GB2126786B - Ion sensitive field effect transistor encapsulation - Google Patents

Ion sensitive field effect transistor encapsulation

Info

Publication number
GB2126786B
GB2126786B GB08323086A GB8323086A GB2126786B GB 2126786 B GB2126786 B GB 2126786B GB 08323086 A GB08323086 A GB 08323086A GB 8323086 A GB8323086 A GB 8323086A GB 2126786 B GB2126786 B GB 2126786B
Authority
GB
United Kingdom
Prior art keywords
field effect
effect transistor
sensitive field
ion sensitive
transistor encapsulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08323086A
Other versions
GB8323086D0 (en
GB2126786A (en
Inventor
Peter Nicholas Kember
Brian Christopher Webb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMI Ltd
Original Assignee
EMI Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EMI Ltd filed Critical EMI Ltd
Priority to GB08323086A priority Critical patent/GB2126786B/en
Publication of GB8323086D0 publication Critical patent/GB8323086D0/en
Publication of GB2126786A publication Critical patent/GB2126786A/en
Application granted granted Critical
Publication of GB2126786B publication Critical patent/GB2126786B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157—Partial encapsulation or coating
    • H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Formation Of Insulating Films (AREA)
GB08323086A 1982-09-04 1983-08-26 Ion sensitive field effect transistor encapsulation Expired GB2126786B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08323086A GB2126786B (en) 1982-09-04 1983-08-26 Ion sensitive field effect transistor encapsulation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8225268 1982-09-04
GB08323086A GB2126786B (en) 1982-09-04 1983-08-26 Ion sensitive field effect transistor encapsulation

Publications (3)

Publication Number Publication Date
GB8323086D0 GB8323086D0 (en) 1983-09-28
GB2126786A GB2126786A (en) 1984-03-28
GB2126786B true GB2126786B (en) 1986-04-03

Family

ID=26283751

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08323086A Expired GB2126786B (en) 1982-09-04 1983-08-26 Ion sensitive field effect transistor encapsulation

Country Status (1)

Country Link
GB (1) GB2126786B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2114436B1 (en) * 1995-03-31 1999-04-01 Consejo Superior Investigacion AUTOMATED ENCAPSULATION OF SOLID STATE CHEMICAL SENSORS USING PHOTOPOLYMERS CONTAINING EPOXY RESINS AND ACRYLATE POLYURETHANES.
US8536626B2 (en) * 2011-04-28 2013-09-17 Honeywell International Inc. Electronic pH sensor die packaging

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978578A (en) * 1974-08-29 1976-09-07 Fairchild Camera And Instrument Corporation Method for packaging semiconductor devices
GB1563421A (en) * 1975-12-18 1980-03-26 Gen Electric Polyimide-siloxane copolymer protective coating for semiconductor devices
JPS5466194A (en) * 1977-11-04 1979-05-28 Kuraray Co Fet sensor
US4209356A (en) * 1978-10-18 1980-06-24 General Electric Company Selective etching of polymeric materials embodying silicones via reactor plasmas
US4456522A (en) * 1981-09-23 1984-06-26 Critikon, Inc. Support and anchoring mechanism for membranes in selectively responsive field effect devices

Also Published As

Publication number Publication date
GB8323086D0 (en) 1983-09-28
GB2126786A (en) 1984-03-28

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19951020

PCNP Patent ceased through non-payment of renewal fee

Effective date: 19960826