CN1054667A - Reflective sonomicroscope with novel acoustic mirror - Google Patents
Reflective sonomicroscope with novel acoustic mirror Download PDFInfo
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- CN1054667A CN1054667A CN 90101053 CN90101053A CN1054667A CN 1054667 A CN1054667 A CN 1054667A CN 90101053 CN90101053 CN 90101053 CN 90101053 A CN90101053 A CN 90101053A CN 1054667 A CN1054667 A CN 1054667A
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- 239000011521 glass Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000001681 protective effect Effects 0.000 claims description 13
- 230000002463 transducing effect Effects 0.000 claims description 10
- 238000007493 shaping process Methods 0.000 claims description 6
- 230000000007 visual effect Effects 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000004146 energy storage Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000013049 sediment Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 abstract description 12
- 239000010980 sapphire Substances 0.000 abstract description 12
- 238000003384 imaging method Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 3
- 238000004377 microelectronic Methods 0.000 abstract description 3
- 238000005070 sampling Methods 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 4
- 230000004304 visual acuity Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000002688 persistence Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000003957 acoustic microscopy Methods 0.000 description 1
- 230000006854 communication Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0609—Display arrangements, e.g. colour displays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Computer Networks & Wireless Communication (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention belongs to technical fields such as sound is micro-, mechanical scanning imaging, the not damaged that can be widely used in technical fields such as material, microelectronics, photoelectron detects, assesses and observes.The present invention adopts novel acoustic mirror, novel stepper motor driving power, constitutes the control of mechanical scanning, high-frequency unit and imaging system than planar transducer type sapphire acoustic mirror resolution height and low tens of times of price by universal microcomputer; Better than the strong versatility of dedicated microcomputer function, the user is easy to use, has characteristics such as efficient, low noise in addition.
Description
The invention belongs to technical fields such as sound is micro-, mechanical scanning imaging, the not damaged that is widely used in technical fields such as material, microelectronics, photoelectron detects, assesses and observation.
Sonomicroscope is a kind of novel microscope equipment of inventing in recent years, it is that with the microscopical difference of optics it is not to utilize light wave but the refraction that utilizes sound wave, reflex is come observation sample, because the acoustic ratio light wave has stronger penetrability, thereby sonomicroscope can be observed opaque sample interior structure with no damage, its these characteristics, make it can be widely used in material, microelectronics, the meticulous detection of the not damaged of photoelectron and other technical field, have remarkable advantage than optical microphotograph, so acoustic microscopy has become those skilled in the art's concern, the important topic of development research energetically.The ELSAM type sonomicroscope of present German Lay (leitz) company production now is state-of-the-art a kind of, and it is made up of four parts such as pulse shaping harmony signal deteching circuit, planar transducer type acoustic mirror, mechanical hook-up, control and display units, as shown in Figure 1.Wherein, pulse shaping harmony signal deteching circuit comprises: microwave signal source 1-1, modulator 1-2, microwave switch 1-3, matching network 1-4, microwave amplifier 1-5, wave detector 1-6, pulse amplifier 1-7, sampling hold circuit 1-8, video amplifier 1-9; Planar transducer type acoustic mirror comprises: planar transducer 1-10, protruding sphere sapphire sound lens 1-11; Mechanical hook-up comprises: five dimensions are regulated worktable 1-12, scanner driver 1-13, driving power 1-14, position transducer 1-15, sensor amplifier 1-16; Control and display unit comprise: three dedicated microcomputer 1-17(8748), 1-18(μ P8085), 1-19(μ P8085), long afterglow display 1-20, short persistence display 1-21, frame memory 1-22, TV display monitor central monitoring system 1-23 and direct access controller (DMA) 1-24.(ELSAM service manual).
1. pulse shaping harmony signal deteching circuit: microwave signal source 1-1 produces the continuous microwave signal, form pulse-modulated signal through modulator 1-2, this signal is through microwave switch 1-3, matching network 1-4 sends into planar transducer 1-10, convert the pulsed modulation sound wave to, after concave spherical surface sapphire sound lens 1-11 focusing, enter observed sample 1-25, run into sample defects, acoustic reflection returns planar transducer 1-10 and converts the electric pulse modulation signal again to, this signal is through matching network 1-4, microwave switch 1-3 enters microwave amplifier 1-5, through detection, amplify, sampling keeps, amplify again and enter dedicated microcomputer 1-19(CPU8085) displayed record switch A.Because the electric pulse modulation signal that reflective sound wave forms postpones a period of time than the electric pulse modulation signal of incident, therefore, the degree of depth of judgement sample defective more easily, microwave signal source 1-1, modulator 1-2, microwave switch 1-3 are by dedicated microcomputer 1-17(8748) control.
2. planar transducer type acoustic mirror
Planar transducer 1-10 finishes sound-electric conversion, by it with electric signal complanation sound wave, focus on sample by concave spherical surface sapphire sound lens 1-11 refraction again, this acoustical mirror structure as shown in Figure 2,2-1,2-2 are that electrode (golden film), 2-3 are that piezoelectrics (zinc paste), 2-4 are the sapphire simple lenses, the planar transducer type simple lens acoustic mirror that it is a sapphire cylinder one holding level with both hands of wearing into, an end is single concave spherical surface.Its weak point is: 1. the incident acoustic wave that obtains of concave spherical surface is not desirable plane sound wave usually, and plane of incidence even tone ripple is except that shining the concave spherical surface place, also some ripple shines outside the concave spherical surface, this not only can reduce the sensitivity of acoustic mirror, these impinge upon the outer ripple of concave spherical surface and also can reflect and pass to the sample place, cause noise jamming, influence image quality; 2. sapphire costs an arm and a leg.
3. mechanical hook-up
Two-dimentional machinery scanister that scanner driver 1-13, driving power 1-14, position transducer 1-15 and sensor amplifier 1-16 form and five dimension worktable 1-12 have constituted the mechanical hook-up that volume is little, precision is high, the two-dimentional machinery scanister is finished the relative raster scanning between sample and lens, by driving power 1-14 driven sweep driver 1-13, position transducer 1-15 obtain scanning position information amplify through sensor amplifier 1-16 sends into dedicated microcomputer 1-19(CPU) X, Y, Z motion control C, come controlling and driving power supply 1-14.Its weak point is that sweep limit is little, generally is no more than 1mm, and range of observation changes and need manual five dimensions regulate worktable 1-12, can not carry out multiple spot automatically and detect.
4. control and display unit
Dedicated microcomputer 1-19(μ P8085 is controlled in mechanical scanning, high-frequency unit and demonstration by three dedicated microcomputer) as CPU, dedicated microcomputer 1-18(μ P8085) control single card microcomputer keyboard and character demonstration, dedicated microcomputer 1-17(8748) the control high-frequency unit.During work, give CPU by the keyboard input command, control mechanical scanning motion by CPU again, CPU gives an order to 8748, makes its control high-frequency unit, and CPU also controls displayed record switch A to obtain required demonstration and observe or to take pictures; (bus) sends into frame memory 1-22 to information by private bus, carries out high-quality display by TV Monitor 1-23.Its weak point is: 1. complex structure (three dedicated microcomputer), and control and show that separately the unit is many, volume is big; 2. owing to adopt dedicated microcomputer work, can only use the low-level language programming, be difficult to increase function, and be difficult to the directly existing imgae processing software of the value of moving; 3. owing to adopt dedicated microcomputer, the user can only be on ELSAM view image, thereby the user uses observed result extremely inconvenient; 4. make, maintenance difficult, the cost height.
Nineteen eighty-three we invented a kind of glass metal sphere transducing type acoustic mirror, its structure is as shown in Figure 3.3-1 is that glass, 3-2 are that molybdenum rod, 3-3 are that piezoelectric zinc paste, 3-4 are golden films, and it and 3-2 molybdenum rod constitute electrode, and 3-5 is the insulating material monox, as protective seam.(" a kind of novel transducing focusing system-glass metal sphere transducer that is used for acoustic microscope " the old Gorlin Zhang Keqian of the Li Dejie of Tsing-Hua University applied science journal 1984 the 2nd volume fourth phase 322-329).The advantage of this acoustic mirror is: 1. transducer is near the sample end, make spherical shape, making sound wave generation and focusing be incorporated in a place finishes, because only the zinc paste of two interpolars just can produce sound wave, so as long as center molybdenum rod diameter is less than the near coal-mine footpath of ball, the sound wave that its produces just must be the spherical wave that can assemble and can not produce noise jamming, therefore very easily reaches desired resolution; 2. because sound wave is the spherical sound wave that is directly sent by acoustic mirror, compare with planar transducer type acoustic mirror, therefore few reflecting surface in communication process has reduced the insertion loss of acoustic mirror to acoustical signal; 3. because acoustic mirror adopts glass, metal without sapphire, low tens of times of price.The weak point of this acoustic mirror is: 1. acoustic mirror is made up of glass and metal, with sample collision or friction, very easily damages; Coupling liquid-the water of acoustic mirror and sample room when 2. working, with after can stay residues such as scale, wipe residue, also very easily damage Jing Keng.So serviceable life is short, and practical application is difficulty relatively.
The objective of the invention is deficiency, design a kind of highly versatile, automaticity height, cheap sonomicroscope at existing sonomicroscope.
Technical essential of the present invention is:
1. adopt the glass metal sphere transducing type acoustic mirror that has protective device and high rigidity diaphragm, protective device can be to be added in the outer cover of glass column.
2. adopt a universal microcomputer to constitute mechanical scanning, high-frequency unit control, visual demonstration, storage and disposal system;
3. adopt stepper motor to drive acoustic mirror displacement and mechanical scanning, and the selection of sample observation point is realized by programmed control with new drive circuit; New drive circuit be its power amplifier be operated in by-amplify duty, utilize the transistor dynamic resistance to guarantee that stepper motor runs up.
Advantage of the present invention is: 1. adopt glass metal sphere transducing type acoustic mirror with protective device and high hardness wear-resisting diaphragm, and no noise jamming, the resolution height, price is than low tens of times of sapphire acoustic mirror; 2. adopt universal microcomputer to constitute mechanical scanning, high-frequency unit control and imaging system, the acoustic mirror observed result can be observed on any universal microcomputer and further analyze, and is easy to use, goes back the existing software of portable, making, easy to maintenance is easy to exploitation, enhancement function; 3. novel stepper motor driving circuit had both guaranteed the work of stepper motor high-speed low-noise, had improved efficient again, had reduced cost.
Embodiment: accompanying drawing 4 is the embodiment with glass metal sphere transducing type acoustic mirror of protective device and high hardness wear-resisting diaphragm, and 4-1 is a glass, and 4-2 is metal (molybdenum rod), and glass and metal be sealing by fusing mutually.Therefore glass can be 8
#4-3 is piezoelectrics Zinc oxide film (Zno); also available lithium niobate, quartz etc., 4-4 is golden film (Au), it and 4-2 constitute electrode; 4-5 is the high hardness wear-resisting diaphragm, and it is at golden film 4-4 external application microwave plasma gas phase (MPCVD) deposition one deck silicon nitride (Si
3N
4) film or diamond thin etc.4-6 is added in the outer protective sleeve of glass column 4-1, and its available copper is made with full film 4-4 and connected together, and becomes electrode of outer conductor, pullover extended several pawls, the long acoustic mirror of slightly being longer than of pawl.Can not run on sample or other article with assurance acoustic mirror head, 4-7 is a coaxial fitting.
Accompanying drawing 5 is mechanical scanning of the present invention, the embodiment of high-frequency unit control and imaging system, 5-1 is a general IBM PC/AT microcomputer, 5-2 is an A/D conversion interface board, by the next electric signal that has the sample acoustic information of the video amplifier, the mechanical scanning position sensor signal, carry out analog-to-digital conversion through it, send into 5-1PC/AT, 5-3 is the serial-parallel interface plate, 5-1 PC/AT will drive the driving power that sign indicating number is delivered to stepper motor by it, carry out raster pattern mechanical scanning and mobile with the Control work platform, finishing the sample multiple spot tests automatically, 5-3 serial-parallel interface plate also can be sent signal control high-frequency unit cell operation, to select its frequency of operation, microwave power level and other duty.5-4 strengthens graphic interface plate (EGA or VGA), it is used as picture information and deposits with color and control, the high-resolution color terminal (being display) that the external common computer of this plate is attached, it both can be used for general computer software, program, data, literal demonstration, also can be used as the preliminary demonstration of test result (image or curve).5-5 is visual display interface plate, and the external high resolving power multi-grey level of this plate is the display of (as 256 grades) not, and it can be used as testing result and image processing result's high-quality display.A/D conversion interface board, serial-parallel interface plate, enhancing graphic interface plate and visual display interface plate all have the merchant to sell product, buy to be inserted on the microcomputer to get final product.
Accompanying drawing 6 is stepper motor new drive circuit embodiment, and 9401 constitute voltage amplifier, and DS30E constitutes power amplifier, R
1C
1(580 Ω 470P) are the accelerating network that is serially connected in the voltage amplifier input circuit, in order to improve pulse front edge, L
ABe a winding of stepper motor, diode D is connected in series R
2C
2(36 Ω, 10 μ) accelerating network is attempted by the stepper motor winding L
ABleed-off circuit is formed at two ends, also can seal in R
6(10K) form indicator with LED, in parallel with the RC accelerating network, it utilizes a part useless energy storage of releasing luminous, with indication motor work, power amplifier DS30E is operated in and ends-amplify duty (available circuit all is operated in and ends-state of saturation), by replacing the high-power resistance that adds that is serially connected in the common circuit on the motor windings, both guaranteed the motor high speed operation with transistor, efficient is enhanced about more than once by the end of the dynamic resistance that amplifies transient process.R
5(0.2 Ω) is monitoring DS30E electric current.Q
ABe serial-parallel interface plate driving sign indicating number (an A road pulse train) from microcomputer, supply voltage 12V.
Accompanying drawing 7 is complete machine embodiment of the present invention:
Complete machine is made up of four parts such as pulse shaping harmony signal deteching circuit, acoustic mirror, mechanical hook-up, control and display units, as shown in Figure 7.
Pulse shaping harmony signal deteching circuit comprises: 7-1 main pulse source, 7-2 pulsqe distributor, trigger the several short pulses of control by main pulse and remove to control the 7-5 modulator.(100～150MHZ), the 7-4 amplifier amplifies continuous microwave power to the 7-3 high frequency oscillator, and 7-5 modulator (HP33144A) produces the short pulse modulated microwave signal, the 7-6 circulator, microwave signal is gone into by its 1 mouthful, and 2 mouthfuls go out to deliver to the 7-7 matching network, the 7-8 microwave amplifier, the 7-9 wave detector, the 7-10 pulse amplifier, 7-11 sampling hold circuit, 7-12 sampling pulse source, the 7-13 video amplifier, the 7-14 wave filter.An also available pulsescope 7-15 is in order to observation and detected of definite sample and sample surfaces distance.Foregoing circuit is known custom circuit.
Acoustic mirror 7-16 is the glass metal sphere transducing type acoustic mirror that has protective device and high rigidity diaphragm, and 7-17 is coupling liquid-water, and 7-18 is observed sample.
Mechanical hook-up comprises: 7-19 three-dimensional regulation worktable (horizontal bidimensional angle micro actuator and VTOL (vertical take off and landing) precise jiggle platform), available merchant sells product (producing ZD type micro actuator as the optical instrument factory, Nantong) or customized.7-20X, Y bidimensional move with scan table and can sell or customized with the merchant, and 7-21 scanner driver and position transducer, scanner driver comprise stepper motor and new drive circuit thereof.
Control and display unit comprise: 7-22 microcomputer IBM PC/AT, 7-23 standard 101 microcomputer keyboards, 7-24A/D interface board (MS-1215), the general EGA interface board of 7-25,7-26 high resolution computer display terminal (TVM type), 7-27 universal image interface board (as HYIPB1), 7-28 high resolving power multi-grayscale display (OPC-OVM9E), 7-29 serial-parallel interface plate (FAT-003).
Description of drawings:
Accompanying drawing 1 ELSAM type sonomicroscope composition frame chart
The 1-1 microwave signal source
The 1-2 modulator
Type), 7-27 universal image interface board (as HYIPB1), 7-28 high resolving power multi-grayscale display (OPC-OVM9E), 7-29 serial-parallel interface plate (FAT-003).
Description of drawings:
Accompanying drawing 1 ELSAM type sonomicroscope composition frame chart
The 1-1 microwave signal source
The 1-2 modulator
The 1-3 microwave switch
The 1-4 matching network
The 1-5 microwave amplifier
The 1-6 wave detector
The 1-7 pulse amplifier
The 1-8 sampling hold circuit
The 1-9 video amplifier
The 1-10 planar transducer
1-11 concave spherical surface sapphire sound lens
1-12 five dimensions are regulated worktable
The 1-13 scanner driver
The 1-14 driving power
The 1-15 position transducer
The 1-16 sensor amplifier
1-17 dedicated microcomputer 8748
1-18 dedicated microcomputer μ P8085
1-19 dedicated microcomputer μ P8085
1-20 long afterglow display
1-21 short persistence display
The 1-22 frame memory
1-23 TV display monitor central monitoring system
The 1-3 microwave switch
The 1-4 matching network
The 1-5 microwave amplifier
The 1-6 wave detector
The 1-7 pulse amplifier
The 1-8 sampling hold circuit
The 1-9 video amplifier
The 1-10 planar transducer
1-11 concave spherical surface sapphire sound lens
1-12 five dimensions are regulated worktable
The 1-13 scanner driver
The 1-14 driving power
The 1-15 position transducer
The 1-16 sensor amplifier
1-17 dedicated microcomputer 8748
1-18 dedicated microcomputer μ P8085
1-19 dedicated microcomputer μ P8085
1-20 long afterglow display
1-21 short persistence display
The 1-22 frame memory
1-23 TV display monitor central monitoring system
1-24 direct access controller (DMA)
The observed sample of 1-25
Accompanying drawing 2 planar transducer type acoustical mirror structure figure
2-1,2-2 electrode (golden film)
2-3 piezoelectrics (zinc paste)
2-4 sapphire simple lens
Accompanying drawing 3 glass metal sphere transducing type acoustic mirrors
3-1 glass
The 3-2 molybdenum rod
3-3 piezoelectrics (zinc paste)
3-4 gold film
The 3-5 monox
Accompanying drawing 4 has the glass glass metal sphere transducer type acoustical mirror structure figure of protective device and high hardness wear-resisting diaphragm
4-1 glass (No. 8)
4-2 metal (molybdenum rod)
4-3 piezoelectrics (zinc paste)
4-4 gold film
4-5 high hardness wear-resisting diaphragm (silicon nitride)
The copper protective sleeve of 4-6 band pawl
The 4-7 coaxial fitting
The composition frame chart of accompanying drawing 5 mechanical scannings, high-frequency unit and imaging system
5-1 universal microcomputer IBM PC/AT
5-2 A/D conversion interface board
5-3 serial-parallel interface plate
5-4 strengthens graphic interface plate (EGA)
5-5 image display interface plate
Accompanying drawing 6 stepper motor new drive circuit figure
9401 amplifier tubes
The DS30E power tube
R
1580Ω
R
236Ω
R
330Ω
R
4470 Ω potentiometers
R
50.2Ω
R
610KΩ
C
210μ
D
1Diode
The LED light emitting diode
L
AA winding of stepper motor
D
2Half of not gate 74LS04
Q
ADriving sign indicating number from the serial-parallel interface plate of microcomputer
Accompanying drawing 7 complete machine block diagrams of the present invention
7-1 main pulse source
The 7-2 pulsqe distributor
7-3 high frequency oscillator (100～150MHZ)
The 7-4 amplifier
The 7-5 modulator
The 7-6 circulator
The 7-7 matching network
The 7-8 microwave amplifier
The 7-9 wave detector
The 7-10 pulse amplifier
The 7-11 sampling hold circuit
7-12 sampling pulse source
The 7-13 video amplifier
The 7-14 wave filter
The 7-15 pulsescope
7-16 has the glass metal sphere transducing type acoustic mirror of protective device and high hardness wear-resisting diaphragm
7-17 coupling liquid (water)
The observed sample of 7-18
7-19 three-dimensional regulation worktable
7-20 X, Y bidimensional move and scan transfer table
7-21 scanner driver and position transducer
7-22 microcomputer IBM PC/AT
7-23 standard 101 microcomputer keyboards
7-24 A/D interface board (MS-1215)
7-25 EGA interface board (PEGA)
7-26 high resolution computer display terminal (TVM type)
7-27 universal image interface board (HYZPB1 type)
7-28 high resolving power multi-grayscale display (OPC-OVM9E)
7-29 serial-parallel interface plate (FAT-003)
Claims (5)
1, a kind of reflective sonomicroscope with novel acoustic mirror, form by pulse shaping harmony signal deteching circuit, it is characterized in that adopting the glass metal sphere transducing type acoustic mirror that has protective device and high hardness wear-resisting diaphragm, protective device can be to be added in the outer cover of glass column; Adopt a universal microcomputer to constitute mechanical scanning, high-frequency unit control, visual demonstration, storage and disposal system; The stepper motor that employing has new drive circuit drives acoustic mirror displacement and mechanical scanning, and the selection of observation point is realized by programmed control, new drive circuit be its power amplifier be operated in by-amplify duty, utilize the transistor dynamic resistance to guarantee that stepper motor runs up.
2, according to the said reflective sonomicroscope of claim 1 with novel acoustic mirror, it is characterized in that said glass metal sphere transducing type acoustic mirror, glass and metal be sealing by fusing mutually.
3, according to claim 1 and 2 said reflective sonomicroscopes, it is characterized in that said acoustic mirror protective sleeve can be made of copper with novel acoustic mirror, with golden symphysis together, become an electrode, several pawls can be arranged on pullover, the long acoustic mirror of slightly being longer than of pawl.
4,, it is characterized in that said high hardness wear-resisting diaphragm can be at golden film external sediment one deck silicon nitride (Si with microwave plasma (CVD) (MPCVD) according to claim 1 and 2 said reflective sonomicroscopes with novel acoustic mirror
3N
4) film or diamond thin.
5, according to claim 1 and 2 said reflective sonomicroscopes with novel acoustic mirror, the new drive circuit that it is characterized in that said stepper motor, can be by amplifier, being operated in the power amplifier that ends-amplify duty forms, in the amplifier input circuit, can seal in the RC accelerating network, be used to improve pulse front edge, in bleed-off circuit, seal in the RC accelerating network, be used to improve pulse back edge, also can seal in an indicator of connecting with resistance (in parallel) at bleed-off circuit with the RC accelerating network by light emitting diode, utilize a part useless energy storage of releasing luminous, indication motor work.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90101053 CN1019919C (en) | 1990-03-08 | 1990-03-08 | Reflecting sound microscope with acoustic mirror |
| GB9104911A GB2242270A (en) | 1990-03-08 | 1991-03-08 | Acoustic microscope with concave transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90101053 CN1019919C (en) | 1990-03-08 | 1990-03-08 | Reflecting sound microscope with acoustic mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1054667A true CN1054667A (en) | 1991-09-18 |
| CN1019919C CN1019919C (en) | 1993-02-17 |
Family
ID=4876921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90101053 Expired - Fee Related CN1019919C (en) | 1990-03-08 | 1990-03-08 | Reflecting sound microscope with acoustic mirror |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN1019919C (en) |
| GB (1) | GB2242270A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101675469B (en) * | 2007-05-03 | 2012-10-10 | 皇家飞利浦电子股份有限公司 | Methods and apparatuses of microbeamforming with adjustable fluid lenses |
| CN104122333A (en) * | 2014-04-12 | 2014-10-29 | 北京工业大学 | Array resolution type ultrasonic focusing transducer |
| CN109374738A (en) * | 2018-09-05 | 2019-02-22 | 广州联声电子科技有限公司 | A kind of ultrasonic microscope and method based on annular array |
| CN109374739A (en) * | 2018-09-05 | 2019-02-22 | 广州联声电子科技有限公司 | A kind of ultrasonic microscope and method based on annular surface battle array |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2373329B (en) * | 2000-05-05 | 2003-03-05 | Acoustical Tech Sg Pte Ltd | Acoustic microscope |
| US8089635B2 (en) | 2007-01-22 | 2012-01-03 | California Institute Of Technology | Method and system for fast three-dimensional imaging using defocusing and feature recognition |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56103327A (en) * | 1980-01-21 | 1981-08-18 | Hitachi Ltd | Ultrasonic image pickup apparatus |
| JPS60146152A (en) * | 1984-01-11 | 1985-08-01 | Hitachi Ltd | Ultrasonic microscope |
| US4655083A (en) * | 1984-07-08 | 1987-04-07 | Noriyoshi Chubachi | Surface ultrasonic wave interference microscope |
| US4659956A (en) * | 1985-01-24 | 1987-04-21 | General Electric Company | Compound focus ultrasonic transducer |
| JP2730756B2 (en) * | 1988-04-13 | 1998-03-25 | 日立建機株式会社 | Ultrasonic probe and manufacturing method thereof |
-
1990
- 1990-03-08 CN CN 90101053 patent/CN1019919C/en not_active Expired - Fee Related
-
1991
- 1991-03-08 GB GB9104911A patent/GB2242270A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101675469B (en) * | 2007-05-03 | 2012-10-10 | 皇家飞利浦电子股份有限公司 | Methods and apparatuses of microbeamforming with adjustable fluid lenses |
| CN104122333A (en) * | 2014-04-12 | 2014-10-29 | 北京工业大学 | Array resolution type ultrasonic focusing transducer |
| CN104122333B (en) * | 2014-04-12 | 2017-04-05 | 北京工业大学 | Array analytic expression focusing ultrasonic wave transducer |
| CN109374738A (en) * | 2018-09-05 | 2019-02-22 | 广州联声电子科技有限公司 | A kind of ultrasonic microscope and method based on annular array |
| CN109374739A (en) * | 2018-09-05 | 2019-02-22 | 广州联声电子科技有限公司 | A kind of ultrasonic microscope and method based on annular surface battle array |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9104911D0 (en) | 1991-04-24 |
| GB2242270A (en) | 1991-09-25 |
| CN1019919C (en) | 1993-02-17 |
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