GB2090291B - Sputter ion plating of refractory metal/metal compounds - Google Patents

Sputter ion plating of refractory metal/metal compounds

Info

Publication number
GB2090291B
GB2090291B GB8137948A GB8137948A GB2090291B GB 2090291 B GB2090291 B GB 2090291B GB 8137948 A GB8137948 A GB 8137948A GB 8137948 A GB8137948 A GB 8137948A GB 2090291 B GB2090291 B GB 2090291B
Authority
GB
United Kingdom
Prior art keywords
metal
ion plating
sputter ion
metal compounds
refractory metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8137948A
Other versions
GB2090291A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB8137948A priority Critical patent/GB2090291B/en
Publication of GB2090291A publication Critical patent/GB2090291A/en
Application granted granted Critical
Publication of GB2090291B publication Critical patent/GB2090291B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB8137948A 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds Expired GB2090291B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8137948A GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8041039 1980-12-22
GB8137948A GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Publications (2)

Publication Number Publication Date
GB2090291A GB2090291A (en) 1982-07-07
GB2090291B true GB2090291B (en) 1985-05-15

Family

ID=26277939

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8137948A Expired GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Country Status (1)

Country Link
GB (1) GB2090291B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663455A5 (en) * 1984-04-19 1987-12-15 Balzers Hochvakuum TUBE WITH AN INTERNAL COATING.
GB8508338D0 (en) * 1985-03-29 1985-05-09 British Aerospace Application of stop-off coating
GB2174108B (en) * 1985-04-04 1989-07-19 Sharp Kk Method for forming a polycrystalline silicon thin film
GB2178061B (en) * 1985-07-01 1989-04-26 Atomic Energy Authority Uk Coating improvements
GB2182350B (en) * 1985-07-01 1989-04-26 Atomic Energy Authority Uk Coating improvements
GB8521406D0 (en) * 1985-08-28 1985-10-02 Atomic Energy Authority Uk Coatings
AT388394B (en) * 1987-01-09 1989-06-12 Vni Instrument Inst METHOD FOR PRODUCING CUTTING TOOL
US5811182A (en) * 1991-10-04 1998-09-22 Tulip Memory Systems, Inc. Magnetic recording medium having a substrate and a titanium nitride underlayer
US6881235B2 (en) * 2002-04-17 2005-04-19 Walter R. May Method of reducing smoke and particulate emissions from spark-ignited reciprocating engines operating on liquid petroleum fuels
DE102005018618A1 (en) * 2005-04-21 2006-10-26 Rheinmetall Waffe Munition Gmbh Gun barrel and method of coating the inner surface of the barrel

Also Published As

Publication number Publication date
GB2090291A (en) 1982-07-07

Similar Documents

Publication Publication Date Title
GB2093866B (en) Cathode sputter for coating shaped parts
GB2087139B (en) Alloys for liquid metal ion sources
JPS56163227A (en) Recovery of refractory metal
GB2105851B (en) Level of molten metal
GB2099022B (en) Removal of iron sulfide scale from metal surfaces
GB2090291B (en) Sputter ion plating of refractory metal/metal compounds
AU528599B2 (en) Level of molten metal
DE3071156D1 (en) Composition for inhibiting corrosion of metal surfaces
AU7037281A (en) Process for electrowinning of metals
GB2130942B (en) Casting of metal articles
AU542880B2 (en) Vessel for molten metal
ZA816719B (en) Electrolytic refining of molten metal
JPS5747859A (en) High temperature plating of metal object
JPS56167697A (en) Manufacture of isoindoline azine metal complex salt
DE3172330D1 (en) Hard facing of metal substrates using vc-cr3c2
JPS56150176A (en) Metal electroless deposition
JPS56108891A (en) Electrodeposition of metal
YU86681A (en) Process for the elimination of metals from metallic salt solutions
JPS5742570A (en) Refractories for nonferrous metal manufacture
ZA814781B (en) Hypertempering of metals
GB8334369D0 (en) Sputter deposition of alloys & c
JPS57105676A (en) Drying of molten metal vessel
JPS57185107A (en) Manufacture of refractory for molten metal
BG30101A1 (en) Reactor for cemenation of ions with metal granules
AU5783780A (en) Vessel for molten metal

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee