GB2276034B - Manufacture of grating structures - Google Patents

Manufacture of grating structures

Info

Publication number
GB2276034B
GB2276034B GB9407025A GB9407025A GB2276034B GB 2276034 B GB2276034 B GB 2276034B GB 9407025 A GB9407025 A GB 9407025A GB 9407025 A GB9407025 A GB 9407025A GB 2276034 B GB2276034 B GB 2276034B
Authority
GB
United Kingdom
Prior art keywords
manufacture
grating structures
grating
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9407025A
Other versions
GB9407025D0 (en
GB2276034A (en
Inventor
Nicholas John Phillips
Terence Edward Yeo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Publication of GB9407025D0 publication Critical patent/GB9407025D0/en
Publication of GB2276034A publication Critical patent/GB2276034A/en
Application granted granted Critical
Publication of GB2276034B publication Critical patent/GB2276034B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Semiconductor Lasers (AREA)
GB9407025A 1992-04-08 1993-04-08 Manufacture of grating structures Expired - Fee Related GB2276034B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB929207627A GB9207627D0 (en) 1992-04-08 1992-04-08 Manufacture of optical grating structures
PCT/GB1993/000750 WO1993021671A1 (en) 1992-04-08 1993-04-08 Manufacture of grating structures

Publications (3)

Publication Number Publication Date
GB9407025D0 GB9407025D0 (en) 1994-06-29
GB2276034A GB2276034A (en) 1994-09-14
GB2276034B true GB2276034B (en) 1995-11-22

Family

ID=10713627

Family Applications (2)

Application Number Title Priority Date Filing Date
GB929207627A Pending GB9207627D0 (en) 1992-04-08 1992-04-08 Manufacture of optical grating structures
GB9407025A Expired - Fee Related GB2276034B (en) 1992-04-08 1993-04-08 Manufacture of grating structures

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB929207627A Pending GB9207627D0 (en) 1992-04-08 1992-04-08 Manufacture of optical grating structures

Country Status (4)

Country Link
EP (1) EP0635168A1 (en)
JP (1) JPH07508593A (en)
GB (2) GB9207627D0 (en)
WO (1) WO1993021671A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6309580B1 (en) 1995-11-15 2001-10-30 Regents Of The University Of Minnesota Release surfaces, particularly for use in nanoimprint lithography
US7758794B2 (en) 2001-10-29 2010-07-20 Princeton University Method of making an article comprising nanoscale patterns with reduced edge roughness
EP0867735A3 (en) * 1997-03-26 1999-08-04 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Method for manufacturing of integrated optical components
FR2775355B1 (en) * 1998-02-26 2000-03-31 Alsthom Cge Alcatel SEMICONDUCTOR OPTICAL REFLECTOR AND MANUFACTURING METHOD
US7211214B2 (en) 2000-07-18 2007-05-01 Princeton University Laser assisted direct imprint lithography
FR2935842A1 (en) * 2008-09-05 2010-03-12 Commissariat Energie Atomique Textured zone forming method for solar cell substrate, involves forming mask in film by applying pressure using mold, and etching mask and substrate till mask is entirely removed, where mask has patterns complementary to that of substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2079536A (en) * 1980-07-03 1982-01-20 Commissariat Energie Atomique Process for producing an optical network
EP0175460A1 (en) * 1984-08-08 1986-03-26 Dr. Johannes Heidenhain GmbH Manufacture of diffraction gratings
US4810547A (en) * 1986-03-26 1989-03-07 Nippon Sheet Glass Co., Ltd. Substrate with fine grooves and method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2079536A (en) * 1980-07-03 1982-01-20 Commissariat Energie Atomique Process for producing an optical network
EP0175460A1 (en) * 1984-08-08 1986-03-26 Dr. Johannes Heidenhain GmbH Manufacture of diffraction gratings
US4810547A (en) * 1986-03-26 1989-03-07 Nippon Sheet Glass Co., Ltd. Substrate with fine grooves and method for manufacturing the same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS vol 55 no 5, 31/7/89 NEW YORK US pages 415-417 *
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY PARTB vol 10 no 1 1/2/92 NEW YORK US pges 114-117 *

Also Published As

Publication number Publication date
EP0635168A1 (en) 1995-01-25
GB9407025D0 (en) 1994-06-29
WO1993021671A1 (en) 1993-10-28
JPH07508593A (en) 1995-09-21
GB2276034A (en) 1994-09-14
GB9207627D0 (en) 1992-05-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19970408