GB2201509B - Displacement measuring apparatus capable of forming an output signal of substantially constant amplitude - Google Patents

Displacement measuring apparatus capable of forming an output signal of substantially constant amplitude

Info

Publication number
GB2201509B
GB2201509B GB8725143A GB8725143A GB2201509B GB 2201509 B GB2201509 B GB 2201509B GB 8725143 A GB8725143 A GB 8725143A GB 8725143 A GB8725143 A GB 8725143A GB 2201509 B GB2201509 B GB 2201509B
Authority
GB
United Kingdom
Prior art keywords
forming
output signal
measuring apparatus
substantially constant
apparatus capable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8725143A
Other versions
GB8725143D0 (en
GB2201509A (en
Inventor
Tetsuharu Nishimura
Koh Ishizuka
Masaaki Tsukiji
Chikara Sato
Susumu Kozuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB8725143D0 publication Critical patent/GB8725143D0/en
Publication of GB2201509A publication Critical patent/GB2201509A/en
Application granted granted Critical
Publication of GB2201509B publication Critical patent/GB2201509B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
GB8725143A 1986-10-31 1987-10-27 Displacement measuring apparatus capable of forming an output signal of substantially constant amplitude Expired - Lifetime GB2201509B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25993886A JPS63115012A (en) 1986-10-31 1986-10-31 Displacement measuring instrument

Publications (3)

Publication Number Publication Date
GB8725143D0 GB8725143D0 (en) 1987-12-02
GB2201509A GB2201509A (en) 1988-09-01
GB2201509B true GB2201509B (en) 1990-11-14

Family

ID=17341009

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8725143A Expired - Lifetime GB2201509B (en) 1986-10-31 1987-10-27 Displacement measuring apparatus capable of forming an output signal of substantially constant amplitude

Country Status (3)

Country Link
JP (1) JPS63115012A (en)
DE (1) DE3736704C2 (en)
GB (1) GB2201509B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5035507A (en) * 1988-12-21 1991-07-30 Mitutoyo Corporation Grating-interference type displacement meter apparatus
DE3911880A1 (en) * 1989-04-11 1990-10-18 Radex Heraklith METHOD FOR PRODUCING PERICLAS CRYSTALS
DE4033013C2 (en) * 1990-10-18 1994-11-17 Heidenhain Gmbh Dr Johannes Polarization-optical arrangement
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
GB2256476B (en) * 1991-05-30 1995-09-27 Rank Taylor Hobson Ltd Positional measurement
DE4318386C2 (en) * 1993-06-01 2002-09-19 Rohm Co Ltd Optical encoder device for detecting the movement of a movable element
DE10056605A1 (en) 2000-11-15 2002-05-23 Kostal Leopold Gmbh & Co Kg Method for signal evaluation of an opto-electronic path or angle measurement device, especially for determination of a vehicle steering column position, in which adjustments can be made for impaired sensors or damaged code wheel
DE10056604A1 (en) 2000-11-15 2002-05-23 Kostal Leopold Gmbh & Co Kg Method for signal evaluation of an opto-electronic path or angle measurement device, especially for determination of a motor vehicle steering angle, in which the effects of impaired sensors or a damaged code wheel are compensated
DE10107582C1 (en) * 2001-02-17 2002-10-10 Kostal Leopold Gmbh & Co Kg Optoelectronic angle sensor for vehicle steering, has light barrier transmitter radiation intensity in asymptotic region of intensity-switching point curve giving switch change for off-center beam interruption
JP5602420B2 (en) * 2009-12-10 2014-10-08 キヤノン株式会社 Displacement measuring device, exposure device, and precision processing equipment
DE102010063253A1 (en) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optical position measuring device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH444964A (en) * 1965-10-02 1967-10-15 Oerlikon Buehrle Holding Ag Arrangement to compensate for variable interfering influences on a radiation-electrical measuring or control path
JPS57139607A (en) * 1981-02-23 1982-08-28 Hitachi Ltd Position measuring equipment
DE3316144A1 (en) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Method and device for measuring the extent of a movement
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
JPS59173709A (en) * 1983-03-23 1984-10-01 Yokogawa Hokushin Electric Corp Physical quantity measuring system
JPH0624405A (en) * 1991-12-06 1994-02-01 Kurobaa Shokuhin:Kk Method and device for inserting food in packing bag

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor

Also Published As

Publication number Publication date
DE3736704C2 (en) 1995-11-23
JPS63115012A (en) 1988-05-19
DE3736704A1 (en) 1988-05-11
GB8725143D0 (en) 1987-12-02
GB2201509A (en) 1988-09-01

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20071026