GB2271044A - Device for plasma-arc processing of material - Google Patents

Device for plasma-arc processing of material

Info

Publication number
GB2271044A
GB2271044A GB9316309A GB9316309A GB2271044A GB 2271044 A GB2271044 A GB 2271044A GB 9316309 A GB9316309 A GB 9316309A GB 9316309 A GB9316309 A GB 9316309A GB 2271044 A GB2271044 A GB 2271044A
Authority
GB
United Kingdom
Prior art keywords
plasma
open magnetic
solenoids
electric arc
arc processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9316309A
Other versions
GB2271044B (en
GB9316309D0 (en
Inventor
Pavel Pavlovich Kulik
Oleg Vyacheslavovich Singayin
Iskander Malikovich Tokmulin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPA
Original Assignee
OPA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPA filed Critical OPA
Publication of GB9316309D0 publication Critical patent/GB9316309D0/en
Publication of GB2271044A publication Critical patent/GB2271044A/en
Application granted granted Critical
Publication of GB2271044B publication Critical patent/GB2271044B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Plasma Technology (AREA)
  • Arc Welding Control (AREA)

Abstract

A device for plasma-arc processing of material comprises a charge conduit (1) around which are mounted electric arc plasma jet generators, and a magnetic system consisting of open magnetic circuits, each electric arc plasma jet generator consisting of two electrode units (4). Solenoids (9) are mounted on the poles (8) of the open magnetic circuit. The section of the open magnetic circuit between the solenoids (9) is provided with a ferromagnetic tap. The invention may be used in different fields of industry for plasma-thermal or plasma-chemical processing of materials.
GB9316309A 1990-12-26 1990-12-26 Apparatus for plasma-arc machining Expired - Fee Related GB2271044B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1990/000287 WO1992012610A1 (en) 1990-12-26 1990-12-26 Device for plasma-arc processing of material

Publications (3)

Publication Number Publication Date
GB9316309D0 GB9316309D0 (en) 1993-09-22
GB2271044A true GB2271044A (en) 1994-03-30
GB2271044B GB2271044B (en) 1995-06-21

Family

ID=21617724

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9316309A Expired - Fee Related GB2271044B (en) 1990-12-26 1990-12-26 Apparatus for plasma-arc machining

Country Status (2)

Country Link
GB (1) GB2271044B (en)
WO (1) WO1992012610A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997018694A1 (en) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Plasma jet reactor
WO1997018692A1 (en) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Four-nozzle plasma generator for forming an activated jet
WO1997019895A1 (en) * 1995-11-27 1997-06-05 Volgogradskoe Otkrytoe Aktsionernoe Obschestvo 'khimprom' Process for obtaining titanium dioxide and a plasmo-chemical reactor for carrying out said process
WO1997046056A1 (en) * 1996-05-31 1997-12-04 Ipec Precision, Inc. Apparatus for generating and deflecting a plasma jet
GB2324196A (en) * 1997-04-09 1998-10-14 Aea Technology Plc Plasma processing
WO1998053201A1 (en) * 1997-05-23 1998-11-26 Societe Nationale D'etude Et De Construction De Moteurs D'aviation 'snecma' Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same
US5949193A (en) * 1995-10-11 1999-09-07 Valtion Teknillinen Tutkimuskeskus Plasma device with resonator circuit providing spark discharge and magnetic field

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996023394A1 (en) * 1995-01-26 1996-08-01 ZAKRYTOE AKTSIONERNOE OBSCHESTVO PROIZVODSTVENNAYA FIRMA 'Az' Device for generating a plasma stream
EP0902961B1 (en) 1996-05-31 2000-07-05 IPEC Precision, Inc. Method for treating articles with a plasma jet
JP3537447B2 (en) 1996-10-29 2004-06-14 トル‐シ・テクノロジーズ・インコーポレイテッド Integrated circuit and manufacturing method thereof
US5767627A (en) * 1997-01-09 1998-06-16 Trusi Technologies, Llc Plasma generation and plasma processing of materials
US6139678A (en) 1997-11-20 2000-10-31 Trusi Technologies, Llc Plasma processing methods and apparatus
US6168697B1 (en) 1998-03-10 2001-01-02 Trusi Technologies Llc Holders suitable to hold articles during processing and article processing methods
US6660643B1 (en) 1999-03-03 2003-12-09 Rwe Schott Solar, Inc. Etching of semiconductor wafer edges
US6287976B1 (en) 1999-05-19 2001-09-11 Tru-Si Technologies, Inc. Plasma processing methods and apparatus
US6423923B1 (en) 2000-08-04 2002-07-23 Tru-Si Technologies, Inc. Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream
US6749764B1 (en) 2000-11-14 2004-06-15 Tru-Si Technologies, Inc. Plasma processing comprising three rotational motions of an article being processed
KR100464856B1 (en) * 2002-11-07 2005-01-05 삼성전자주식회사 Method for etching a surface of workpiece and a backside of silicon substrate
US7671294B2 (en) 2006-11-28 2010-03-02 Vladimir Belashchenko Plasma apparatus and system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2622029A1 (en) * 1975-05-20 1976-12-02 Soudure Autogene Elect DEVICE FOR GENERATING A HIGH-TEMPERATURE PLASMA
GB1525393A (en) * 1974-10-02 1978-09-20 Daido Steel Co Ltd Heat treating apparatus and method
EP0075953A1 (en) * 1981-09-30 1983-04-06 Kabushiki Kaisha Toshiba Plasma devices
DE3805732A1 (en) * 1988-02-24 1989-09-07 Linde Ag Plasma burner

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1525393A (en) * 1974-10-02 1978-09-20 Daido Steel Co Ltd Heat treating apparatus and method
DE2622029A1 (en) * 1975-05-20 1976-12-02 Soudure Autogene Elect DEVICE FOR GENERATING A HIGH-TEMPERATURE PLASMA
EP0075953A1 (en) * 1981-09-30 1983-04-06 Kabushiki Kaisha Toshiba Plasma devices
DE3805732A1 (en) * 1988-02-24 1989-09-07 Linde Ag Plasma burner

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5949193A (en) * 1995-10-11 1999-09-07 Valtion Teknillinen Tutkimuskeskus Plasma device with resonator circuit providing spark discharge and magnetic field
WO1997018694A1 (en) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Plasma jet reactor
WO1997018692A1 (en) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Four-nozzle plasma generator for forming an activated jet
US6278241B1 (en) * 1995-11-13 2001-08-21 Tepla Ag Four-nozzle plasma generator for forming an activated jet
WO1997019895A1 (en) * 1995-11-27 1997-06-05 Volgogradskoe Otkrytoe Aktsionernoe Obschestvo 'khimprom' Process for obtaining titanium dioxide and a plasmo-chemical reactor for carrying out said process
WO1997046056A1 (en) * 1996-05-31 1997-12-04 Ipec Precision, Inc. Apparatus for generating and deflecting a plasma jet
US6040548A (en) * 1996-05-31 2000-03-21 Ipec Precision, Inc. Apparatus for generating and deflecting a plasma jet
GB2324196A (en) * 1997-04-09 1998-10-14 Aea Technology Plc Plasma processing
GB2324196B (en) * 1997-04-09 2001-10-24 Aea Technology Plc Plasma processing
WO1998053201A1 (en) * 1997-05-23 1998-11-26 Societe Nationale D'etude Et De Construction De Moteurs D'aviation 'snecma' Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same
US6158209A (en) * 1997-05-23 2000-12-12 Societe Nationale D'etude Et De Construction De Moteurs D'aviation-S.N.E.C.M.A. Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same

Also Published As

Publication number Publication date
GB2271044B (en) 1995-06-21
GB9316309D0 (en) 1993-09-22
WO1992012610A1 (en) 1992-07-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19971226