GB2212325A - Solid state light source - Google Patents

Solid state light source Download PDF

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Publication number
GB2212325A
GB2212325A GB8726678A GB8726678A GB2212325A GB 2212325 A GB2212325 A GB 2212325A GB 8726678 A GB8726678 A GB 8726678A GB 8726678 A GB8726678 A GB 8726678A GB 2212325 A GB2212325 A GB 2212325A
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United Kingdom
Prior art keywords
active region
light source
solid state
quantum wells
state light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8726678A
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GB8726678D0 (en
GB2212325B (en
Inventor
Richard Mark Ash
Andrew Carter
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Plessey Co Ltd
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Plessey Co Ltd
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Publication date
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Priority to GB8726678A priority Critical patent/GB2212325B/en
Publication of GB8726678D0 publication Critical patent/GB8726678D0/en
Publication of GB2212325A publication Critical patent/GB2212325A/en
Application granted granted Critical
Publication of GB2212325B publication Critical patent/GB2212325B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031Edge-emitting structures
    • H01S5/4043Edge-emitting structures with vertically stacked active layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3428Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers layer orientation perpendicular to the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4087Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength

Abstract

The light source comprises a monolithic light emitter diode structure having an active region 8 which is located between two materials 9, 11 having wider energy bandgaps than the active region, the active region including multiple quantum wells 12 which have graded well thicknesses through the active region 8, such that the source is capable of emitting light at wavelengths L1, L2 spaced over a range defined by the width and depth of the quantum wells. This enables the light source to be used in optical fibre devices where it replaces a filament lamp and thus gives improved reliability in use. <IMAGE>

Description

SOLID STATE LIGHT SOURCE This invention relates to a solid state light source. It relates particularly to such a light source which is capable of emitting light over a broad spectral band.
In the construction of optical fibre devices which make use of a spectral filtering technique, it is usual to employ tungsten-halogen incandescent filament lamps in order to provide the broad spectral emission width that is necessary. Unfortunately, the filament lamp is a somewhat fragile article and this makes it unreliable in operation.
The need to include such a lamp is likely to cause eventual breakdown of the complete fibre device particularly when this is used under the severe conditions of operation that are sometimes necessary. The degree of ruggedness and reliability that would be desirable in the lamp part can be found in the light emitter diode construction but these devices have inherently a rather narrow spectral emission width (typically 40 nanometres at a wavelength of 900 nanometres) so that a single conventional LED would be incapable of providing the bandwidth required.
One object of the present invention is to provide a solid state light source fliat will be capable of emitting light over a broad spectral band and which will be reliable in operation.
According to the invention, there is provided a solid state light source comprising a monolithic light emitter diode structure having an active region which is located between two materials having wider energy bandgaps than the active region, the active region including multiple quantum wells which have graded well thicknesses through the active region, such that the source is capable of emitting light at wavelengths spaced over a range defined by the width and depth of the quantum wells.
Preferably, the active region comprises a compound semiconductor material having a direct energy bandgap. The active region may comprise a gallium aluminium arsenide compound.
Alternatively, the active region may comprise a gallium indium arsenide phosphide compound.
By way of example, a particular embodiment of the invention will now be described with reference to the accompanying drawings, in which: Figure 1 is a graph showing the light wavelengths produced by some commercially available LED devices, Figure 2 is a diagram showing the energy bands and wavelengths associated with different compound semiconductor materials systems, Figure 3 is a schematic band diagram of a standard light emitter diode structure, Figures 4 and 5 are different embodiments of a multiple quantum well construction according to the invention, and, Figure 6 is a graph showing the light wavelength output of a multiple quantum well device.
Figure 1 shows schematically some typical light outputs from existing light emitter diode devices. The horizontal axis gives the wavelength of emission whilst the vertical axis measures the light intensity output. It will be seen that three existing devices have output curves 1 with very sharply defined centre wavelengths. For obtaining light outputs in a short wavelength (about 0.6 to 0.9 microns) part of the range the semiconductors used could be based on the GaAlAs/GaAs materials system. For obtaining light outputs in a long wavelength (above 1.0 microns) part of the range the InP/GaInAsP materials system would generally be used.
As already explained, the present invention was devised to provide a broad band of light emission, somewhat as depicted by the output curve 2 on Figure 1.
Figure 2 is a diagram illustrating the useful parts of these semiconductor materials systems with the horizontal axis showing the Wavelength Corresponding to Energy Gap measured in microns.
The vertical axis gives the Lattice Constants (in Angstrom Units) for the materials.
An upper horizontal axis shows the Energy Band (measured in electron volts), whilst at the right hand side lines corresponding to the choice of different device substrate materials have been marked using a substrate of indium phosphide and InGaAsP, wavelengths between 1.0 and 1.6 microns could be expected. Similarly, using a substrate of gallium arsenide and GaAlAs, wavelengths between 0.6 and 0.9 microns should be possible. This illustration thus confirms the figures for wavelength ranges already given.
A first horizontal line portion 3 highlights the properties of GaA1As/GaAs whilst a second horizontal line portion 4 depicts those for GaInAsP/InP.
Figure 3 is a schematic band diagram of a conventional gallium arsenide/gallium aluminium arsenide light emitter diode construction. The diagram shows on the horizontal axis 6 the distance (by which the thickness of the active region is measured) and on a vertical axis 7 the electron energy, a greater distance from the origin indicating a higher level of energy of the electrons.
Conversely, for holes present in the diagram, a hole nearer the origin will have a higher level of energy than one further from the origin.
In Figure 3, a very thin active region 8 of semiconductor material is sandwiched between cladding layers 9 and 11 of wider bandgap semiconductor material. The layer 9 is of n-gallium aluminium arsenide whilst the layer 11 is of the same chemical composition but of the p-conductivity type. The sandwiched region 8 is also of p-gallium aluminium arsenide.
In operation, electrons are injected from the wide bandgap cladding layer 9 into the p-type active region 8. Similarly, holes are injected from the cladding layer 11 into the active region 8. The recombination of the electrons and holes occurs in the region 8 and this causes the emission of light. For the construction depicted in Figure 3, the light is emitted at substantially a single wavelength and this would therefore produce a single one of the output curves 1 of Figure 1. The thickness dimension of the bandgap thus has a single value in the conventional light emitter diode construction.
Figure 4 is a schematic band diagram of a gallium arsenidelgallium aluminium arsenide construction according to the invention. Electrons are injected from the wide bandgap n-GaAlAs cladding layer 9 into the p-type active region 8, where they recombine with holes from a p-type cladding layer 11. The recombination occurs with the emission of light L1 of long wavelength from the side of the gap adjacent the p-type material 11 and of short wavelength light L2 from the side of the gap adjacent the n-type material 9. The active region 8 includes a number of quantum wells 12 of varying width. The quantum wells 12 are of gallium arsenide and they are separated by spacer layers 13 of gallium aluminium arsenide.These wells 12 act to confine the charge carriers, thus reducing the possibility of all the carriers drifting to the narrow bandgap side of the active region. It is necessary to ensure approximately uniform pumping of all the wells 12. One way of arranging such pumping would be by providing either a positive or a negative built-in field effect by grading the aluminium concentrations present in the barrier layers.
Figure 5 shows an alternative construction where quantum wells 12 are located between spacer layers 13 in the active region 8.
The spacer layers 13 are graded in length so that they will provide the necessary control over the movement of the charge carriers when the device is in operation.
The construction of the solid state light source begins with growth of the required semiconductor material which could be by metal organic chemical vapour deposition (MOCVD) or by molecular beam epitaxy (MBE).
In MOCVD, gases such as trimethyl gallium, trimethyl indium, trimethyl aluminium, arsine and phosphine are reacted at atmospheric or low pressure on a heated substrate of gallium arsenide or indium phosphide. P- or n- type dopant materials are incorporated by including dimethyl zinc, hydrogen sulphide, hydrogen selenide or other reagents in the gas stream.
In MBE, elements or compounds containing the required elements are heated in a high vacuum system and impinge upon a heated gallium arsenide or indium phosphide substrate to grow the layers required. Dopants are incorporated by introducing them into the system in the same way. Gaseous sources may also be used to provide the reagents.
After the growth of the required semiconductor material, the diode may then be fabricated using standard semiconductor processing techniques such as the following: 1. Confinement of current to a particular region by dielectric isolation, implantation, diffusion or the growth of burying or current blocking semiconductor regions.
2. Ohmic contact fabrication using diffusion, ion implantation or metallization using titanium, zinc, gold, indium, germanium, platinum, chromium, tungsten, cadmium or other suitable metals deposited by evaporation, sputtering or selective growth.
3. Contact alloying at elevated temperatures.
4. Thinning of wafers by mechanical, chemical or other techniques.
5. Etching of semiconductors using chemical reagents, ion beam milling, reactive ion etching or plasma etching.
In order to make the calculations to define well and barrier thicknesses it is necessary first to calculate energy levels in systems ~of coupled quantum wells. This is usually carried out within the envelope function approximation in which a simple expression for the wavefunction in each well or barrier is available. The energy levels are found by matching boundary conditions. The details of the calculation are similar to those for dielectric multilayer slab waveguides. Accurate calculations require inclusion of the effect of a non-parabolic bandstructure and the effects of finite well depth (simple models assume infinite well depth).
Consideration of the above factors allows calculation of energy levels in the two complex sets of quantum wells required for the fabrication of broadband light emitter diode sources.
Figure 6 is a graph of the actual results obtained with an early prototype of the multiple quantum well light emitter diode construction. The horizontal axis gives the wavelength of emission (in microns) whilst the vertical axis measures the light intensity. The curve 14 is that obtained for the prototype construction and curve 16 is that of a typical single wavelength LED for comparison. The advantage in linewidth of the multiple quantum well construction is clearly visible since there has been an increase in spectral full width at the half maximum value from 100 to 335 nanometres.
The foregoing descriptions of embodiments of the invention have been given by way of example only and a number of modifications may be made without departing from the scope of the invention as defined in the appended claims. For instance, it is not essential that the device construction should be based on the gallium arsenide/gallium aluminium arsenide system. This is capable of giving broadband light emission only over a particular wavelength range. For a different band of emission, alternative materials would be required and a possible choice would be indium phosphide with gallium indium arsenide phosphide.

Claims (6)

1. A solid state light source comprising a monolithic light emitter diode structure having an active region which is located between two materials having wider energy bandgaps than the active region, the active region including multiple quantum wells which have graded well thicknesses through the active region, such that the source is capable of emitting light at wavelengths spaced over a range defined by the width and depth of the quantum wells.
2. A light source as claimed in Claim 1, in which the active region comprises a compound semiconductor material having a direct energy bandgap.
3. A light source as claimed in Claim 1 or 2, in which the active region comprises a gallium aluminium arsenide compound.
4. A light source as claimed in Claim 1 or 2, in which the active region comprises a gallium indium arsenide phosphide compound.
5. A solid state light source substantially as hereinbefore described with reference to any one of Figures 4 to 6 of the accompanying drawings.
6. A method of constructing a solid state light source substantially as hereinbefore described.
GB8726678A 1987-11-13 1987-11-13 Solid state light source Expired - Fee Related GB2212325B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8726678A GB2212325B (en) 1987-11-13 1987-11-13 Solid state light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8726678A GB2212325B (en) 1987-11-13 1987-11-13 Solid state light source

Publications (3)

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GB8726678D0 GB8726678D0 (en) 1987-12-16
GB2212325A true GB2212325A (en) 1989-07-19
GB2212325B GB2212325B (en) 1990-10-03

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2702602A1 (en) * 1993-03-12 1994-09-16 Deveaud Pledran Benoit Semiconductor laser structure with double heterostructure and method of production
EP0661782A1 (en) * 1993-12-28 1995-07-05 Nec Corporation A semiconductor laser
EP0662739A1 (en) * 1994-01-05 1995-07-12 AT&T Corp. Article comprising a semiconductor laser that is non-degenerate with regard to polarization
US5483547A (en) * 1994-05-10 1996-01-09 Northern Telecom Limited Semiconductor laser structure for improved stability of the threshold current with respect to changes in the ambient temperature
FR2811150A1 (en) * 2000-06-20 2002-01-04 Mitel Semiconductor Ab SEMICONDUCTOR LASERS HAVING VARIABLE QUANTUM WELL THICKNESSES
FR2823916A1 (en) * 2001-04-19 2002-10-25 Natioanl Taiwan University METHOD FOR INCREASING THE BANDWIDTH OF OPTICAL AMPLIFIERS / SEMICONDUCTOR SUPRALUMINESCENT DIODES USING MULTIPLE QUANTIALLY NON-IDENTICAL WELLS
EP1729385A1 (en) * 2005-06-01 2006-12-06 AGILENT TECHNOLOGIES, INC. (A Delaware Corporation) Active region of a light emitting device optimized for increased modulation speed operation
DE102006025964A1 (en) * 2006-06-02 2007-12-06 Osram Opto Semiconductors Gmbh Multiple quantum well structure, radiation-emitting semiconductor body and radiation-emitting component
WO2014177367A1 (en) * 2013-04-29 2014-11-06 Osram Opto Semiconductors Gmbh Semiconductor layer sequence for an optoelectronic component

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4589115A (en) * 1983-09-09 1986-05-13 Xerox Corporation Wavelength tuning of quantum well heterostructure lasers using an external grating
US4599728A (en) * 1983-07-11 1986-07-08 At&T Bell Laboratories Multi-quantum well laser emitting at 1.5 μm

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4599728A (en) * 1983-07-11 1986-07-08 At&T Bell Laboratories Multi-quantum well laser emitting at 1.5 μm
US4589115A (en) * 1983-09-09 1986-05-13 Xerox Corporation Wavelength tuning of quantum well heterostructure lasers using an external grating

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2702602A1 (en) * 1993-03-12 1994-09-16 Deveaud Pledran Benoit Semiconductor laser structure with double heterostructure and method of production
EP0661782A1 (en) * 1993-12-28 1995-07-05 Nec Corporation A semiconductor laser
US5636236A (en) * 1993-12-28 1997-06-03 Nec Corporation Semiconductor laser
EP0662739A1 (en) * 1994-01-05 1995-07-12 AT&T Corp. Article comprising a semiconductor laser that is non-degenerate with regard to polarization
US5483547A (en) * 1994-05-10 1996-01-09 Northern Telecom Limited Semiconductor laser structure for improved stability of the threshold current with respect to changes in the ambient temperature
FR2811150A1 (en) * 2000-06-20 2002-01-04 Mitel Semiconductor Ab SEMICONDUCTOR LASERS HAVING VARIABLE QUANTUM WELL THICKNESSES
GB2363901A (en) * 2000-06-20 2002-01-09 Mitel Semiconductor Ab An optical emission device having quantum wells
GB2378318A (en) * 2001-04-19 2003-02-05 Univ Nat Taiwan Optoelectronic devices
FR2823916A1 (en) * 2001-04-19 2002-10-25 Natioanl Taiwan University METHOD FOR INCREASING THE BANDWIDTH OF OPTICAL AMPLIFIERS / SEMICONDUCTOR SUPRALUMINESCENT DIODES USING MULTIPLE QUANTIALLY NON-IDENTICAL WELLS
GB2378318B (en) * 2001-04-19 2005-06-01 Univ Nat Taiwan Semiconductor optoelectronic apparatus having plural quantum wells of different well widths
EP1729385A1 (en) * 2005-06-01 2006-12-06 AGILENT TECHNOLOGIES, INC. (A Delaware Corporation) Active region of a light emitting device optimized for increased modulation speed operation
US7577172B2 (en) 2005-06-01 2009-08-18 Agilent Technologies, Inc. Active region of a light emitting device optimized for increased modulation speed operation
DE102006025964A1 (en) * 2006-06-02 2007-12-06 Osram Opto Semiconductors Gmbh Multiple quantum well structure, radiation-emitting semiconductor body and radiation-emitting component
WO2014177367A1 (en) * 2013-04-29 2014-11-06 Osram Opto Semiconductors Gmbh Semiconductor layer sequence for an optoelectronic component
US9553231B2 (en) 2013-04-29 2017-01-24 Osram Opto Semiconductors Gmbh Semiconductor layer sequence and method of operating an optoelectronic semiconductor chip
DE102013104351B4 (en) 2013-04-29 2022-01-20 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Semiconductor layer sequence and method for operating an optoelectronic semiconductor chip

Also Published As

Publication number Publication date
GB8726678D0 (en) 1987-12-16
GB2212325B (en) 1990-10-03

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Effective date: 19961113