GB2243311B - Exhaust processing apparatus - Google Patents

Exhaust processing apparatus

Info

Publication number
GB2243311B
GB2243311B GB9110393A GB9110393A GB2243311B GB 2243311 B GB2243311 B GB 2243311B GB 9110393 A GB9110393 A GB 9110393A GB 9110393 A GB9110393 A GB 9110393A GB 2243311 B GB2243311 B GB 2243311B
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
exhaust processing
exhaust
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9110393A
Other versions
GB9110393D0 (en
GB2243311A (en
Inventor
Toshimitsu Ohmine
Takaaki Honda
Keiiti Akagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62209799A external-priority patent/JP2739940B2/en
Priority claimed from JP62209849A external-priority patent/JPS6451125A/en
Priority claimed from JP62309563A external-priority patent/JPH01139125A/en
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of GB9110393D0 publication Critical patent/GB9110393D0/en
Publication of GB2243311A publication Critical patent/GB2243311A/en
Application granted granted Critical
Publication of GB2243311B publication Critical patent/GB2243311B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
GB9110393A 1987-08-24 1991-05-14 Exhaust processing apparatus Expired - Lifetime GB2243311B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP20985087 1987-08-24
JP62209799A JP2739940B2 (en) 1987-08-24 1987-08-24 Unreacted gas processing equipment
JP62209849A JPS6451125A (en) 1987-08-24 1987-08-24 Exhaust treatment device
JP20985187 1987-08-24
JP62309563A JPH01139125A (en) 1987-08-24 1987-12-09 Exhaust treatment equipment

Publications (3)

Publication Number Publication Date
GB9110393D0 GB9110393D0 (en) 1991-07-03
GB2243311A GB2243311A (en) 1991-10-30
GB2243311B true GB2243311B (en) 1992-01-22

Family

ID=27529485

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8818093A Expired - Lifetime GB2209005B (en) 1987-08-24 1988-07-29 Exhaust processing apparatus
GB9110393A Expired - Lifetime GB2243311B (en) 1987-08-24 1991-05-14 Exhaust processing apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB8818093A Expired - Lifetime GB2209005B (en) 1987-08-24 1988-07-29 Exhaust processing apparatus

Country Status (2)

Country Link
US (1) US4940213A (en)
GB (2) GB2209005B (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05154334A (en) * 1991-12-11 1993-06-22 Fujitsu Ltd Exhaust pump device of semiconductor manufacturing apparatus
US5534069A (en) * 1992-07-23 1996-07-09 Canon Kabushiki Kaisha Method of treating active material
JP3246708B2 (en) * 1995-05-02 2002-01-15 東京エレクトロン株式会社 Trap device and unreacted process gas exhaust mechanism using the same
DE69619942T2 (en) * 1995-12-14 2002-12-19 Suntec System Co Ltd Treatment system for exhaust gas
US5782942A (en) * 1996-01-11 1998-07-21 Vanguard International Semiconductor Corporation Filter system for semiconductor furnace
US5928426A (en) * 1996-08-08 1999-07-27 Novellus Systems, Inc. Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors
KR100242956B1 (en) * 1997-06-03 2000-02-01 윤종용 A residual removal and blocking apparatus of gas exhausting system
US6185370B1 (en) * 1998-09-09 2001-02-06 Tokyo Electron Limited Heating apparatus for heating an object to be processed
US6143361A (en) * 1998-10-19 2000-11-07 Howmet Research Corporation Method of reacting excess CVD gas reactant
JP2000256856A (en) * 1999-03-11 2000-09-19 Tokyo Electron Ltd Treating device, vacuum exhaust system for treating device, vacuum cvd device, vacuum exhaust system for vacuum cvd device and trapping device
FI110311B (en) * 1999-07-20 2002-12-31 Asm Microchemistry Oy Method and apparatus for eliminating substances from gases
JP4092821B2 (en) * 1999-07-27 2008-05-28 東京エレクトロン株式会社 Processing equipment exhaust system
US6391385B1 (en) * 1999-10-18 2002-05-21 Advanced Technology Materials, Inc. Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
US6572924B1 (en) * 1999-11-18 2003-06-03 Asm America, Inc. Exhaust system for vapor deposition reactor and method of using the same
JP2001252527A (en) * 2000-03-13 2001-09-18 Seiko Epson Corp Method and apparatus for treating pfc
FI117978B (en) * 2000-04-14 2007-05-15 Asm Int Method and apparatus for constructing a thin film on a substrate
US7060132B2 (en) * 2000-04-14 2006-06-13 Asm International N.V. Method and apparatus of growing a thin film
US6821489B1 (en) * 2000-10-10 2004-11-23 International Business Machines Corporation System and method for abating the simultaneous flow of silane and arsine
US6733827B2 (en) * 2001-04-11 2004-05-11 The Procter & Gamble Co. Processes for manufacturing particles coated with activated lignosulfonate
JP3899404B2 (en) * 2002-12-26 2007-03-28 国立大学法人東京海洋大学 Equipment for removing particulate matter in exhaust gas
KR100505670B1 (en) * 2003-02-05 2005-08-03 삼성전자주식회사 Apparatus for manufacturing semiconductor device having hot fluid supplier for removing byproducts
JP4592746B2 (en) * 2005-03-02 2010-12-08 株式会社日立国際電気 Semiconductor manufacturing apparatus, semiconductor device manufacturing method, and exhaust trap apparatus
US20080124670A1 (en) * 2006-11-29 2008-05-29 Frank Jansen Inductively heated trap
US20080160472A1 (en) * 2006-12-27 2008-07-03 Yu-Feng Chang Sinter furnace for sapphire crystal growth
US7351936B1 (en) * 2007-01-22 2008-04-01 Taiwan Semiconductor Manufacturing Company Method and apparatus for preventing baking chamber exhaust line clog
JP5133013B2 (en) * 2007-09-10 2013-01-30 東京エレクトロン株式会社 Exhaust system structure of film forming apparatus, film forming apparatus, and exhaust gas treatment method
CN112007466A (en) * 2019-05-31 2020-12-01 东泰高科装备科技有限公司 Device for treating harmful special waste gas generated in semiconductor process
CN112495155B (en) * 2021-02-07 2021-05-14 瑞燃(上海)环境工程技术有限公司 Process system for treating toxic and harmful tail gas by dry chemical filtering device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3885932A (en) * 1974-01-10 1975-05-27 Super Products Corp Dust filtration system
DE2645026A1 (en) * 1976-10-06 1978-04-13 Steag Ag PROCESS AND SYSTEM FOR PROCESSING SMOKE GASES, E. THE SMOKE GASES FROM POWER PLANTS, FIRED WITH FOSSIL FUELS, IN PARTICULAR WITH TON COAL
US4174372A (en) * 1977-07-26 1979-11-13 Deresh Mikhail D Process for treatment of antimony-containing materials
DE2813691A1 (en) * 1978-03-30 1979-10-11 Schlenker Arvid Dipl Chem Sepn. of droplets and particles from gas streams - using filter with combination of stages including filter mats and particulate filter beds in draw trays
DE3003635C2 (en) * 1980-02-01 1985-07-11 Klöckner-Humboldt-Deutz AG, 5000 Köln Process and device for dearsenic materials containing arsenic
BR8106440A (en) * 1981-01-27 1982-09-08 Grace W R & Co COMPOSITION FOR CONVERSION OF ONE OR MORE POLLUTANTS CONTAINED IN AN EXHAUST GAS IN INNOCENT SUBSTANCES; COMPOSITION FOR THE COLLECTION AND DISPOSAL OF CARBON PARTICLES;
DE3422062A1 (en) * 1984-06-14 1985-12-19 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe METHOD FOR THE LONG-TERM DETERMINATION AND PERMANENT MONITORING OF THE POLLUTANT CONTENT OF SOLID-LOADED EXHAUST FLOWS
DE3514471A1 (en) * 1985-04-22 1986-10-23 Klöckner-Humboldt-Deutz AG, 5000 Köln Process and apparatus for separating out arsenic from hot exhaust gas produced in the metallurgical processing of arsenic-containing materials in melt processes
US4804638A (en) * 1986-12-18 1989-02-14 Raytheon Company Metalorganic chemical vapor deposition growth of Group II-IV semiconductor materials having improved compositional uniformity

Also Published As

Publication number Publication date
GB8818093D0 (en) 1988-09-01
GB9110393D0 (en) 1991-07-03
GB2209005B (en) 1992-01-15
GB2209005A (en) 1989-04-26
GB2243311A (en) 1991-10-30
US4940213A (en) 1990-07-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19980729