GB2176653B - Method of manufacturing integrated circuits - Google Patents

Method of manufacturing integrated circuits

Info

Publication number
GB2176653B
GB2176653B GB08515659A GB8515659A GB2176653B GB 2176653 B GB2176653 B GB 2176653B GB 08515659 A GB08515659 A GB 08515659A GB 8515659 A GB8515659 A GB 8515659A GB 2176653 B GB2176653 B GB 2176653B
Authority
GB
United Kingdom
Prior art keywords
integrated circuits
manufacturing integrated
manufacturing
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08515659A
Other versions
GB8515659D0 (en
GB2176653A (en
Inventor
Michael Geoffrey Pitt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Priority to GB08515659A priority Critical patent/GB2176653B/en
Publication of GB8515659D0 publication Critical patent/GB8515659D0/en
Priority claimed from PCT/GB1986/000548 external-priority patent/WO1988002182A1/en
Publication of GB2176653A publication Critical patent/GB2176653A/en
Application granted granted Critical
Publication of GB2176653B publication Critical patent/GB2176653B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
    • G01R31/2858—Measuring of material aspects, e.g. electro-migration [EM], hot carrier injection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB08515659A 1985-06-20 1985-06-20 Method of manufacturing integrated circuits Expired GB2176653B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08515659A GB2176653B (en) 1985-06-20 1985-06-20 Method of manufacturing integrated circuits

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08515659A GB2176653B (en) 1985-06-20 1985-06-20 Method of manufacturing integrated circuits
PCT/GB1986/000548 WO1988002182A1 (en) 1986-09-17 1986-09-17 Method of manufacturing integrated circuits

Publications (3)

Publication Number Publication Date
GB8515659D0 GB8515659D0 (en) 1985-07-24
GB2176653A GB2176653A (en) 1986-12-31
GB2176653B true GB2176653B (en) 1988-06-15

Family

ID=10581064

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08515659A Expired GB2176653B (en) 1985-06-20 1985-06-20 Method of manufacturing integrated circuits

Country Status (1)

Country Link
GB (1) GB2176653B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07302773A (en) * 1994-05-06 1995-11-14 Texas Instr Japan Ltd Semiconductor wafer and semiconductor device
US5514974A (en) * 1994-10-12 1996-05-07 International Business Machines Corporation Test device and method for signalling metal failure of semiconductor wafer
EP1596210A1 (en) 2004-05-11 2005-11-16 Interuniversitair Micro-Elektronica Centrum (IMEC) Method for lifetime determination of submicron metal interconnects

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55120164A (en) * 1979-03-12 1980-09-16 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
GB8515659D0 (en) 1985-07-24
GB2176653A (en) 1986-12-31

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee