GB2170005B - Interferometric multicoordinate measuring device - Google Patents

Interferometric multicoordinate measuring device

Info

Publication number
GB2170005B
GB2170005B GB8600989A GB8600989A GB2170005B GB 2170005 B GB2170005 B GB 2170005B GB 8600989 A GB8600989 A GB 8600989A GB 8600989 A GB8600989 A GB 8600989A GB 2170005 B GB2170005 B GB 2170005B
Authority
GB
United Kingdom
Prior art keywords
interferometric
measuring device
multicoordinate
multicoordinate measuring
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8600989A
Other versions
GB2170005A (en
GB8600989D0 (en
Inventor
Gerd Jager
Hans Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB8600989D0 publication Critical patent/GB8600989D0/en
Publication of GB2170005A publication Critical patent/GB2170005A/en
Application granted granted Critical
Publication of GB2170005B publication Critical patent/GB2170005B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB8600989A 1985-01-18 1986-01-16 Interferometric multicoordinate measuring device Expired GB2170005B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD27263785A DD234070A1 (en) 1985-01-18 1985-01-18 INTERFEROMETRIC MULTI COORDINATE MEASURING DEVICE

Publications (3)

Publication Number Publication Date
GB8600989D0 GB8600989D0 (en) 1986-02-19
GB2170005A GB2170005A (en) 1986-07-23
GB2170005B true GB2170005B (en) 1988-08-17

Family

ID=5564887

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8600989A Expired GB2170005B (en) 1985-01-18 1986-01-16 Interferometric multicoordinate measuring device

Country Status (4)

Country Link
DD (1) DD234070A1 (en)
DE (1) DE3600673A1 (en)
FR (1) FR2576407A1 (en)
GB (1) GB2170005B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623244A1 (en) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES
GB2229531A (en) * 1989-03-21 1990-09-26 Lee Russell Simpson Liquid level alarm
GB2256606A (en) * 1991-05-09 1992-12-16 Cranfield Precision Engineerin High-precision positional control.
DE4221989C2 (en) * 1992-07-04 1995-01-12 Daimler Benz Ag Device for interferometric measurement of the relative position of the two measuring quills of a two-column coordinate measuring machine
US5438413A (en) * 1993-03-03 1995-08-01 Kla Instruments Corporation Process for measuring overlay misregistration during semiconductor wafer fabrication
GB9603426D0 (en) * 1996-02-19 1996-04-17 Western Atlas Uk Ltd Improved monitoring system for workpiece and tool carriage movement
US6727989B1 (en) 2000-06-20 2004-04-27 Infineon Technologies Ag Enhanced overlay measurement marks for overlay alignment and exposure tool condition control
KR100578140B1 (en) * 2004-10-07 2006-05-10 삼성전자주식회사 Interferometer System For Measuring Displacement And Exposure System Using The Same
DE102004051962B4 (en) * 2004-10-26 2007-08-09 Technische Universität Ilmenau Device for the interferometric measurement of the spatial coordinates of an object
CN105466343B (en) * 2014-09-09 2019-02-05 上海微电子装备（集团）股份有限公司 Measurement of in-plane motion devices and methods therefor
GB2555646A (en) 2016-11-03 2018-05-09 Mbda Uk Ltd Interferometric position sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1547403A1 (en) * 1967-01-25 1969-12-18 Leitz Ernst Gmbh Evaluation method for interferometer
US4558952A (en) * 1983-02-22 1985-12-17 Kules Vladimir P Method for measuring an optical length of light path and a laser interferometer for carrying same into effect
EP0117964A1 (en) * 1983-03-03 1984-09-12 GAME INGENIERIE Société Anonyme Device to measure and to correct the displacement of the mobile organs of a 3 D measuring machine

Also Published As

Publication number Publication date
FR2576407A1 (en) 1986-07-25
GB2170005A (en) 1986-07-23
DD234070A1 (en) 1986-03-19
GB8600989D0 (en) 1986-02-19
DE3600673A1 (en) 1986-07-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee