GB2242270A - Acoustic microscope with concave transducer - Google Patents

Acoustic microscope with concave transducer Download PDF

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Publication number
GB2242270A
GB2242270A GB9104911A GB9104911A GB2242270A GB 2242270 A GB2242270 A GB 2242270A GB 9104911 A GB9104911 A GB 9104911A GB 9104911 A GB9104911 A GB 9104911A GB 2242270 A GB2242270 A GB 2242270A
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GB
United Kingdom
Prior art keywords
acoustic
transduser
piezoelectrics
acoustic lens
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9104911A
Other versions
GB9104911D0 (en
Inventor
Chen Gelin
Hu Sizhen
Luo Shuyun
Zhang Keqian
Li Dejie
Shen Zhongmin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Publication of GB9104911D0 publication Critical patent/GB9104911D0/en
Publication of GB2242270A publication Critical patent/GB2242270A/en
Withdrawn legal-status Critical Current

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Classifications

    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/26Sound-focusing or directing, e.g. scanning
    • G10K11/30Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609Display arrangements, e.g. colour displays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • G01S15/89Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/044Internal reflections (echoes), e.g. on walls or defects

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Multimedia (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

A reflection type of acoustic microscope comprises a signal generating and detecting device, a mechanical device for performing scanning movement, an acoustic lens having a concave piezoelectric transducer 30 for performing bath generation and focus of acoustic wave, and a general micro-computer for signal control, scanning movement control and image display. The acoustic lens further comprises a rod 32 of Molybdenum in a glass cylinder 31, an abrasion proof protective film 35 deposited on the surface of the transducer for obtaining long length of life, and a sleeve 36 having a plurality of claws 38 for avoiding damage. The acoustic microscope of the invention has advantages over that of prior art in the respects of sensitivity, resolution, cost, and expansibility. <IMAGE>

Description

Reflection Sye of Acoustic Microscope with Acoustic Lens having Concave Transduser The present invention relates to an acoustic microscope technical field, and more particularly, to a reflection type of acoustic microscope with acoustic lens having concave transduser.
Acoustic microscope is a new type of microscope developed in recent years, which differs from optical microscope by refraction and reflection of acoustic wave rather than that of light wave being used to monitor samples. As acoustic wave possesses stronger permeability than light wave, acoustic microscope can be used to detect interior structure of opaque saple undamagedly, with this characteristic, this kind of microscope has a wild use field in undamaged precision detection, such as material, microelectronics, optronics, etc.One of the most advanced acoustic microscope is ELSAM acoustic microscope developed by Leitz Corporation, Germany, which consists of four parts: pulse generating and acoustic signal detecting circuit, flat transduser type of acoustic lens, mechanical device, and control and display device, as shown in Fig. 1, in which the pulse generating and acoustic signal detecting circuit includes microwave source 11, modulator 12, microwave switch 13, matching network 14, microwave amplifier 15, detector 16, pulse amplifier 17, sampling and holding circuit 18, and video amplifier 19; the mechanical device includes five dimension working plate 112, scanning driver 113, driving power 114, position sensor 115 and scanning driver 116; the control and display device includes three special micro-computers 117 (uP8748), 118 (uP8085), 119 (uP8085), long-persistence scope 120, short-persistence scope 121, frame memory 122, TV monitor 123, direct memory access (DMA) 124, display and record switching circuit 110, and movement control circuit 111.
As shown in Fig. 2 the lens constructure of this kind comprises an einzel lens 21 of sapphire in the form of cylinder with a flat end and concave spherical end, and a flat transduser 20 consisting of electrodes (gold film) 201, 202:and piezoelectrics (zinc oxide) 203.
The flat transduser 20 attached to the flat end of the sapphire einzel lens 21 converts electric signal into plate acoustic wave that is then focused on sample by the einzel lens.
The disadvantage of this kind of acoustic microscope lies in that incident acoustic wave obtained from the concave sphere is usually not an ideal plate wave, additionally a portion of incident plate acoustic wave would be conducted to outside of the concave sphere, though most of which conducted to the concave sphere, which reduces sensitivity of the acoustic lens, further more, this on the outside of the concave sphere would pass on sample by refraction, raising a cluter interference and reduction of image quality; and that cost of this one is too expensive as the sapphire material is used.
The disadvantage of this microscope also lies in that the mechanical device has small scanning range, generally not less than 1 mm, and five dimension working plate 112 needs to be adjusted manually if detected position is to be changed, so that multi-position detection can not be accomplished automatically; and that since the control and display device comprises three special micro-computers to perform the functions of mechanical scanning control, signal control and display respectively, it lends to complicated structure, difficulty to expand, e.g. it is difficult to transform ready-made software to the microscope, and expensive. cost.
It is an object of the present invention, therefore, to provide a new acoustic microscope which avoids one or more of the disadvantages of such prior acoustic microscope.
It is another object of the invention to provide a new acoustic microscope having a general micro-computer for performing mechanical scanning control, signal control and display.
It is another object of the invention to provide a new acoustic microscope having a new type of acoustic lens possessing properties of high sensitivity and high resolution.
It is another object of the invention to provide a new acoustic microscope having a new type of acoustic lens with protective components for preventing it to be damaged.
It is another object of the invention to provide a new acoustic microscope having a new driving circuit of stepping motor for obtaining high efficiency.
In accordance with the invention, a reflection type of acoustic microscope comprises means for generating pulse signal and detecting acoustic signal, acoustic lens, means for performing scanning movement, and general micro-computer. The acoustic lens has a concave transduser of piezoelectrics for generating and focusing acoustic wave, and the micro-computer consists of means for controlling the means of signal generation and detection, means for controlling the means of performing scanning movement, and means for displaying, memorising and processing image.
Also, in accordance with the invention, the acoustic lens further comprises a metallic pole for supporting the piezoelectrics, a conducting film attached to the piezoelectrics, the metallic pole and conducting film being used as electrodes of the transduser, a sleeve having a plurality of claws extended out of the transduser slightly to prevent it from to be damaged, and a protective film deposited on the conducting film.
Also, in accordance with the invention, the material of the piezoelectrics is any one of zinc oxide, lithium niobate and quartz.
Also, in accordance with the invention, the acoustic microscope further comprises a driving circuit for driving a stopping motor in the means of performing scanning movement, the driving circuit being in an operating state of cut-off and anplification and consisting of an amplifier and two RC parallel circuits, one of which being connected in series to input circuit of the amplifier and the other being connected in parallel to output circuit of the amplifier for improving pulse front edge and back edge of output of the driving circuit respectively.
Also, in accordance with the invention, the protective film of silicon nitride or adamap is deposited on the conducting film by microwave plasma chemical vapour deposition.
For a better understanding of the present invention together with other and further objects thereof, a preferred embodiment is, taken in connection with the accompanying drawings, described as follows.
Referring now to the drawings: Fig. 1 is a schematic diagram representing an acoustic microscope having a flat transduser type of acoustic lens of the prior art; Fig. 2 is a schematic diagram representing the structure of the flat transduser type of acoustic lens of the prior art; Fig. 3 is a sectional view of a concave transduser type of acoustic lens having protective sleeve and abrasion proof protective film of the invention; Fig. 4 is a sectional view of a front portion of the concave transduser type of acoustic lens of the invention; Fig. 5 is a schematic diagram representing a micro-computer of the acoustic microscope of the invention; Fig. 6 is an electric circuit diagram representing a driving circuit for stepping motor of the acoustic microscope of the invention; Fig. 7 is a schematic diagram representing the acoustic microscope of the invention.
Referring now more particularly Fig. 3 and Fig. 4, that represent sectional view of the concave transduser type of acoustic lens 3 having protective sleeve and abrasion proof protective film, and sectional view of the front end of the acoustic lens respectively. The acoustic lens comprises a concave transduser 30 of piezoelectric layer 33, a molybdenum pole 32, a gold film 34, a glass medium 31, a sleeve 36, an abrasion proof protective film 35 and a coaxial connector 37, in which, the material of the piezoelectric layer can be any one of zinc oxide, quartz, etc; the molybdenum pole 32 and gold film 34 are taken as electrodes of the layer and the former is also used to support the piezoelectric layer 33; the abrasion proof protective film 35 is a layer of silicon nitride or adamas deposited on the gold film 34 by microwave plasma chemical vapour deposition (MPCVD); the front edge of the sleeve 36 has a plurality of claws 38 extending slightly out of the transduser 30 to prevent it to be collided by sample or other bodies; and the transduser 30 is in the form of a concave, and preferred in form of concave sphere, therefore it takes a part of both generation and focus of acoustic wave.
It can be seen-obviously that as spherical wave which can be focused is only produced, but not any cluter, as long as diameter of metallic pole 32 is less than aperture of the concave sphere, ideal resolution can be achieved easily. The acoustic wave generated by the transduser 30 passes on sample directly, as compared with the acoustic lens of the prior art, no transmission loss and reflection loss exists, therefore, it raises the signal-to-noise ratio; and no sapphire material needs any more which mostly reduces cost of the acoustic lens.
Referring now more particularly to Pig. 5, it schematically represents a block diagram of micro-computer 5 in the embodiment of the present invention. The micro-computer 5 comprises a main frame 51, an A/D converter 52 and data acquisition module 52', a series-parallel converter 53 and control module 53', a graphic adapter 54 and graphic display module 54', a graphic adapter 55 and image process and display module 55', a high resolution colour display 56 and a high resolution multi-grey scale colour display 57, in which, the acquisition module 52', combined with the A/D converter 52, performs conversion and acquisition of analogue signals that includes video amplifier output signal reflecting sample acoustic information and mechanical scan sensing signal; the control module 53', combined with the series-parallel converter 53, provides driving circuit of the stepping motor with driving signal that is a pulse series for controlling grating scan and positioning of working plate to realise multi-position detection automatically, additionally, provides the pulse generating and acoustic signal detecting circuit with control signal for selecting operating states of which such as operation frequency, microwave power level, etc.t the graphic display module 54', combined with graphic adapter 54, displays initial detection result, e.g.
graph or curve on the colour display 56; the image process and display module 55' processes the detection result, and combined with graphic adapter 55, displays high quality image obtained from the further image process on colour display 57.
Since the multi-micro computer structure of the prior art is replaced by the general microcomputer, it makes the acoustic microscope of the invention to be maintained and expanded easily. Additionally, the detecting result can be transferred to any other computer being compatible with that of the microscope of the invention to make further analysis.
Referring now more particularly to Fig. 5, it represents a driving circuit 6 of the stepping motor in the embodiment of the present invention. The driving circuit comprises a voltage amplifier including mainly transistor BG1, load resistor W1, R3 and parallel speed-up network R1, C1, and a power amplifier including mainly transistor BG2, load LA (winding of the stepping motor), resistor R5, discharging circuit D1, R2, C2 and indicating circuit R4, LED, here, speed-up network R1, C1 and R2, C2 for improving pulse front edge and back edge of output of the driving circuit respectively, indicating circuit R4, LED for indicating operation of the stepping motor, the resistor R5 connected to collector of the transistor BG2 in series for monitoring current of which, the input signal QA in form of pulse series that comes from the series-parallel converter 53.The power amplifier of the driving circuit is in the operating state of cut-off and amplification rather than cut-off and saturation state usually used in the prior art.
Depending on the effect of dynamic resistance raised by transient from cut-off state into amplification state of the transistor, a large power dissipation resistor appearing on collector branch of transistor BG2 in the prior art is to be deleted, which brings both high efficiency and high driving speed.
Now referring more particularly to Fig. 7, which is a block diagram of the acoustic microscope of the embodiment of the present invention. It comprises four parts of pulse generating and acoustic detecting circuit, acoustic lens, mechanical device and control and display device.
The pulse generating and acoustic detecting circuit consisting of primary pulse source 71, pulse distributor 72, high frequency oscillator (100-150 MHZ) 73, microwave amplifier 74, modulator (HP33144A) 75, circulator 76, matching network 77, microwave amplifier 78, detector 79, pulse amplifier 710, sampling and holding circuit 711, sampling pulse source 712, video amplifier 713, filter 714, in which the primary pulse source generates a short series of pulse controlling modulator 75, by which a modulated microwave signal is produced. A pulse oscilloscope 715 can also be used for measuring and determining the distance between testing face and surface of sample to be detected.
The acoustic lens is the concave transduser type of lens having protective sleeve and abrasion proof protective film.
The mechanical device comprises three dimension working plate 719, X,Y two dimension shift and scan plate 720, scanning driver and position sensor 721. The scanning driver further comprises the stopping motor and driving circuit 6.
The control and display device comprises micro-computer (IBM-PC) 51, A/D converter (MS-1215) 52, graphic adapter (EGA Board) 54, high resolution colour display (TVM) 56, graphic adapter (HYIPB1) 55, high resolution multi-grey scale display (OPC-OVM9E) 57, and series-parallel converter (FAT-0030)53.

Claims (11)

CLAIMS:
1. A reflection type of acoustic microscope, comprising means for generating pulse signal and detecting acoustic signal; acoustic lens; means for performing scanning movement; and general micro-computer, wherein said acoustic lens has a concave transduser of piezoelectrics for generating and focusing acoustic wave; and said micro-computer consists of means for controlling said means of signal generation and detection; means for controlling said means of performing scanning movement; and means for displaying, memorising and processing image.
2. An acoustic microscope according to Claim 1, wherein said acoustic lens further comprises a metallic pole for supporting said piezoelectrics; a conducting film attached to said piezoelectrics, said metallic pole and conducting film being uses as electrodes of said transduser; a sleeve having a plurality of claws extended out of said transduser slightly to prevent it from to be damaged; and a protective film deposited on said conducting film.
3. An acoustic microscope according to Claim 2, wherein material of said piezoelectrics is any one of zinc oxide, lithium niobate and quartz.
4. An acoustic microscope according to Claim -3, further comprising a driving circuit for driving a stepping motor in said means of performing scanning movement, said driving circuit being in an operating state of cut-off and amplification and consisting of an amplifier and two RC parallel circuits, one of which being connected in series to input circuit of said amplifier and the other being connected in parallel to output circuit of said amplifier for improving pulse front edge and back edge of output of said driving circuit respectively.
5. An acoustic microscope according to Claim 3 or 4, wherein said protective film of silicon nitride or adamas is deposited on the conducting film by microwave plasma chemical vapour deposition.
6. A concave transduser type of acoustic lens, comprising a concave transduser of piezoelectrics for generating and focusing acoustic wave.
7. An acoustic lens according to Claim 6, further comprising a metallic pole for supporting said piezoelectrics; a conducting film attached to said piezoelectrics, said metallic pole and conducting film being used as electrodes of said transduser; a sleeve having a plurality of claws extended out of said transduser slightly to prevent it from to be damaged; and a protective film deposited on said conduction film.
8. An acoustic lens according to Claim 7, wherein material of said piezoelectrics is any one of zinc oxide, lithium niobate and quartz.
9. An acoustic lens according to Claim 6-8, wherein said protective film of silicon nitride or adamas is deposited on the conducting film by microwave plasma chemical vapour deposition.
10. A reflection type of acoustic microscope as hereinbefore described with reference to the accompanying drawings.
11. A concave transduser type of acoustic lens as hereinbefore described with reference to the accompanying drawings.
GB9104911A 1990-03-08 1991-03-08 Acoustic microscope with concave transducer Withdrawn GB2242270A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 90101053 CN1019919C (en) 1990-03-08 1990-03-08 Reflecting sound microscope with acoustic mirror

Publications (2)

Publication Number Publication Date
GB9104911D0 GB9104911D0 (en) 1991-04-24
GB2242270A true GB2242270A (en) 1991-09-25

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001086281A1 (en) * 2000-05-05 2001-11-15 Acoustical Technologies Singapore Pte Ltd. Acoustic microscope
US8456645B2 (en) 2007-01-22 2013-06-04 California Institute Of Technology Method and system for fast three-dimensional imaging using defocusing and feature recognition
US8472032B2 (en) 2007-04-23 2013-06-25 California Institute Of Technology Single-lens 3-D imaging device using polarization coded aperture masks combined with polarization sensitive sensor
US8514268B2 (en) 2008-01-22 2013-08-20 California Institute Of Technology Method and device for high-resolution three-dimensional imaging which obtains camera pose using defocusing
US8576381B2 (en) 2007-01-22 2013-11-05 California Institute Of Technology Method and apparatus for quantitative 3-D imaging
US8773514B2 (en) 2009-08-27 2014-07-08 California Institute Of Technology Accurate 3D object reconstruction using a handheld device with a projected light pattern
US8773507B2 (en) 2009-08-11 2014-07-08 California Institute Of Technology Defocusing feature matching system to measure camera pose with interchangeable lens cameras
US10182223B2 (en) 2010-09-03 2019-01-15 California Institute Of Technology Three-dimensional imaging system
US11406264B2 (en) 2016-01-25 2022-08-09 California Institute Of Technology Non-invasive measurement of intraocular pressure

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US8764665B2 (en) * 2007-05-03 2014-07-01 Koninklijke Philips N.V. Methods and apparatuses of microbeamforming with adjustable fluid lenses
US10143231B2 (en) 2013-08-13 2018-12-04 Philip Morris Products S.A. Smoking article comprising a blind combustible heat source
CN104122333B (en) * 2014-04-12 2017-04-05 北京工业大学 Array analytic expression focusing ultrasonic wave transducer
CN109374738B (en) * 2018-09-05 2021-07-27 广州联声电子科技有限公司 Ultrasonic microscope and method based on annular array
CN109374739B (en) * 2018-09-05 2021-07-27 广州联声电子科技有限公司 Ultrasonic microscope and method based on annular area array

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Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
EP0032739A1 (en) * 1980-01-21 1981-07-29 Hitachi, Ltd. A multielement acoustic transducer, a method of manufacturing the same, and use of the same in an acoustic imaging instrument
GB2153997A (en) * 1984-01-11 1985-08-29 Hitachi Ltd Acoustic microscope
EP0187866A1 (en) * 1984-07-08 1986-07-23 Noriyoshi Chubachi Surface ultrasonic wave interference microscope
US4659956A (en) * 1985-01-24 1987-04-21 General Electric Company Compound focus ultrasonic transducer
EP0337575A2 (en) * 1988-04-13 1989-10-18 Hitachi Construction Machinery Co., Ltd. Ultrasonic probe and manufacture method for same

Cited By (21)

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Publication number Priority date Publication date Assignee Title
GB2363306A (en) * 2000-05-05 2001-12-12 Acoustical Tech Sg Pte Ltd An acoustic microscope system including a lens
GB2373329A (en) * 2000-05-05 2002-09-18 Acoustical Tech Sg Pte Ltd Acoustic microscope
GB2363306B (en) * 2000-05-05 2002-11-13 Acoustical Tech Sg Pte Ltd Acoustic microscope
GB2373329B (en) * 2000-05-05 2003-03-05 Acoustical Tech Sg Pte Ltd Acoustic microscope
US6840107B2 (en) 2000-05-05 2005-01-11 Acoustical Technologies Pte Ltd. Acoustic microscope
WO2001086281A1 (en) * 2000-05-05 2001-11-15 Acoustical Technologies Singapore Pte Ltd. Acoustic microscope
US8576381B2 (en) 2007-01-22 2013-11-05 California Institute Of Technology Method and apparatus for quantitative 3-D imaging
US8456645B2 (en) 2007-01-22 2013-06-04 California Institute Of Technology Method and system for fast three-dimensional imaging using defocusing and feature recognition
US9219907B2 (en) 2007-01-22 2015-12-22 California Institute Of Technology Method and apparatus for quantitative 3-D imaging
US8619126B2 (en) 2007-04-23 2013-12-31 California Institute Of Technology Single-lens, single-sensor 3-D imaging device with a central aperture for obtaining camera position
US9100641B2 (en) 2007-04-23 2015-08-04 California Institute Of Technology Single-lens, single-sensor 3-D imaging device with a central aperture for obtaining camera position
US8472032B2 (en) 2007-04-23 2013-06-25 California Institute Of Technology Single-lens 3-D imaging device using polarization coded aperture masks combined with polarization sensitive sensor
US9736463B2 (en) 2007-04-23 2017-08-15 California Institute Of Technology Single-lens, single-sensor 3-D imaging device with a central aperture for obtaining camera position
US8514268B2 (en) 2008-01-22 2013-08-20 California Institute Of Technology Method and device for high-resolution three-dimensional imaging which obtains camera pose using defocusing
US9247235B2 (en) 2008-08-27 2016-01-26 California Institute Of Technology Method and device for high-resolution imaging which obtains camera pose using defocusing
US8773507B2 (en) 2009-08-11 2014-07-08 California Institute Of Technology Defocusing feature matching system to measure camera pose with interchangeable lens cameras
US9596452B2 (en) 2009-08-11 2017-03-14 California Institute Of Technology Defocusing feature matching system to measure camera pose with interchangeable lens cameras
US8773514B2 (en) 2009-08-27 2014-07-08 California Institute Of Technology Accurate 3D object reconstruction using a handheld device with a projected light pattern
US10182223B2 (en) 2010-09-03 2019-01-15 California Institute Of Technology Three-dimensional imaging system
US10742957B2 (en) 2010-09-03 2020-08-11 California Institute Of Technology Three-dimensional imaging system
US11406264B2 (en) 2016-01-25 2022-08-09 California Institute Of Technology Non-invasive measurement of intraocular pressure

Also Published As

Publication number Publication date
CN1019919C (en) 1993-02-17
CN1054667A (en) 1991-09-18
GB9104911D0 (en) 1991-04-24

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