GB2247104A - Connections for semiconductor chips - Google Patents

Connections for semiconductor chips Download PDF

Info

Publication number
GB2247104A
GB2247104A GB9017944A GB9017944A GB2247104A GB 2247104 A GB2247104 A GB 2247104A GB 9017944 A GB9017944 A GB 9017944A GB 9017944 A GB9017944 A GB 9017944A GB 2247104 A GB2247104 A GB 2247104A
Authority
GB
United Kingdom
Prior art keywords
electrical
electrically conductive
covering member
substrate
compliant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9017944A
Other versions
GB9017944D0 (en
Inventor
Anthony Robert Corless
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thorn EMI PLC
Original Assignee
Thorn EMI PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorn EMI PLC filed Critical Thorn EMI PLC
Priority to GB9017944A priority Critical patent/GB2247104A/en
Publication of GB9017944D0 publication Critical patent/GB9017944D0/en
Publication of GB2247104A publication Critical patent/GB2247104A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5385Assembly of a plurality of insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/71Means for bonding not being attached to, or not being formed on, the surface to be connected
    • H01L24/72Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Abstract

An electrical apparatus includes a substrate (1) and electrical components (3) flip-chip bonded to the substrate. Onto the flip-chip bonded electrical components (3) is deposited compliant electrically conductive material (9). A covering member (5) is applied over the components and is provided with conductive tracking 7 for supplying signals to the components. <IMAGE>

Description

ELECTRICAL CONNECTING APPARATUS The present invention relates to flip chip bonded apparatus and in particular to an apparatus for applying voltage-biasing to a flip chip bonded element of such an apparatus.
The flip chip process is well known in its application for applying elements, such as semiconductor elements, to a substrate. The process forms a bond which is essentially straight and orthogonal to the faces of the elements being bonded. The process may further use the phenomenon of surface tension in order to bring the elements being bonded into highly accurate alignment. One example of the flip chip bonding method is disclosed in Japanese Patent Application No. J63 062266. In this application is described a method whereby the flip chip process is used to form a dustproof bond.
However, this type of process suffers from several drawbacks, one of which is manifest when it is required to form a single further connection to the faces of several flip chip bonded elements remote from the bond surface, such as, for example, when it is required to provide a common voltage bias to the bonded elements. For a common contact or connection to be readily provided, the faces remote from the bond surface should all be at the same height with respect to each other. Otherwise, it is difficult to ensure that all the elements will make contact with the common connection. This problem is relatively easy to overcome with elements mounted using a wire bonding technique, which is well known to those skilled in the art, yet poses difficulties with regard to flip chip bonding.
It is a first object of the present invention to provide an apparatus for providing single electrical connections to predetermined elements of a flip chip bonded structure.
It is a further object to provide a method whereby the apparatus may be produced.
Thus the invention provides apparatus for forming an electrical connection, the apparatus comprising; a substrate; at least one electrical component flip chip bonded to the substrate; at least one element of compliant electrically conductive material; and an electrically conductive covering member, the at least one element arranged to be situated intermediate and in electrical contact with the at least one component and with the covering member, and the at least one component being situated intermediate and in contact with the substrate and the at least one element.
Preferably the covering member comprises an electrical insulator having on a major surface thereof an electrically conductive track for contact by the at least one element of compliant electrically conductive material.
Preferably the track and or the covering member are adapted to apply a bias voltage to the at least one component via the at least one compliant electrically conductive material.
Preferably the covering member is in the form of a lid.
Preferably the electrical components comprise semiconductor integrated circuits.
According to a second aspect of the present invention there is provided a method of producing apparatus for forming an electrical connection, the method comprising applying compliant electrically conductive material to at least one electrical component flip chip bonded to a substrate, and to this electrically compliant material applying a covering member.
The invention will now be described, by way of example only, with reference to the following drawings, of which: Figure 1 shows a schematic representation of a flip chip bonded device and; Figure 2 shows a schematic representation of the same device incorporating the present invention.
Referring to Figure 1, a substrate 1 has electrical components 3, such as a semiconductor integrated circuit flip chip bonded to its uppermost surface.
By utilising a flip chip bond 4, the benefits of which are well known to those skilled in the art, the lower surfaces of the components 3 are in certain circumstances all equi-spaced from the uppermost surface of the substrate 1, i.e. the lower surfaces are all coplanar, as shown by line I.
This results because a flip chip bond is achieved by applying a known amount of bondable material to the substrate 1 and thus the separation of electrical components 3 and substrate 1 may be accurately controlled.
However, if now it is required to form an electrical connection to any or all of the components 3 such as applying a cover member such as lid or the like, problems may arise as their uppermost surfaces are not coplanar, because the components are not all of equal dimensions as shown by line II, which is almost universally the case in practice. By now referring to Figure 2 it will be seen that cover member 5 such as a lid may be placed over, and in electrical contact with all the components 3, by applying elements 7, such as globules or spots, of compliant electrically conductive material to the uppermost surfaces of components 3.
By applying an electrical tracking 9 to the cover member 5 it is possible for all or any of the components 3 to have applied to them, via the tracking 9 and elements 7, electrical signals such as one or more bias voltages or power signals when the cover member 5 is placed in contact with the elements 7.
It will be appreciated that it is not imperative to apply tracking 9 to the cover member 5. If the cover member 5 is constructed so as to be inherently electrically conductive, the need for tracking 9 may be negated.
It will further be appreciated that the use of a conducting block 10 may allow a direct connection between a terminal on the substrate 1 and a corresponding terminal on the lid 5. This may be utilised to allow, for example, bias voltages to be connected within the package or to allow a low electrical resistance of tracking on a lid to be used for power distribution around a module.
It will thus be appreciated that the present invention provides apparatus and a method whereby flip chip bonded components may have electrical signals applied to them via a cover member, such as a lid and thus negates the need for separate electrical connections to each of the components.

Claims (7)

1. Apparatus for forming an electrical connection, the apparatus comprising; a substrate; at least one electrical component flip chip bonded to the substrate; at least one element of compliant electrically conductive material; and an electrically conductive covering member, the at least one element arranged to be situated intermediate and in electrical contact with the at least one component and with the covering member, and the at least one component being situated intermediate and in contact with the substrate and the at least one element.
2. Apparatus according to claim 1 wherein the covering member comprises an electrical insulator having, on a major surface thereof, an electrically conductive track for contact by the at least one element of compliant electrically conductive material.
3. Apparatus according to claim 2 wherein the track and/or the covering member are arranged for applying a bias voltage to the at least one component via the at least one element of compliant electrically conductive material.
4. Apparatus according to either claim 2 or claim 3 wherein the covering member is in the form of a lid.
5. Apparatus according to any preceding claim wherein the electrical components comprise semiconductor integrated circuits.
6. Apparatus as substantially hereinbefore described with reference to the accompanying drawings.
7. A method of producing apparatus for forming an electrical connections, the method comprising applying compliant electrically conductive material to at least one electrical component flip chip bonded to a substrate, and to this electrically compliant material applying a covering member.
GB9017944A 1990-08-15 1990-08-15 Connections for semiconductor chips Withdrawn GB2247104A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9017944A GB2247104A (en) 1990-08-15 1990-08-15 Connections for semiconductor chips

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9017944A GB2247104A (en) 1990-08-15 1990-08-15 Connections for semiconductor chips

Publications (2)

Publication Number Publication Date
GB9017944D0 GB9017944D0 (en) 1990-09-26
GB2247104A true GB2247104A (en) 1992-02-19

Family

ID=10680726

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9017944A Withdrawn GB2247104A (en) 1990-08-15 1990-08-15 Connections for semiconductor chips

Country Status (1)

Country Link
GB (1) GB2247104A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1185857A (en) * 1966-08-16 1970-03-25 Signetics Corp Improvements in or relating to Integrated Circuit Assemblies
GB2013027A (en) * 1978-01-19 1979-08-01 Int Computers Ltd Integrated circuit packages

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1185857A (en) * 1966-08-16 1970-03-25 Signetics Corp Improvements in or relating to Integrated Circuit Assemblies
GB2013027A (en) * 1978-01-19 1979-08-01 Int Computers Ltd Integrated circuit packages

Also Published As

Publication number Publication date
GB9017944D0 (en) 1990-09-26

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)