GB2278013B - Method of forming nano-scale electronic device - Google Patents

Method of forming nano-scale electronic device

Info

Publication number
GB2278013B
GB2278013B GB9309581A GB9309581A GB2278013B GB 2278013 B GB2278013 B GB 2278013B GB 9309581 A GB9309581 A GB 9309581A GB 9309581 A GB9309581 A GB 9309581A GB 2278013 B GB2278013 B GB 2278013B
Authority
GB
United Kingdom
Prior art keywords
electronic device
scale electronic
forming nano
nano
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9309581A
Other versions
GB2278013A (en
GB9309581D0 (en
Inventor
David A Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Europe Ltd
Original Assignee
Hitachi Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Europe Ltd filed Critical Hitachi Europe Ltd
Priority to GB9309581A priority Critical patent/GB2278013B/en
Publication of GB9309581D0 publication Critical patent/GB9309581D0/en
Publication of GB2278013A publication Critical patent/GB2278013A/en
Application granted granted Critical
Publication of GB2278013B publication Critical patent/GB2278013B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
GB9309581A 1993-05-10 1993-05-10 Method of forming nano-scale electronic device Expired - Fee Related GB2278013B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9309581A GB2278013B (en) 1993-05-10 1993-05-10 Method of forming nano-scale electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9309581A GB2278013B (en) 1993-05-10 1993-05-10 Method of forming nano-scale electronic device

Publications (3)

Publication Number Publication Date
GB9309581D0 GB9309581D0 (en) 1993-06-23
GB2278013A GB2278013A (en) 1994-11-16
GB2278013B true GB2278013B (en) 1996-11-13

Family

ID=10735205

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9309581A Expired - Fee Related GB2278013B (en) 1993-05-10 1993-05-10 Method of forming nano-scale electronic device

Country Status (1)

Country Link
GB (1) GB2278013B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9724642D0 (en) 1997-11-21 1998-01-21 British Tech Group Single electron devices
IL140229A0 (en) * 2000-12-11 2002-02-10 Ram memory based on nanotechnology, capable, among other things, of replacing the hard disk in computers
CN104749325B (en) * 2015-04-13 2016-09-21 清华大学 Transport property measuring method in situ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0427443A2 (en) * 1989-11-07 1991-05-15 International Business Machines Corporation Process and structure wherein atoms are repositioned on a surface using a scanning tunnelling microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0427443A2 (en) * 1989-11-07 1991-05-15 International Business Machines Corporation Process and structure wherein atoms are repositioned on a surface using a scanning tunnelling microscope

Also Published As

Publication number Publication date
GB2278013A (en) 1994-11-16
GB9309581D0 (en) 1993-06-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050510