GB2116590B - Sputter coated glass panes - Google Patents

Sputter coated glass panes

Info

Publication number
GB2116590B
GB2116590B GB08301382A GB8301382A GB2116590B GB 2116590 B GB2116590 B GB 2116590B GB 08301382 A GB08301382 A GB 08301382A GB 8301382 A GB8301382 A GB 8301382A GB 2116590 B GB2116590 B GB 2116590B
Authority
GB
United Kingdom
Prior art keywords
coated glass
glass panes
sputter coated
sputter
panes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08301382A
Other versions
GB8301382D0 (en
GB2116590A (en
Inventor
Wolf-Dieter Munz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB8301382D0 publication Critical patent/GB8301382D0/en
Publication of GB2116590A publication Critical patent/GB2116590A/en
Application granted granted Critical
Publication of GB2116590B publication Critical patent/GB2116590B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
GB08301382A 1982-01-21 1983-01-19 Sputter coated glass panes Expired GB2116590B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823201783 DE3201783A1 (en) 1982-01-21 1982-01-21 METHOD FOR PRODUCING LARGE COLOR-NEUTRAL, A HIGH INFRARED PART OF THE RADIATION REFLECTIVELY BY LAYOUT AND VIEW FROM RADIATION BY CATODENSION OF TARGETS, AND BY THE METHOD PRODUCED

Publications (3)

Publication Number Publication Date
GB8301382D0 GB8301382D0 (en) 1983-02-23
GB2116590A GB2116590A (en) 1983-09-28
GB2116590B true GB2116590B (en) 1985-05-22

Family

ID=6153556

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08301382A Expired GB2116590B (en) 1982-01-21 1983-01-19 Sputter coated glass panes

Country Status (6)

Country Link
AT (1) AT380030B (en)
CA (1) CA1189823A (en)
DE (1) DE3201783A1 (en)
FR (1) FR2520008B1 (en)
GB (1) GB2116590B (en)
SE (1) SE8300247L (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311815C3 (en) * 1983-03-31 1997-12-04 Leybold Ag Method of making discs
DE3413587A1 (en) * 1984-04-11 1985-10-17 Flachglas AG, 8510 Fürth METHOD FOR PRODUCING THE TIN DIOXIDE INTERFERENCE LAYER (S), IN PARTICULAR FROM HEAT-REFLECTING-COATED GLASS DISKS BY REACTIVE MAGNETRONIC SPRAYING, TIN TARGET TO ITS IMPLEMENTATION, AND ALSO ITSELF, AS WELL AS ITSELF
GB8508092D0 (en) * 1985-03-28 1985-05-01 Glaverbel Transparent glazing panels
US4655811A (en) * 1985-12-23 1987-04-07 Donnelly Corporation Conductive coating treatment of glass sheet bending process
AT388752B (en) * 1986-04-30 1989-08-25 Plansee Metallwerk METHOD FOR PRODUCING A TARGET FOR CATHODE SPRAYING
US4977013A (en) * 1988-06-03 1990-12-11 Andus Corporation Tranparent conductive coatings
US5147688A (en) * 1990-04-24 1992-09-15 Cvd, Inc. MOCVD of indium oxide and indium/tin oxide films on substrates
FR2672884B1 (en) * 1991-02-20 1993-09-10 Saint Gobain Vitrage Int PROTECTIVE LAYER ON A CONDUCTIVE SUBSTRATE.
DE4427060C1 (en) * 1994-07-29 1995-11-30 Heraeus Gmbh W C Prefabricated part made of indium-tin oxide
US5780149A (en) * 1996-09-13 1998-07-14 Libbey-Ownes-Ford Co. Glass article having a solar control coating
CA2282998C (en) 1999-09-22 2007-09-11 Douglas I. Milburn Light-diffusing, insulating, glazing system component
FR2801684B1 (en) 1999-11-26 2002-04-26 Commissariat Energie Atomique ANTICALORIC FILTER AND METHOD FOR MANUFACTURING THE SAME

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1005867A (en) * 1947-10-10 1952-04-16 Physikalisches Untersuchungsla Process for the production of coatings or coatings reducing reflection
US3506556A (en) * 1968-02-28 1970-04-14 Ppg Industries Inc Sputtering of metal oxide films in the presence of hydrogen and oxygen
GB1336559A (en) * 1970-05-20 1973-11-07 Triplex Safety Glass Co Metal oxide coatings
FR2218301A1 (en) * 1973-02-16 1974-09-13 Saint Gobain Semi-reflecting glaze with semi-conductor layer - of pref tin oxide, indium oxide or titanium nitride applied on film of gold, silver or copper
JPS5259888A (en) * 1975-11-12 1977-05-17 Matsushita Electric Ind Co Ltd Manufacturing of two layer transparent conduction film
US4349425A (en) * 1977-09-09 1982-09-14 Hitachi, Ltd. Transparent conductive films and methods of producing same
DE2750500A1 (en) * 1977-11-11 1979-05-17 Leybold Heraeus Gmbh & Co Kg Panes with IR reflecting properties - obtd. by sputtering on first an indium oxide-tin oxide layer, then a gold, silver or copper layer
BE879189A (en) * 1978-10-19 1980-04-04 Bfg Glassgroup PROCESS FOR FORMING A TIN OXIDE COATING ON A HOT GLASS SUPPORT AND PRODUCTS THUS OBTAINED
FR2439167A1 (en) * 1978-10-20 1980-05-16 Gordon Roy Gerald Anti-glare coating formed on glass - includes an inorganic coating which reflects IR radiation
DE2930373A1 (en) * 1979-07-26 1981-02-19 Siemens Ag PROCESS FOR PRODUCING TRANSPARENT ELECTRICALLY CONDUCTIVE INDIUM OXIDE (IN DEEP 2 O DEEP 3) LAYERS

Also Published As

Publication number Publication date
SE8300247D0 (en) 1983-01-19
CA1189823A (en) 1985-07-02
AT380030B (en) 1986-03-25
SE8300247L (en) 1983-07-22
DE3201783A1 (en) 1983-09-08
FR2520008B1 (en) 1987-01-16
FR2520008A1 (en) 1983-07-22
ATA455182A (en) 1985-08-15
GB8301382D0 (en) 1983-02-23
GB2116590A (en) 1983-09-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee