GB2230607B - Temperature-controlled bodies - Google Patents

Temperature-controlled bodies

Info

Publication number
GB2230607B
GB2230607B GB8907684A GB8907684A GB2230607B GB 2230607 B GB2230607 B GB 2230607B GB 8907684 A GB8907684 A GB 8907684A GB 8907684 A GB8907684 A GB 8907684A GB 2230607 B GB2230607 B GB 2230607B
Authority
GB
United Kingdom
Prior art keywords
temperature
controlled bodies
bodies
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8907684A
Other versions
GB8907684D0 (en
GB2230607A (en
Inventor
Shane Duncan
Christopher Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Semiconductors Ltd
Plessey Co Ltd
Original Assignee
Plessey Semiconductors Ltd
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Semiconductors Ltd, Plessey Co Ltd filed Critical Plessey Semiconductors Ltd
Priority to GB8907684A priority Critical patent/GB2230607B/en
Publication of GB8907684D0 publication Critical patent/GB8907684D0/en
Priority to PCT/GB1990/000430 priority patent/WO1990012295A1/en
Publication of GB2230607A publication Critical patent/GB2230607A/en
Application granted granted Critical
Publication of GB2230607B publication Critical patent/GB2230607B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
    • F27D21/0014—Devices for monitoring temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
GB8907684A 1989-04-05 1989-04-05 Temperature-controlled bodies Expired - Fee Related GB2230607B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB8907684A GB2230607B (en) 1989-04-05 1989-04-05 Temperature-controlled bodies
PCT/GB1990/000430 WO1990012295A1 (en) 1989-04-05 1990-03-21 Temperature-controlled bodies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8907684A GB2230607B (en) 1989-04-05 1989-04-05 Temperature-controlled bodies

Publications (3)

Publication Number Publication Date
GB8907684D0 GB8907684D0 (en) 1989-05-17
GB2230607A GB2230607A (en) 1990-10-24
GB2230607B true GB2230607B (en) 1992-10-28

Family

ID=10654511

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8907684A Expired - Fee Related GB2230607B (en) 1989-04-05 1989-04-05 Temperature-controlled bodies

Country Status (2)

Country Link
GB (1) GB2230607B (en)
WO (1) WO1990012295A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5114242A (en) * 1990-12-07 1992-05-19 Ag Processing Technologies, Inc. Bichannel radiation detection method
GB9222082D0 (en) * 1992-10-21 1992-12-02 Davy Mckee Poole A radiation pyrometer assembly for sensing the temperature of an elongate body moving longitudinally
DE4338506A1 (en) * 1993-11-11 1995-05-18 Daimler Benz Ag Arrangement for the thermal treatment of semiconductor substrates
US5551982A (en) * 1994-03-31 1996-09-03 Applied Materials, Inc. Semiconductor wafer process chamber with susceptor back coating
DE4414391C2 (en) * 1994-04-26 2001-02-01 Steag Rtp Systems Gmbh Method for wave vector selective pyrometry in rapid heating systems
GB2453966B (en) * 2007-10-23 2011-12-07 Univ Montfort Method of measuring surface emissivity

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117712A (en) * 1976-01-23 1978-10-03 Armstrong Cork Company Emissimeter and method of measuring emissivity
JPS62100623A (en) * 1985-10-28 1987-05-11 Nippon Abionikusu Kk Measurement of radiation temperature and black body tape therefor

Also Published As

Publication number Publication date
GB8907684D0 (en) 1989-05-17
WO1990012295A1 (en) 1990-10-18
GB2230607A (en) 1990-10-24

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030405