which also require the diode assembly to operate in ambient temperatures of up to 80"C. This poses design problems, for thermal boundaries between the diode bar and the heat sink may typically result in the heat sink having to be maintained at a temperature of about 10 C requiring excessively large and efficient Peltier devices to maintain a heat sink at such temperatures in an ambient environment which is at 800 C. The problem is further compounded by the heat being generated in such a small area, resulting in it being difficult to distribute that heat to the operating surfaces of large area Peltier devices.
The further the distance from the diode, the lower the operating temperature of the Peltier device required because of the extended thermal gradient.
According to the present invention there is provided a heat sink and a plurality of sub assemblies releasably attached thereto, each sub assembly comprising an electrically and thermally conductive base plate and a solid state laser diode bar attached to the base plate, the base plate forming a first electrode of the diode bar and having at least one heat pipe incorporated therein.
In previous designs the objective has been to minimise the separation between a heat sink and the diode bar heat source, in order to minimise the thermal gradient. A copper base plate has therefore been used having a minimum thickness sufficient to provide the required rigidity for the diode bar. This base plate, with the diode bar and other integers of the diode bar assembly attached, is then mounted on the heat sink with a thin layer of diamond positioned between the copper base plate and the heat sink. The diamond layer electrically insulates the base plate from the heat sink, which base plate forms a first electrode of the diode bar. The inventor has realised that having a relatively thick base plate and incorporating heat pipes within the base plate, which can be 200 to 300 times more thermally conductive than copper, then the heat generated by the diode bar can be dispersed over a relatively large area without creating a large thermal gradient. Because of the larger area in contact with the heat sink the energy density at the interface is less, enabling the heat sink to be maintained at a higher temperature whilst maintaining the diode bar at the required operating temperature. Also because each base plate is relatively thick the sub assemblies can be releasably mounted on the heat sink so that any failed diode bar can be replaced with its associated sub assembly. Furthermore where a diamond insulating layer between the base plate and the heat sink would normally be required this can be substituted for a slightly less thermally conductive, but considerably cheaper material such as silver loaded rubber.
Preferably the assembly further comprises an insulating layer positioned on the base plate, behind the diode bar, and an electrically conductive layer on top of said insulating layer, the electrically conductive layer extending over and being in electrical contact with the diode bar to form a second electrode of the diode bar. The conductive layers forming the first and second electrodes need not extend over the whole width of the assembly, neither do they have to be formed by vapour deposition, for such layers could be of a suitable foil material or sheet.
One embodiment of the present invention will now be described by way of example only with reference to the accompanying figures, in which like numerals are used to indicate like parts, and in which: Figure 1A is a partly cut away plan view of a semi-conductor laser diode assembly in accordance with the present invention; and Figures 1B and Figure 1C are side and front elevations respectively of the assembly of Figure 1; Figure 2A is a side elevation of the assembly of Figure 1 A mounted on a heat sink; and Figure 2B is a plan view of the arrangement of Figure 2A.
Referring to Figures 1A, 1B and 1C, the assembly indicated generally as l comprises a copper base plate 2 in which are embedded heat pipes 3. These are inserted in cylindrical bores within the base plate 2 and are bonded in place with silver loaded epoxy or low temperature solder ensuring good thermal contact with the copper of the base plate 2. The base plate 2 is 4 mm deep and the diameter of the heat pipe is 3 mm.
(Each heat pipe comprises a cylindrical housing sealed at each end which is filled with water and water vapour).
A Semiconductor diode bar 4 flashed on both sides with nickel is soldered to the upper surface of the base plate 2 with a higher temperature solder, (in Figures 1 B and 1 C the various components are shown separated for clarity). Also secured to the upper surface of the base plate 2 is an electrical insulator 5 which may be bonded in place by a suitable adhesive. The insulator is the same thickness as the diode bar 4 in its assembled condition, typically 0.1 mm, and provides a flush upper surface on which a conductive layer 6 of copper is placed. This conductive layer 6 is soldered with an indium based solder to the diode bar 4 and provides a second electrode to the diode bar, the base plate 2 providing the first electrode. An alternative arrangement is illustrated in Figure 10 where the conductive layer 6 terminates before the diode bar 4, with electrical connection being made by an array of wires 6a along the bars length, only one of which is shown, attached to a layer of gold or indium on the upper surface of the bar 4, which forms an upper electrode.
Referring now to Figures 2A and 2B, the assembly of Figure 1 is shown mounted on a heat sink 7. The heat sink 7 comprises a Peltier cooling device and a thermo-couple (not shown) arranged to maintain the heat sink at a desired temperature. The assembly 1 has deposited on its upper surface a layer of compliant material 8 such as silicone and is sandwiched between the upper surface of the heat sink 7 and a clamping bar 9, by means of screws 10. The base plate 2 of the assembly is electrically insulated from the metallic heat sink 7 by insulating layer 11.
Referring to Figure 2B it can be seen that two assemblies, la and lb, are mounted on the heat sink 7 such that the respective diode bars of each device 4a and 4b are arranged side by side. This provides, in effect, a diode bar twice the length of that available as a single unit. Conductors 12, 13 and 14 are connected to the respective first and second electrodes as shown such that the diode bars are electrically connected in a series thereby ensuring uniform operation.
The above describes one embodiment of the present invention. However other arrangements within the scope of the appended claims may occur to a person skilled in the art.

Claims (8)

  1. CLAIMS 1. A Semiconductor laser diode bar assembly comprising a heat sink and a plurality of sub assemblies releasably attached thereto, each sub assembly comprising an electrically and thermally conductive base plate and a solid state laser diode bar attached to the base plate, the base plate forming a first electrode of the diode bar and having at least one heat pipe incorporated therein.
  2. 2. An assembly, as claimed in claim 1 wherein the sub assemblies are mounted on a substantially planar surface of the heat sink.
  3. 3. An assembly as claimed in claim 1 or 2 wherein the sub assemblies are arranged such that light emitting faces of their respective diode bars form a long linear array.
  4. 4. An assembly as claimed in any preceding claim further comprising a thermally conductive electrically insulating layer arranged between each base plate and the heat sink.
  5. 5. An assembly as claimed in any preceding claim wherein each sub assembly further comprises an insulating layer positioned on the base layer behind the diode bar and an electrically conductive layer on top of said insulating layer, the electrically conductive layer extending over and being in electrical contact with the diode bar to form a second electrode of the diode bar.
  6. 6. An assembly as claimed in any one of claims 3 to 5 wherein the heat sink is arranged to be maintained at a constant temperature.
  7. 7. An assembly as claimed in any preceding claims wherein the heat pipes are inserted in bores in respective base plates.
  8. 8. An assembly substantially as hereinbefore described with reference to, and/or as illustrated in, the accompanying drawings.
GB9819708A 1997-09-26 1998-09-11 A semiconductor laser diode bar assembly Expired - Fee Related GB2329758B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9720376.4A GB9720376D0 (en) 1997-09-26 1997-09-26 A semi-conductor laser diode bar assembly

Publications (4)

Publication Number Publication Date
GB9819708D0 GB9819708D0 (en) 1998-11-04
GB2329758A true GB2329758A (en) 1999-03-31
GB2329758A8 GB2329758A8 (en) 1999-06-29
GB2329758B GB2329758B (en) 1999-08-25

Family

ID=10819610

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9720376.4A Pending GB9720376D0 (en) 1997-09-26 1997-09-26 A semi-conductor laser diode bar assembly
GB9819708A Expired - Fee Related GB2329758B (en) 1997-09-26 1998-09-11 A semiconductor laser diode bar assembly

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9720376.4A Pending GB9720376D0 (en) 1997-09-26 1997-09-26 A semi-conductor laser diode bar assembly

Country Status (6)

Country Link
EP (1) EP1018196A1 (en)
JP (1) JP2001518722A (en)
CA (1) CA2304859A1 (en)
GB (2) GB9720376D0 (en)
IL (1) IL135213A0 (en)
WO (1) WO1999017411A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1206018A2 (en) * 2000-11-08 2002-05-15 The Furukawa Electric Co., Ltd. Light source comprising laser diode module
WO2002047224A2 (en) * 2000-12-06 2002-06-13 Jenoptik Laserdiode Gmbh Diode laser arrangement with several diode laser rows
US6872011B2 (en) 2001-03-16 2005-03-29 The Furukawa Electric Co., Ltd. Light source having plural laser diode modules

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5031184A (en) * 1989-07-01 1991-07-09 Carl-Zeiss-Stiftung Cooling arrangement for a semiconductor pump source
US5105429A (en) * 1990-07-06 1992-04-14 The United States Of America As Represented By The Department Of Energy Modular package for cooling a laser diode array
US5107091A (en) * 1990-09-14 1992-04-21 Applied Solar Energy Corporation Laser diode array mounting module
US5253260A (en) * 1991-12-20 1993-10-12 Hughes Aircraft Company Apparatus and method for passive heat pipe cooling of solid state laser heads
US5309457A (en) * 1992-12-22 1994-05-03 Minch Richard B Micro-heatpipe cooled laser diode array
WO1997018606A1 (en) * 1995-11-13 1997-05-22 Commissariat A L'energie Atomique Cooled laser diode array assembly
US5764675A (en) * 1994-06-30 1998-06-09 Juhala; Roland E. Diode laser array

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5105430A (en) * 1991-04-09 1992-04-14 The United States Of America As Represented By The United States Department Of Energy Thin planar package for cooling an array of edge-emitting laser diodes
DE4315580A1 (en) * 1993-05-11 1994-11-17 Fraunhofer Ges Forschung Arrangement comprising laser diodes and a cooling system, and method for its production

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5031184A (en) * 1989-07-01 1991-07-09 Carl-Zeiss-Stiftung Cooling arrangement for a semiconductor pump source
US5105429A (en) * 1990-07-06 1992-04-14 The United States Of America As Represented By The Department Of Energy Modular package for cooling a laser diode array
US5107091A (en) * 1990-09-14 1992-04-21 Applied Solar Energy Corporation Laser diode array mounting module
US5253260A (en) * 1991-12-20 1993-10-12 Hughes Aircraft Company Apparatus and method for passive heat pipe cooling of solid state laser heads
US5309457A (en) * 1992-12-22 1994-05-03 Minch Richard B Micro-heatpipe cooled laser diode array
US5764675A (en) * 1994-06-30 1998-06-09 Juhala; Roland E. Diode laser array
WO1997018606A1 (en) * 1995-11-13 1997-05-22 Commissariat A L'energie Atomique Cooled laser diode array assembly

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1206018A2 (en) * 2000-11-08 2002-05-15 The Furukawa Electric Co., Ltd. Light source comprising laser diode module
EP1206018A3 (en) * 2000-11-08 2002-11-06 The Furukawa Electric Co., Ltd. Light source comprising laser diode module
US6839367B2 (en) 2000-11-08 2005-01-04 The Furukawa Electric Co., Ltd. Light source comprising laser diode module
WO2002047224A2 (en) * 2000-12-06 2002-06-13 Jenoptik Laserdiode Gmbh Diode laser arrangement with several diode laser rows
WO2002047224A3 (en) * 2000-12-06 2004-02-19 Jenoptik Laserdiode Gmbh Diode laser arrangement with several diode laser rows
US6898222B2 (en) 2000-12-06 2005-05-24 Jenoptik Laserdiode Gmbh Diode laser arrangement with a plurality of diode laser arrays
US6872011B2 (en) 2001-03-16 2005-03-29 The Furukawa Electric Co., Ltd. Light source having plural laser diode modules

Also Published As

Publication number Publication date
EP1018196A1 (en) 2000-07-12
IL135213A0 (en) 2001-05-20
GB2329758A8 (en) 1999-06-29
WO1999017411A1 (en) 1999-04-08
CA2304859A1 (en) 1999-04-08
GB9819708D0 (en) 1998-11-04
JP2001518722A (en) 2001-10-16
GB2329758B (en) 1999-08-25
GB9720376D0 (en) 1997-11-26

Similar Documents

Publication Publication Date Title
US5991162A (en) High-frequency integrated circuit device and manufacture method thereof
US6029343A (en) Insulated surface mount circuit board construction
US7557442B2 (en) Power semiconductor arrangement
US6826916B2 (en) Laser module, Peltier module, and Peltier module integrated heat spreader
JP4766588B2 (en) Power management for spatial power combiners
CN110809841B (en) Semiconductor laser device
SE516315C2 (en) Control circuit arrangement for a drive unit for an electric motor
KR20190123294A (en) Mounting the LED Element on a Flat Carrier
KR102282209B1 (en) Mounting assembly and lighting device
US5031184A (en) Cooling arrangement for a semiconductor pump source
JP2002314011A (en) Laser diode element
US5469329A (en) Printed circuit board with bi-metallic heat spreader
EP1025748B1 (en) A chip supporting element and use thereof
GB2329758A (en) A semiconductor laser diode bar assembly
US20110032962A1 (en) Semiconductor Laser Device
CN111354684A (en) Chip substrate and manufacturing method thereof, packaged chip and packaging method thereof
CN106898945B (en) High-power semiconductor laser packaging structure capable of realizing stable wavelength
US8906748B2 (en) Method for packaging a semiconductor structure
CN109075241B (en) Thermal block assembly, LED arrangement with thermal block assembly and method of manufacturing the thermal assembly
JP2009231685A (en) Power semiconductor device
CN209747497U (en) Chip substrate and packaged chip
KR102292973B1 (en) Uv led array with power interconnect and heat sink
KR20120002982A (en) Pressure support for an electronic circuit
JP2017045959A (en) Package for high frequency semiconductor device and high frequency semiconductor device
EP0804054A1 (en) Insulated surface mount circuit board construction

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050911