GB2164796B - Semiconductor processing - Google Patents

Semiconductor processing

Info

Publication number
GB2164796B
GB2164796B GB08525195A GB8525195A GB2164796B GB 2164796 B GB2164796 B GB 2164796B GB 08525195 A GB08525195 A GB 08525195A GB 8525195 A GB8525195 A GB 8525195A GB 2164796 B GB2164796 B GB 2164796B
Authority
GB
United Kingdom
Prior art keywords
semiconductor processing
semiconductor
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08525195A
Other versions
GB8525195D0 (en
GB2164796A (en
Inventor
Peter Denis Scovell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ITT Industries Ltd
Original Assignee
ITT Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB08128127A external-priority patent/GB2106709B/en
Application filed by ITT Industries Ltd filed Critical ITT Industries Ltd
Priority to GB08525195A priority Critical patent/GB2164796B/en
Publication of GB8525195D0 publication Critical patent/GB8525195D0/en
Publication of GB2164796A publication Critical patent/GB2164796A/en
Application granted granted Critical
Publication of GB2164796B publication Critical patent/GB2164796B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
GB08525195A 1981-09-17 1985-10-12 Semiconductor processing Expired GB2164796B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08525195A GB2164796B (en) 1981-09-17 1985-10-12 Semiconductor processing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08128127A GB2106709B (en) 1981-09-17 1981-09-17 Semiconductor processing
GB08525195A GB2164796B (en) 1981-09-17 1985-10-12 Semiconductor processing

Publications (3)

Publication Number Publication Date
GB8525195D0 GB8525195D0 (en) 1985-11-13
GB2164796A GB2164796A (en) 1986-03-26
GB2164796B true GB2164796B (en) 1986-11-12

Family

ID=26280732

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08525195A Expired GB2164796B (en) 1981-09-17 1985-10-12 Semiconductor processing

Country Status (1)

Country Link
GB (1) GB2164796B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8507601D0 (en) * 1985-03-23 1985-05-01 Standard Telephones Cables Ltd Integrated circuits
GB2202236B (en) * 1987-03-09 1991-04-24 Philips Electronic Associated Manufacture of electronic devices comprising cadmium mercury telluride
TW449931B (en) 2000-01-27 2001-08-11 United Epitaxy Co Ltd Manufacturing method of P-type semiconductor with a low resistance coefficient
EP1130659A1 (en) * 2000-03-03 2001-09-05 United Epitaxy Company, Ltd. Method of manufacturing low resistivity p-type compound semiconductor material

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3597565A (en) * 1969-04-17 1971-08-03 Cryodry Corp Waveguide applicator and method
US3715551A (en) * 1971-07-01 1973-02-06 Raytheon Co Twisted waveguide applicator
US3716688A (en) * 1971-10-29 1973-02-13 Microdry Corp Reflector and waveguide applicator
DE3071956D1 (en) * 1979-01-22 1987-05-27 Premo France Microwave heating apparatus
FR2410803A1 (en) * 1979-03-16 1979-06-29 Cim Lambda DEVICE FOR THE CONTINUOUS THERMAL OR THERMOCHEMICAL TREATMENT OF OBJECTS BY EMISSION OF MICROWAVE

Also Published As

Publication number Publication date
GB8525195D0 (en) 1985-11-13
GB2164796A (en) 1986-03-26

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20010916