GB2261677B - Method and cell for etching semiconductors - Google Patents

Method and cell for etching semiconductors

Info

Publication number
GB2261677B
GB2261677B GB9124867A GB9124867A GB2261677B GB 2261677 B GB2261677 B GB 2261677B GB 9124867 A GB9124867 A GB 9124867A GB 9124867 A GB9124867 A GB 9124867A GB 2261677 B GB2261677 B GB 2261677B
Authority
GB
United Kingdom
Prior art keywords
cell
etching semiconductors
semiconductors
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9124867A
Other versions
GB9124867D0 (en
GB2261677A (en
Inventor
Leonard Evariste Berlouis
David Jorge Schiffrin
Laurence Michael Peter
Michael George Astles
Neal Thomson Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Southampton
Original Assignee
University of Southampton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Southampton filed Critical University of Southampton
Priority to GB9124867A priority Critical patent/GB2261677B/en
Publication of GB9124867D0 publication Critical patent/GB9124867D0/en
Publication of GB2261677A publication Critical patent/GB2261677A/en
Application granted granted Critical
Publication of GB2261677B publication Critical patent/GB2261677B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
    • H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/465—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
GB9124867A 1991-11-22 1991-11-22 Method and cell for etching semiconductors Expired - Fee Related GB2261677B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9124867A GB2261677B (en) 1991-11-22 1991-11-22 Method and cell for etching semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9124867A GB2261677B (en) 1991-11-22 1991-11-22 Method and cell for etching semiconductors

Publications (3)

Publication Number Publication Date
GB9124867D0 GB9124867D0 (en) 1992-01-15
GB2261677A GB2261677A (en) 1993-05-26
GB2261677B true GB2261677B (en) 1996-03-27

Family

ID=10705086

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9124867A Expired - Fee Related GB2261677B (en) 1991-11-22 1991-11-22 Method and cell for etching semiconductors

Country Status (1)

Country Link
GB (1) GB2261677B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1571492A (en) * 1977-03-04 1980-07-16 Secr Defence Fabrication of solid state devices
US4248683A (en) * 1980-04-22 1981-02-03 The United States Of America As Represented By The Secretary Of The Navy Localized anodic thinning
US4441967A (en) * 1982-12-23 1984-04-10 The United States Of America As Represented By The Secretary Of The Army Method of passivating mercury cadmium telluride using modulated DC anodization
US4462871A (en) * 1982-04-06 1984-07-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Epitaxial thinning process
EP0504956A2 (en) * 1991-03-15 1992-09-23 General Motors Corporation Selective electrochemical etching

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1571492A (en) * 1977-03-04 1980-07-16 Secr Defence Fabrication of solid state devices
US4248683A (en) * 1980-04-22 1981-02-03 The United States Of America As Represented By The Secretary Of The Navy Localized anodic thinning
US4462871A (en) * 1982-04-06 1984-07-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Epitaxial thinning process
US4441967A (en) * 1982-12-23 1984-04-10 The United States Of America As Represented By The Secretary Of The Army Method of passivating mercury cadmium telluride using modulated DC anodization
EP0504956A2 (en) * 1991-03-15 1992-09-23 General Motors Corporation Selective electrochemical etching

Also Published As

Publication number Publication date
GB9124867D0 (en) 1992-01-15
GB2261677A (en) 1993-05-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19991122