GB2153851A - Ferro-magnetic layer of magnetic recording media - Google Patents

Ferro-magnetic layer of magnetic recording media Download PDF

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Publication number
GB2153851A
GB2153851A GB08501273A GB8501273A GB2153851A GB 2153851 A GB2153851 A GB 2153851A GB 08501273 A GB08501273 A GB 08501273A GB 8501273 A GB8501273 A GB 8501273A GB 2153851 A GB2153851 A GB 2153851A
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GB
United Kingdom
Prior art keywords
magnetic recording
recording medium
magnetic
ferromagnetic metal
angstroms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08501273A
Other versions
GB2153851B (en
GB8501273D0 (en
Inventor
Nobuaki Tamagawa
Hidesuke Miyairi
Kazunori Ozawa
Norio Yokoyama
Hideaki Matsuyama
Kenji Yazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
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Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of GB8501273D0 publication Critical patent/GB8501273D0/en
Publication of GB2153851A publication Critical patent/GB2153851A/en
Application granted granted Critical
Publication of GB2153851B publication Critical patent/GB2153851B/en
Expired legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/68Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent
    • G11B5/70Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent on a base layer
    • G11B5/706Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent on a base layer characterised by the composition of the magnetic material
    • G11B5/70605Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent on a base layer characterised by the composition of the magnetic material metals or alloys
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225Oblique incidence of vaporised material on substrate
    • C23C14/226Oblique incidence of vaporised material on substrate in order to form films with columnar structure
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85Coating a support with a magnetic layer by vapour deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S100/00Presses

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

In a magnetic recording medium comprising a thin film type ferromagnetic metal layer formed by physical vapour deposition on a non-magnetic substrate (4), the ferromagnetic metal layer comprises columnar crystals (10) inclined relative to the substrate (4), each of the columnar crystals being formed of ferromagnetic metal particles (11) and oxide particles (12) of the ferromagnetic metal randomly distributed in the columnar crystal. The recording medium has improved signal to noise ratio. <IMAGE>

Description

SPECIFICATION Magnetic recording media This invention relates to magnetic recording media.
Recently, extensive study has been given to a thin film type magnetic recording medium produced by forming a ferromagnetic thin film having a thickness of hundreds of Angstroms to about one micron on a non-magnetic substrate by methods such as electroplating, electroless plating, ion plating, sputtering, and vacuum evaporation for the purpose of achieving a magnetic recording of high density. An obliquely incident vacuum deposition method as disclosed in US Patent No. US-A-3 342 632 is of special interest because it permits a magnetic recording medium having a high coercive force to be obtained, and various improvements and modifications thereto have been carried out. According to this obliquely incident vacuum deposition method, a vapour flow of magnetic metal to be deposited on a substrate is incident upon the substrate in a direction oblique thereto.However, in a magnetic recording medium having a magnetic recording layer in the form of a ferromagnetic thin film, a video signal output in a short wavelength range is not always high enough to be expected, and the noise level is high. Therefore, there has not been obtained a magnetic recording medium which exhibits a satisfactory signal to noise (S/N) ratio.
According to the present invention there is provided a magnetic recording medium comprising a non-magnetic substrate and a ferromagnetic metal layer formed on the substrate by physical vapour deposition, the ferromagnetic metal layer having columnar crystals inclined relative to the substrate, and each of the columnar crystals being formed of ferromagnetic metal particles and oxide particles of said ferromagnetic metal randomly distributed in the columnar crystal.
The invention will now be further described, by way of illustrative and non-limiting example, with reference to the accompanying drawing, in which: Figure 1 is a schematic view of a vacuum deposition apparatus employed in manufacturing a magnetic recording medium embodying the present invention; and Figure 2 is a schematic view of the sectional structure of a columnar crystal of a magnetic layer of a magnetic recording medium embodying the present invention.
In magnetic recording media embodying the present invention and described in more detail below, oxide particles of ferromagnetic metal are randomly distributed in a columnar crystal forming the thin film type magnetic recording layer, so that the ferromagnetic metal fine crystal forming the columnar crystal may be fractionised. Accordingly, the noise level is reduced in respect of electro-magnetic conversion characteristics, to provide a thin film type magnetic recording medium having a high S/N ratio.
The thin film type magnetic recording layer is composed of an aggregate of the columnar crystal structures, and each of the columnar crystal structures if formed of a random distribution of ferromagnetic metal particles and oxide particles of the ferromagnetic metal.
In the magnetic recording media embodying the present invention, the noise level is reduced and the S/N ratio is improved. The reason why the noise level is reduced by the random distribution of the oxide particles of the ferromagnetic metal as an evaporating substance in the columnar crystal structure is believed to be due to the fact that the grain size of the evaporated magnetic metal particles forming the columnar crystal is made small.
Fig. 1 is a schematic view of a vacuum deposition apparatus 1 that can be used in the manufacture of the magnetic recording media embodying the present invention. The vacuum deposition apparatus 1 is constituted by a vacuum chamber 2 enclosing a vacuum containing a predetermined amount of oxygen, a metal can 3 disposed in the vacuum chamber 2, a nonmagnetic substrate 4 fed from a supply reel 5 to a take-up reel 6 around the metal can 3, an evaporation source 7 of a magnetic metal (such as Co, Ni or an alloy thereof) arranged at a position opposite to the metal can 3 and spaced suitably downwardly therefrom, and a shutter 8 interposed between the metal can 3 and the evaporation source 7.In use, magnetic metal evaporated from the evaporation source 7 is obliquely deposited on the non-magnetic substrate 4 at a predetermined angle of incidence with the aid of the shutter 8 to form a ferromagnetic layer which might, typically, have a thickness of 300 to 10,000 Angstroms. As indicated above, the magnetic (ferromagnetic) metal may, for example, be Co, Ni or an alloy thereof. In the case of a Co-Ni alloy, the content of Ni is preferably not more than 30 atomic %.
Examples of magnetic recording media embodying the invention will now be described in detail.
Example 1 By means of the above-described vacuum deposition apparatus 1, Co-Ni alloy (80 atomic % of Co; 20 atomic % of Ni) was obliquely deposited on a non-magnetic substrate 4 of polyethylene terephthalate (PET) having a thickness of 10 microns under a pressure of 1 x 10 4 Torr created by introducing oxygen gas (02) at a rate of 100 cm3/min. The angle of incidence of vacuum deposition was 40 to 90 , and a hating means employed for the evaporation source 7 was an electron beam. In the above manner, a vacuum deposition tape was prepared.
Characteristics of the tape were as follows: Thickness of Co-Ni vacuum deposition film: 1000 Angstroms Magnetic characteristics: Coercive force (Hc): 820 Oe Saturation magnetic flux density (Bm): 6800 G Residual magnetic flux density (Br): 4900 G Rectangular ratio (Br/Bm): 0.72.
A cross section of the magnetic tape as obtained above and observed by means of a transmission electron microscope (TEM). It was observed from a bright image with the TEM that a magnetic layer as deposited on the substrate 4 comprised an aggregate of fine columnar crystals, and that all the columnar crystals were arranged at angles of 60 to 65 relative to the substrate. Further, the width of the columnar crystals was 50 to 100 Angstroms. It was observed from a dark image with the TEM that Co-Ni particles having a size of 50 to 100 Angstroms and Co-Ni oxide particles having a size of 30 to 70 Angstroms were distributed uniformly in each of the columnar crystals.
Fig. 2 is a schematic view of the sectional structure of a columnar crystal forming the magnetic layer of the vacuum deposition tape of Example 1. In Fig. 2, reference numeral 10 designates the columnar crystal, the width of which was 50 to 100 Angstroms; reference numeral 11 designates the Co-Ni particles, the size of which was 50 to 100 Angstroms; and reference numeral 12 designates the Co-Ni oxide particles, the size of which was 30 to 70 Angstroms.
Comparison Example 1 A vacuum deposition tape was prepared under the same conditions as in Example 1, except that the pressure was set to 1 X 10-5 Torr with no oxygen gas introduced, and the angle of incidence was set to 70 to 90". Characteristics of the magnetic tape prepared above were as follows: Thickness of Co-Ni vacuum deposition film: 1000 Angstroms Magnetic characteristics: Coercive force (Hc): 800 Oe Saturation magnetic flux density (Bm): 6900 G Residual magnetic flux density (Br): 6280 G Rectangular ratio (Br/Bm):O.91 Observations of the magnetic layer by means of a TEM, in the same manner as in Example 1, showed that there was no uniformly distributed structure comprising metal partaicles and metal oxide particles as observed in Example 1.
Example 2 A vacuum deposition tape was prepared under the same conditions as in Example 1, except that Co (100%) was used as a magnetic material. Characteristics of the magnetic tape prepared as above were as follows: Thickness of Co vacuum deposition film: 1000 Angstroms Magnetic characteristics: Coercive force (Hc): 910 Oe Saturation magnetic flux density (Bm): 7300 G Residual magnetic flux density (Br): 5300 G Rectangular ratio (Br/Bm): 0.73 Although no sectional structure of a columnar crystal of the magnetic layer in Example 2 is shown in the drawings, the structure is similar to that shown in Fig. 2 for Example 1. That is, it is a randomly distributed structure of Co particles and CoO particles. Further, the sizes of the crystal and of the particles were similar to those in Example 1. That is, the size of the Co particles was 50 to 100 Angstroms; the size of the CoO particles was 30 to 70 Angstroms; and the width of the columnar crystal was 50 to 100 Angstroms.
Comparison Example 2 A vacuum deposition tape was prepared under the same conditions as in Example 2, except that the pressure was set to 1 X 10-5 Torr with no oxygen gas introduced, and that the angle of incidence was set to 70 to 90 . Characteristics of the magnetic tape prepared were as follows: Thickness of Co vacuum deposition film: 1000 Angstroms Magnetic characteristics: Coercive force (Hc): 900 Oe Saturation magnetic flux density (Bm): 7500 G Residual magnetic flux density (Br): 6800 G Rectangular ratio (Br/Bm): 0.91 Observation by means of the TEM showed that there was no uniformly distributed structure comprising cobalt particles and cobalt oxide particles.
A comparison of electromagnetic conversion characteristics of magnetic tapes prepared in accordance with the above Examples and Comparison Examples is given in the following table.
The table shows an output and a noise level as measured by using a ferrite magnetic head having a gap length of 0.2 microns with a tape relative velocity set to 3.8 m/sec with a spectrum analyser. Each value in the table is indicated by comparison with use of a signal of 5 MHz, and a relative output and a S/N ratio of the tape in Comparison Example 1 were each defined as 0 dB.
Table Output (5 MHz) S/N ratio Example 1 - 1.5 dB + 2.0 dB Example 2 - 0.8 dB + 3.9 dB Comparison Example 1 0 dB 0 dB Comparison Example 2 + 1.4 dB + 0.4 dB First, comparing Example 1 with Comparison Example 1, both of which employ a Co-Ni magnetic layer, the coercive force Hc is substantially equal in both cases and the residual magnetic flux density Br and the rectangular ratio Br/Bm in Comparison Example 1 are superior. Further, it will be appreciated from the above table that the output of the tape in Example 1 is lower than that in Comparison Example 1, and that the S/N ratio in Example 1 is superior to that in Comparison Example 1, resulting in reduction in noise.
It was observed by means of the TEM that fine crystals of Co-Ni and Co-Ni oxide are randomly distributed in the columnar crystal of the magnetic layer, as shown in Fig. 2, of Example 1. On the contrary, the columnar crystal of the magnetic layer in Comparison Example 1 was formed of fine crystals of Co-Ni. In Example 1, the fine crystals of Co-Ni forming the columnar crystals are fractionised and formed into fine particles. On the contrary, in Comparison Example 1, the fine crystals of Co-Ni are not fractionised by the Co-Ni oxide. Accordingly, as the particle size of the fine magnetic crystals of Co-Ni in Example 1 is smaller than that in Comparison Example 1, noise is reduced in respect of electromagnetic conversion characteristics.
Comparing Example 2 with Comparison Example 2, both of which employ a Co magnetic layer, in similar manner the coercive force Hc is substantially equal in both cases, and the residual magnetic flux density Br and the rectangular ratio Br/Bm in Comparison Example 2 are superior. As will be apparent from the above table, the output in Example 2 is lower than that in Comparison Example 2, and the S/N ratio in Example 2 is superior to that in Comparison Example 2, resulting in reduction in noise.
It was observed by means of the TEM that fine crystals of Co and Co oxide are randomly distributed in the columnar crystal of the magnetic layer in Example 2. On the contrary, the columnar crystal of the magnetic layer in Comparison Example 2 was formed of fine crystals of Co. Further, in Example 2, the fine crystals of Co forming the columnar crystal are fractionised and formed into fine particles. On the contrary, in Comparison Example 2, the fine crystals of Co are not fractionised by the Co oxide. Accordingly, similarly in Example 2, the particle size of the fine magnetic crystals of Co is smaller than that in Comparison Example 2, thus reducing noise in respect of electro-magnetic characteristics.

Claims (10)

1. A magnetic recording medium comprising a non-magnetic substrate and a ferromagnetic metal layer formed on the substrate by physical vapour deposition, for ferromagnetic metal layer having columnar crystals inclined relative to the substrate, and each of the columnar crystals being formed of ferromagnetic metal particles and oxide particles of said ferromagnetic metal randomly distributed in the columnar crystal.
2. A magnetic recording medium according to claim 1, wherein the ferromagnetic metal is cobalt.
3. A magnetic recording medium according to claim 1, wherein the ferromagnetic metal is a cobalt-nickel alloy containing not more than 30 atomic percent of nickel.
4. A magnetic recording medium according to claim 1, claim 2 or claim 3, wherein the ferromagnetic metal layer is deposited by a vacuum deposition process in an oxygen-containing atmosphere.
5. A magnetic recording medium according to any one of the preceding claims, wherein the ferromagnetic metal layer has a thickness of between 300 and 10,000 Angstroms.
6. A magnetic recording medium according to any one of the preceding claims, wherein the columnar crystals have a width of between 50 and 100 Angstroms.
7. A magnetic recording medium according to any one of the preceding claims, wherein the ferromagnetic metal particles have a grain size of between 50 and 100 Angstroms
8. A magnetic recording medium according to any one of the preceding claims, wherein the oxide particles have a grain size of between 30 and 70 Angstroms.
9. A magnetic recording medium substantially as set forth in Example 1 or Example 2 above.
10. A magnetic recording medium substantially as herein described with reference to Fig. 2 of the accompanying drawings.
GB08501273A 1984-01-20 1985-01-18 Ferro-magnetic layer of magnetic recording media Expired GB2153851B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009169A JPS60154323A (en) 1984-01-20 1984-01-20 Magnetic recording medium

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GB8501273D0 GB8501273D0 (en) 1985-02-20
GB2153851A true GB2153851A (en) 1985-08-29
GB2153851B GB2153851B (en) 1987-06-03

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JP (1) JPS60154323A (en)
KR (1) KR920008414B1 (en)
DE (1) DE3501561C2 (en)
FR (1) FR2558631B1 (en)
GB (1) GB2153851B (en)
NL (1) NL192409C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0156625A2 (en) * 1984-03-22 1985-10-02 Toray Industries, Inc. Vertical magnetic recording medium and process for preparation thereof
GB2202866A (en) * 1987-03-25 1988-10-05 Sony Corp Magnetic recording media

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639065B2 (en) * 1989-03-10 1997-08-06 松下電器産業株式会社 Manufacturing method of magnetic recording media
FR2713360B1 (en) * 1993-12-01 1996-03-08 Aerospatiale Centralized control system for an industrial installation.
US7241519B2 (en) 2003-07-07 2007-07-10 Sony Corporation Magnetic recording medium with columar magnetic layer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0023328A1 (en) * 1979-07-18 1981-02-04 Matsushita Electric Industrial Co., Ltd. Metallic thin film magnetic recording medium
GB1599161A (en) * 1976-07-15 1981-09-30 Matsushita Electric Ind Co Ltd Magnetic recording medium and method of making the same
EP0053811A1 (en) * 1980-12-05 1982-06-16 Matsushita Electric Industrial Co., Ltd. Magnetic recording media
GB2112666A (en) * 1981-11-12 1983-07-27 Fuji Photo Film Co Ltd Magnetic recording medium
GB2129832A (en) * 1982-10-12 1984-05-23 Sony Corp Magnetic recording media
GB2133316A (en) * 1982-12-25 1984-07-25 Tdk Corp Magnetic recording medium

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629A (en) * 1979-06-15 1981-01-06 Ulvac Corp Vacuum-evaporated film type magnetic recording substance and its manufacture
JPS573223A (en) * 1980-06-03 1982-01-08 Tdk Corp Magnetic recording medium
JPS57152516A (en) * 1981-03-16 1982-09-20 Hitachi Maxell Ltd Magnetic recording medium
JPS57152520A (en) * 1981-03-17 1982-09-20 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS5814324A (en) * 1981-07-17 1983-01-27 Fuji Photo Film Co Ltd Magnetic recording medium
JPS5841443A (en) * 1981-09-04 1983-03-10 Fuji Photo Film Co Ltd Manufacture of magnetic recording medium
JPS5883327A (en) * 1981-11-12 1983-05-19 Fuji Photo Film Co Ltd Magnetic recording medium

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1599161A (en) * 1976-07-15 1981-09-30 Matsushita Electric Ind Co Ltd Magnetic recording medium and method of making the same
EP0023328A1 (en) * 1979-07-18 1981-02-04 Matsushita Electric Industrial Co., Ltd. Metallic thin film magnetic recording medium
EP0053811A1 (en) * 1980-12-05 1982-06-16 Matsushita Electric Industrial Co., Ltd. Magnetic recording media
GB2112666A (en) * 1981-11-12 1983-07-27 Fuji Photo Film Co Ltd Magnetic recording medium
GB2129832A (en) * 1982-10-12 1984-05-23 Sony Corp Magnetic recording media
GB2133316A (en) * 1982-12-25 1984-07-25 Tdk Corp Magnetic recording medium

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0156625A2 (en) * 1984-03-22 1985-10-02 Toray Industries, Inc. Vertical magnetic recording medium and process for preparation thereof
EP0156625A3 (en) * 1984-03-22 1986-12-30 Toray Industries, Inc. Vertical magnetic recording medium and process for preparation thereof
US4888211A (en) * 1984-03-22 1989-12-19 Toray Industries, Inc. Process for preparation of vertical magnetic recording medium
GB2202866A (en) * 1987-03-25 1988-10-05 Sony Corp Magnetic recording media
US4939046A (en) * 1987-03-25 1990-07-03 Sony Corporation Magnetic recording medium
GB2202866B (en) * 1987-03-25 1991-07-03 Sony Corp Magnetic recording media

Also Published As

Publication number Publication date
FR2558631A1 (en) 1985-07-26
NL192409C (en) 1997-07-04
NL8500085A (en) 1985-08-16
KR920008414B1 (en) 1992-09-28
JPH0475577B2 (en) 1992-12-01
GB2153851B (en) 1987-06-03
JPS60154323A (en) 1985-08-14
FR2558631B1 (en) 1992-09-18
NL192409B (en) 1997-03-03
GB8501273D0 (en) 1985-02-20
DE3501561C2 (en) 1995-08-31
DE3501561A1 (en) 1985-08-14
KR850005665A (en) 1985-08-28

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PE20 Patent expired after termination of 20 years

Effective date: 20050117