GB2327126B - Method and device for analytical monitoring of a bath for the electroplating treatment of substrate surfaces - Google Patents

Method and device for analytical monitoring of a bath for the electroplating treatment of substrate surfaces

Info

Publication number
GB2327126B
GB2327126B GB9813732A GB9813732A GB2327126B GB 2327126 B GB2327126 B GB 2327126B GB 9813732 A GB9813732 A GB 9813732A GB 9813732 A GB9813732 A GB 9813732A GB 2327126 B GB2327126 B GB 2327126B
Authority
GB
United Kingdom
Prior art keywords
bath
substrate surfaces
electroplating treatment
analytical monitoring
analytical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9813732A
Other versions
GB2327126A (en
GB9813732D0 (en
Inventor
Marjan Bele
Jurgen Otto Besenhard
Stane Pejovnik
Heinrich Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of GB9813732D0 publication Critical patent/GB9813732D0/en
Publication of GB2327126A publication Critical patent/GB2327126A/en
Application granted granted Critical
Publication of GB2327126B publication Critical patent/GB2327126B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
    • G01N31/162—Determining the equivalent point by means of a discontinuity
    • G01N31/164—Determining the equivalent point by means of a discontinuity by electrical or electrochemical means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
    • H05K3/424—Plated through-holes or plated via connections characterised by electroplating method by direct electroplating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Molecular Biology (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Automation & Control Theory (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Chemically Coating (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
GB9813732A 1997-07-10 1998-06-26 Method and device for analytical monitoring of a bath for the electroplating treatment of substrate surfaces Expired - Fee Related GB2327126B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1997131184 DE19731184C2 (en) 1997-07-10 1997-07-10 Device for the analytical monitoring of a bath for electroplating treatment of substrate surfaces

Publications (3)

Publication Number Publication Date
GB9813732D0 GB9813732D0 (en) 1998-08-26
GB2327126A GB2327126A (en) 1999-01-13
GB2327126B true GB2327126B (en) 1999-09-08

Family

ID=7836349

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9813732A Expired - Fee Related GB2327126B (en) 1997-07-10 1998-06-26 Method and device for analytical monitoring of a bath for the electroplating treatment of substrate surfaces

Country Status (5)

Country Link
JP (1) JPH1171700A (en)
DE (1) DE19731184C2 (en)
FR (1) FR2765894B1 (en)
GB (1) GB2327126B (en)
TW (1) TW445308B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003005012A1 (en) * 2001-07-06 2003-01-16 Metso Field Systems Oy Method for measuring of flow potential of a water solution and an apparatus for applying of method
AU2003219869A1 (en) * 2002-03-08 2003-09-22 Advanced Technology Materials, Inc. Methods and apparatuses for analyzing solder plating solutions
US6913686B2 (en) 2002-12-10 2005-07-05 Advanced Technology Materials, Inc. Methods for analyzing solder plating solutions
JP2008537782A (en) * 2005-04-08 2008-09-25 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク Method for monitoring plating and etching baths
EP1955061A1 (en) * 2005-11-28 2008-08-13 BTG Instruments GmbH Device for analysing a sample fluid
DE102005061638B4 (en) * 2005-12-22 2007-09-20 BTG Mütek GmbH Device for analyzing sample liquids
DE102014001759B4 (en) * 2014-02-10 2016-01-07 Particle Metrix Gmbh Method and device for rapid analysis of the charge characteristics and the size distribution of particles

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2235782A (en) * 1989-08-29 1991-03-13 Lasertrim Ltd Streaming current detector and fluid treatment system using same
WO1992021026A1 (en) * 1991-05-13 1992-11-26 The Wiggins Teape Group Limited Streaming potential measuring cell
US5502389A (en) * 1994-05-03 1996-03-26 Mutek Analytic Gmbh Apparatus for polyelectrolyte measurement with an ultrasonically driven liner

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3369984A (en) * 1966-03-04 1968-02-20 Dow Chemical Co Control apparatus
DE2337165C3 (en) * 1973-07-21 1979-11-29 Felix Schoeller Jr. Gmbh & Co Kg, 4500 Osnabrueck Method and device for measuring the electrokinetic potential (Z potential)
JPS6234098B2 (en) * 1980-09-12 1987-07-24 Commw Of Australia
US4969979A (en) * 1989-05-08 1990-11-13 International Business Machines Corporation Direct electroplating of through holes
US4961147A (en) * 1989-09-28 1990-10-02 Moore Zack J Apparatus for measuring the electric charge condition of non-conductive particles in a liquid medium
DE4008916C1 (en) * 1990-03-20 1991-05-23 Muetek Gmbh, 8036 Herrsching, De
DE4025558A1 (en) * 1990-08-11 1992-02-13 Basf Magnetics Gmbh Stable magnetic dispersions for prodn. of recording media - by treating solvent, additives and-or binder with ion-exchanger contg. polar components of the dispersion, before adding to the dispersion
DE4141416A1 (en) * 1991-12-11 1993-06-17 Schering Ag METHOD FOR COATING SURFACES WITH FINE-PARTICLE SOLID PARTICLES
CA2102240A1 (en) * 1991-04-22 1992-10-23 Heinrich Meyer Method for selectively coating non-conductors with carbon particles and use of copper containing solutions therein
US5220283A (en) * 1991-06-11 1993-06-15 Milton Roy Company Calibration of streaming current detection
WO1993019092A1 (en) * 1992-03-19 1993-09-30 Centre National De La Recherche Scientifique Defective recombinant adenoviruses expressing characteristic epstein-barr virus proteins
DE4442685C1 (en) * 1994-11-30 1996-03-07 Fraunhofer Ges Forschung Voltage potential determn. appts. for material biocompatibility in medicine
WO1997036173A1 (en) * 1996-03-22 1997-10-02 Dr. W. Kolb Ag Device for determining charge

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2235782A (en) * 1989-08-29 1991-03-13 Lasertrim Ltd Streaming current detector and fluid treatment system using same
WO1992021026A1 (en) * 1991-05-13 1992-11-26 The Wiggins Teape Group Limited Streaming potential measuring cell
US5502389A (en) * 1994-05-03 1996-03-26 Mutek Analytic Gmbh Apparatus for polyelectrolyte measurement with an ultrasonically driven liner

Also Published As

Publication number Publication date
JPH1171700A (en) 1999-03-16
FR2765894B1 (en) 2000-10-13
DE19731184A1 (en) 1999-01-14
FR2765894A1 (en) 1999-01-15
GB2327126A (en) 1999-01-13
DE19731184C2 (en) 1999-10-07
TW445308B (en) 2001-07-11
GB9813732D0 (en) 1998-08-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030626