GB2159728B - Method of and apparatus for the drawing of bars of monocrystalline silicon - Google Patents

Method of and apparatus for the drawing of bars of monocrystalline silicon

Info

Publication number
GB2159728B
GB2159728B GB08512471A GB8512471A GB2159728B GB 2159728 B GB2159728 B GB 2159728B GB 08512471 A GB08512471 A GB 08512471A GB 8512471 A GB8512471 A GB 8512471A GB 2159728 B GB2159728 B GB 2159728B
Authority
GB
United Kingdom
Prior art keywords
bars
monocrystalline silicon
monocrystalline
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08512471A
Other languages
English (en)
Other versions
GB2159728A (en
GB8512471D0 (en
Inventor
Eduard Pinkhasov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wedtech Corp
Original Assignee
Wedtech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wedtech Corp filed Critical Wedtech Corp
Publication of GB8512471D0 publication Critical patent/GB8512471D0/en
Publication of GB2159728A publication Critical patent/GB2159728A/en
Application granted granted Critical
Publication of GB2159728B publication Critical patent/GB2159728B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
GB08512471A 1984-06-07 1985-05-16 Method of and apparatus for the drawing of bars of monocrystalline silicon Expired GB2159728B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/618,192 US4575401A (en) 1984-06-07 1984-06-07 Method of and apparatus for the drawing of bars of monocrystalline silicon

Publications (3)

Publication Number Publication Date
GB8512471D0 GB8512471D0 (en) 1985-06-19
GB2159728A GB2159728A (en) 1985-12-11
GB2159728B true GB2159728B (en) 1987-09-16

Family

ID=24476701

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08512471A Expired GB2159728B (en) 1984-06-07 1985-05-16 Method of and apparatus for the drawing of bars of monocrystalline silicon

Country Status (10)

Country Link
US (1) US4575401A (US06342305-20020129-C00040.png)
JP (1) JPS6163595A (US06342305-20020129-C00040.png)
CA (1) CA1241257A (US06342305-20020129-C00040.png)
CH (1) CH670456A5 (US06342305-20020129-C00040.png)
DE (1) DE3519632A1 (US06342305-20020129-C00040.png)
FR (1) FR2565604A1 (US06342305-20020129-C00040.png)
GB (1) GB2159728B (US06342305-20020129-C00040.png)
IL (1) IL75150A (US06342305-20020129-C00040.png)
IT (1) IT1184580B (US06342305-20020129-C00040.png)
SE (1) SE8502375L (US06342305-20020129-C00040.png)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0412083A (ja) * 1990-04-27 1992-01-16 Osaka Titanium Co Ltd シリコン単結晶製造方法
DE19638563C2 (de) * 1996-09-20 1999-07-08 Karlsruhe Forschzent Verfahren zum Ziehen von Einkristallen
JP2885240B1 (ja) * 1998-03-16 1999-04-19 日本電気株式会社 半導体結晶育成装置および育成方法
ES2363699T3 (es) * 2004-04-15 2011-08-12 Faculdade De Ciencias Da Universidade De Lisboa Método y aparato para el crecimiento de semiconductores, en particular de cintas de silicio.
DE102007041803A1 (de) * 2007-08-30 2009-03-05 Pv Silicon Forschungs Und Produktions Gmbh Verfahren zur Herstellung von polykristallinen Siliziumstäben und polykristalliner Siliziumstab
DK2504470T3 (da) 2009-11-24 2014-03-10 Forschungsverbund Berlin Ev Fremgangsmåde og apparat til fremstilling af enkrystaller af halvledermateriale
US8920270B2 (en) 2012-06-30 2014-12-30 Easton Technical Products, Inc. Arrow vane apparatus and method
CN112301426B (zh) * 2019-08-02 2022-08-12 宁夏隆基硅材料有限公司 一种单晶硅棒的制造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB899287A (en) * 1958-06-12 1962-06-20 Standard Telephones Cables Ltd Method and apparatus for heat treating fusible material
US3160497A (en) * 1962-11-15 1964-12-08 Loung Pai Yen Method of melting refractory metals using a double heating process
DE1243641B (de) * 1962-12-12 1967-07-06 Siemens Ag Verfahren zur Herstellung von Halbleiterstaeben durch Ziehen aus der Schmelze
US4165361A (en) * 1975-11-28 1979-08-21 Milstein Joseph B Process and apparatus for preparation of single crystals and textured polycrystals
US4116642A (en) * 1976-12-15 1978-09-26 Western Electric Company, Inc. Method and apparatus for avoiding undesirable deposits in crystal growing operations
US4133969A (en) * 1978-01-03 1979-01-09 Zumbrunnen Allen D High frequency resistance melting furnace

Also Published As

Publication number Publication date
IL75150A0 (en) 1985-09-29
FR2565604A1 (fr) 1985-12-13
GB2159728A (en) 1985-12-11
SE8502375L (sv) 1985-12-08
US4575401A (en) 1986-03-11
JPS6163595A (ja) 1986-04-01
SE8502375D0 (sv) 1985-05-14
GB8512471D0 (en) 1985-06-19
DE3519632A1 (de) 1986-01-02
IL75150A (en) 1988-07-31
CA1241257A (en) 1988-08-30
CH670456A5 (US06342305-20020129-C00040.png) 1989-06-15
IT8521054A0 (it) 1985-06-06
IT1184580B (it) 1987-10-28
JPH0114169B2 (US06342305-20020129-C00040.png) 1989-03-09

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee