GB2281254B - Polishing polycrystalline films - Google Patents

Polishing polycrystalline films

Info

Publication number
GB2281254B
GB2281254B GB9317517A GB9317517A GB2281254B GB 2281254 B GB2281254 B GB 2281254B GB 9317517 A GB9317517 A GB 9317517A GB 9317517 A GB9317517 A GB 9317517A GB 2281254 B GB2281254 B GB 2281254B
Authority
GB
United Kingdom
Prior art keywords
polycrystalline films
polishing polycrystalline
polishing
films
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9317517A
Other versions
GB2281254A (en
GB9317517D0 (en
Inventor
Rudolf August Herbert Heinecke
Ian Paul Llewellyn
Robert Carnegie Chittick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Priority to GB9317517A priority Critical patent/GB2281254B/en
Publication of GB9317517D0 publication Critical patent/GB9317517D0/en
Publication of GB2281254A publication Critical patent/GB2281254A/en
Application granted granted Critical
Publication of GB2281254B publication Critical patent/GB2281254B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
GB9317517A 1993-08-23 1993-08-23 Polishing polycrystalline films Expired - Fee Related GB2281254B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9317517A GB2281254B (en) 1993-08-23 1993-08-23 Polishing polycrystalline films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9317517A GB2281254B (en) 1993-08-23 1993-08-23 Polishing polycrystalline films

Publications (3)

Publication Number Publication Date
GB9317517D0 GB9317517D0 (en) 1993-10-06
GB2281254A GB2281254A (en) 1995-03-01
GB2281254B true GB2281254B (en) 1996-11-27

Family

ID=10740900

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9317517A Expired - Fee Related GB2281254B (en) 1993-08-23 1993-08-23 Polishing polycrystalline films

Country Status (1)

Country Link
GB (1) GB2281254B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5711698A (en) * 1995-05-05 1998-01-27 Saint-Gobain/Norton Industrial Ceramics Corp Method of synthetic diamond ablation with an oxygen plasma and synthetic diamonds etched accordingly
US6013191A (en) * 1997-10-27 2000-01-11 Advanced Refractory Technologies, Inc. Method of polishing CVD diamond films by oxygen plasma
EP2719794B1 (en) 2007-01-22 2018-08-22 Element Six Technologies Limited Plasma etching of diamond surfaces

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062484A (en) * 1996-08-20 1998-03-06 Chubu Electric Power Co Inc Heating device for detecting failure point

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062484A (en) * 1996-08-20 1998-03-06 Chubu Electric Power Co Inc Heating device for detecting failure point

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Research Disclosures,Aug.1992,page647,No.34080,Planarisationof Tungsten filled Vias etc. *

Also Published As

Publication number Publication date
GB2281254A (en) 1995-03-01
GB9317517D0 (en) 1993-10-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20040823