GB2181366B - The extraction of particulate matter from vacuum processing apparatus - Google Patents

The extraction of particulate matter from vacuum processing apparatus

Info

Publication number
GB2181366B
GB2181366B GB8624257A GB8624257A GB2181366B GB 2181366 B GB2181366 B GB 2181366B GB 8624257 A GB8624257 A GB 8624257A GB 8624257 A GB8624257 A GB 8624257A GB 2181366 B GB2181366 B GB 2181366B
Authority
GB
United Kingdom
Prior art keywords
extraction
processing apparatus
particulate matter
vacuum processing
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8624257A
Other versions
GB8624257D0 (en
GB2181366A (en
Inventor
Dr Geoffrey Dearnaley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of GB8624257D0 publication Critical patent/GB8624257D0/en
Publication of GB2181366A publication Critical patent/GB2181366A/en
Application granted granted Critical
Publication of GB2181366B publication Critical patent/GB2181366B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
    • B01D45/08—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
    • B01D45/10—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators which are wetted

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
GB8624257A 1985-10-09 1986-10-09 The extraction of particulate matter from vacuum processing apparatus Expired - Fee Related GB2181366B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858524893A GB8524893D0 (en) 1985-10-09 1985-10-09 Extraction of particulate matter

Publications (3)

Publication Number Publication Date
GB8624257D0 GB8624257D0 (en) 1986-11-12
GB2181366A GB2181366A (en) 1987-04-23
GB2181366B true GB2181366B (en) 1990-03-21

Family

ID=10586409

Family Applications (2)

Application Number Title Priority Date Filing Date
GB858524893A Pending GB8524893D0 (en) 1985-10-09 1985-10-09 Extraction of particulate matter
GB8624257A Expired - Fee Related GB2181366B (en) 1985-10-09 1986-10-09 The extraction of particulate matter from vacuum processing apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB858524893A Pending GB8524893D0 (en) 1985-10-09 1985-10-09 Extraction of particulate matter

Country Status (1)

Country Link
GB (2) GB8524893D0 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB542788A (en) * 1941-09-30 1942-01-27 John Hugh Durber Improvements in service trays or waiters or the like
GB714620A (en) * 1951-02-10 1954-09-01 Bayer Ag Improvements relating to methods of filtering and filtering apparatus
GB842948A (en) * 1957-07-29 1960-07-27 Bataafsche Petroleum Improvements in or relating to apparatus for separating liquid particles from gas
GB1211170A (en) * 1967-11-30 1970-11-04 Harte & Company Inc Improvements in or relating to articles of mat-like form
US3812970A (en) * 1971-12-28 1974-05-28 M Yamazaki Separating apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB542788A (en) * 1941-09-30 1942-01-27 John Hugh Durber Improvements in service trays or waiters or the like
GB714620A (en) * 1951-02-10 1954-09-01 Bayer Ag Improvements relating to methods of filtering and filtering apparatus
GB842948A (en) * 1957-07-29 1960-07-27 Bataafsche Petroleum Improvements in or relating to apparatus for separating liquid particles from gas
GB1211170A (en) * 1967-11-30 1970-11-04 Harte & Company Inc Improvements in or relating to articles of mat-like form
US3812970A (en) * 1971-12-28 1974-05-28 M Yamazaki Separating apparatus

Also Published As

Publication number Publication date
GB8624257D0 (en) 1986-11-12
GB8524893D0 (en) 1985-11-13
GB2181366A (en) 1987-04-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee