GB2190460A - Cryopump with vibration isolation - Google Patents

Cryopump with vibration isolation

Info

Publication number
GB2190460A
GB2190460A GB08710617A GB8710617A GB2190460A GB 2190460 A GB2190460 A GB 2190460A GB 08710617 A GB08710617 A GB 08710617A GB 8710617 A GB8710617 A GB 8710617A GB 2190460 A GB2190460 A GB 2190460A
Authority
GB
United Kingdom
Prior art keywords
cryopump
bellows
vibration isolation
damping material
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08710617A
Other versions
GB8710617D0 (en
GB2190460B (en
Inventor
Halil Tugal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of GB8710617D0 publication Critical patent/GB8710617D0/en
Publication of GB2190460A publication Critical patent/GB2190460A/en
Application granted granted Critical
Publication of GB2190460B publication Critical patent/GB2190460B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
    • F16F3/08—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber
    • F16F3/10—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction
    • F16F3/12—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction the steel spring being in contact with the rubber spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Abstract

A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows (12, 52) covered with vibration damping material (54) and separated by an intermediate mass (53). The damping material (54) fills the spaces between corrugations of the bellows (12) and is bonded to the bellows (12).
GB8710617A 1985-09-24 1986-09-23 Cryopump with vibration isolation Expired GB2190460B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US77978685A 1985-09-24 1985-09-24
US83969386A 1986-03-13 1986-03-13
PCT/US1986/001994 WO1987001768A1 (en) 1985-09-24 1986-09-23 Cryopump with vibration isolation

Publications (3)

Publication Number Publication Date
GB8710617D0 GB8710617D0 (en) 1987-06-10
GB2190460A true GB2190460A (en) 1987-11-18
GB2190460B GB2190460B (en) 1989-05-04

Family

ID=27119621

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8710617A Expired GB2190460B (en) 1985-09-24 1986-09-23 Cryopump with vibration isolation

Country Status (3)

Country Link
DE (1) DE3690477T1 (en)
GB (1) GB2190460B (en)
WO (1) WO1987001768A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3836884C2 (en) * 1988-10-29 1997-10-02 Leybold Ag Method for examining a sample on the cold head of a cryostat and refrigerator cryostat
US5231840A (en) * 1991-03-28 1993-08-03 Daikin Industries, Ltd. Cryopump
JP2019143537A (en) * 2018-02-21 2019-08-29 住友重機械工業株式会社 Cryopump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE827144C (en) * 1950-07-18 1952-01-07 Ernst Kreissig Rubber steel spring
DE938812C (en) * 1953-12-04 1956-02-09 Adolf Schnorr K G Guide for disc springs
GB855451A (en) * 1957-11-06 1960-11-30 Metalastik Ltd Improvements in or relating to torsion springs
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
US4539822A (en) * 1984-02-27 1985-09-10 National Electrostatics Corporation Vibration isolator for cryopump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595179B2 (en) * 1979-05-18 1984-02-03 富士通株式会社 Vibration isolation structure for vacuum equipment
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
US4526015A (en) * 1984-10-15 1985-07-02 General Electric Company Support for cryostat penetration tube

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE827144C (en) * 1950-07-18 1952-01-07 Ernst Kreissig Rubber steel spring
DE938812C (en) * 1953-12-04 1956-02-09 Adolf Schnorr K G Guide for disc springs
GB855451A (en) * 1957-11-06 1960-11-30 Metalastik Ltd Improvements in or relating to torsion springs
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
US4539822A (en) * 1984-02-27 1985-09-10 National Electrostatics Corporation Vibration isolator for cryopump

Also Published As

Publication number Publication date
WO1987001768A1 (en) 1987-03-26
DE3690477T1 (en) 1987-10-08
GB8710617D0 (en) 1987-06-10
GB2190460B (en) 1989-05-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19960923