GB2064152B - High-resolution resist composite - Google Patents
High-resolution resist compositeInfo
- Publication number
- GB2064152B GB2064152B GB8037599A GB8037599A GB2064152B GB 2064152 B GB2064152 B GB 2064152B GB 8037599 A GB8037599 A GB 8037599A GB 8037599 A GB8037599 A GB 8037599A GB 2064152 B GB2064152 B GB 2064152B
- Authority
- GB
- United Kingdom
- Prior art keywords
- resolution resist
- resist composite
- composite
- resolution
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9780979A | 1979-11-27 | 1979-11-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2064152A GB2064152A (en) | 1981-06-10 |
GB2064152B true GB2064152B (en) | 1984-02-08 |
Family
ID=22265225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8037599A Expired GB2064152B (en) | 1979-11-27 | 1980-11-24 | High-resolution resist composite |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5691428A (en) |
CA (1) | CA1155238A (en) |
DE (1) | DE3044434A1 (en) |
FR (1) | FR2470402B1 (en) |
GB (1) | GB2064152B (en) |
NL (1) | NL8006438A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3131031A1 (en) * | 1981-08-05 | 1983-02-24 | Siemens AG, 1000 Berlin und 8000 München | Method for producing area doping when fabricating integrated complementary MOS field effect transistors |
US5139922A (en) * | 1987-04-10 | 1992-08-18 | Matsushita Electronics Corporation | Method of making resist pattern |
DE102006050363B4 (en) | 2006-10-25 | 2018-08-16 | Advanced Mask Technology Center Gmbh & Co. Kg | A process for producing a photomask, a process for structuring a layer or a layer stack and resist stacks on a mask substrate |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1622302A1 (en) * | 1968-02-01 | 1970-10-29 | Telefunken Patent | Process for the photographic transfer of structures onto semiconductor bodies |
US3934057A (en) * | 1973-12-19 | 1976-01-20 | International Business Machines Corporation | High sensitivity positive resist layers and mask formation process |
JPS51129190A (en) * | 1975-05-02 | 1976-11-10 | Fujitsu Ltd | Manufacturing method of semiconductor |
US4024293A (en) * | 1975-12-10 | 1977-05-17 | International Business Machines Corporation | High sensitivity resist system for lift-off metallization |
JPS5387668A (en) * | 1977-01-13 | 1978-08-02 | Toshiba Corp | Forming method of patterns |
US4211834A (en) * | 1977-12-30 | 1980-07-08 | International Business Machines Corporation | Method of using a o-quinone diazide sensitized phenol-formaldehyde resist as a deep ultraviolet light exposure mask |
-
1980
- 1980-10-29 CA CA000363463A patent/CA1155238A/en not_active Expired
- 1980-11-24 GB GB8037599A patent/GB2064152B/en not_active Expired
- 1980-11-24 FR FR8024884A patent/FR2470402B1/en not_active Expired
- 1980-11-26 NL NL8006438A patent/NL8006438A/en unknown
- 1980-11-26 DE DE19803044434 patent/DE3044434A1/en not_active Ceased
- 1980-11-27 JP JP16596980A patent/JPS5691428A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5691428A (en) | 1981-07-24 |
JPH0468769B2 (en) | 1992-11-04 |
GB2064152A (en) | 1981-06-10 |
FR2470402A1 (en) | 1981-05-29 |
DE3044434A1 (en) | 1981-08-27 |
CA1155238A (en) | 1983-10-11 |
NL8006438A (en) | 1981-07-01 |
FR2470402B1 (en) | 1987-03-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2055142B (en) | Lock mechanism | |
JPS5680041A (en) | Resist composition | |
JPS5682236A (en) | Composite board | |
JPS55145281A (en) | Combined lock | |
GB2057352B (en) | Composite panel | |
JPS5675641A (en) | Xxray reinforced screen | |
JPS55117227A (en) | Composite part | |
JPS5631975A (en) | Lock | |
DE3070588D1 (en) | Composite panel | |
GB2049613B (en) | Structures | |
GB2041824B (en) | Composite materials | |
GB2040528B (en) | Key-operated actuator | |
JPS5627139A (en) | Electronnbeam resist composition | |
JPS55126652A (en) | Composite crosssbeam | |
JPS55107107A (en) | Composite bolt | |
GB2064152B (en) | High-resolution resist composite | |
JPS566423A (en) | Composite electronic part | |
GB2054021B (en) | Lock | |
JPS5659975A (en) | Pinncylinder lock | |
JPS567424A (en) | Composite part | |
JPS5638254A (en) | Multilayer structure | |
JPS5650507A (en) | Composite electronic part | |
GB2045337B (en) | Bolt mechanisms | |
JPS5667255A (en) | Multilayer structure | |
JPS5659974A (en) | Key |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Effective date: 20001123 |