GB202315890D0 - Apparatus for processing a wafer - Google Patents

Apparatus for processing a wafer

Info

Publication number
GB202315890D0
GB202315890D0 GBGB2315890.0A GB202315890A GB202315890D0 GB 202315890 D0 GB202315890 D0 GB 202315890D0 GB 202315890 A GB202315890 A GB 202315890A GB 202315890 D0 GB202315890 D0 GB 202315890D0
Authority
GB
United Kingdom
Prior art keywords
wafer
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2315890.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research AG
Original Assignee
Lam Research AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research AG filed Critical Lam Research AG
Priority to GBGB2315890.0A priority Critical patent/GB202315890D0/en
Publication of GB202315890D0 publication Critical patent/GB202315890D0/en
Pending legal-status Critical Current

Links

GBGB2315890.0A 2023-10-17 2023-10-17 Apparatus for processing a wafer Pending GB202315890D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB2315890.0A GB202315890D0 (en) 2023-10-17 2023-10-17 Apparatus for processing a wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB2315890.0A GB202315890D0 (en) 2023-10-17 2023-10-17 Apparatus for processing a wafer

Publications (1)

Publication Number Publication Date
GB202315890D0 true GB202315890D0 (en) 2023-11-29

Family

ID=88863749

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2315890.0A Pending GB202315890D0 (en) 2023-10-17 2023-10-17 Apparatus for processing a wafer

Country Status (1)

Country Link
GB (1) GB202315890D0 (en)

Similar Documents

Publication Publication Date Title
EP4107026A4 (en) Substrate processing apparatus
GB2604599B (en) A waste processing apparatus
EP4253596A4 (en) Semiconductor process apparatus
SG10202012565VA (en) Processing apparatus
SG10202100523QA (en) Processing apparatus
SG10202101531SA (en) Processing apparatus
KR102354879B9 (en) Batch type substrate processing apparatus
GB202315890D0 (en) Apparatus for processing a wafer
GB201905138D0 (en) Apparatus and method for processing a substrate
GB202002798D0 (en) Apparatus for processing a wafer
GB201901637D0 (en) Apparatus for processing a wafer, and method of controlling such an apparatus
GB201900912D0 (en) Apparatus for processing a wafer, and method of controlling such an apparatus
GB2604112B (en) An apparatus for maintaining a plant
GB202015527D0 (en) Apparatus for processing wafer-shaped articles
SG10202012351UA (en) A substrate processing apparatus
EP4104941A4 (en) Substrate processing apparatus
GB202203589D0 (en) Apparatus for processing a wafer-shaped article
SG10202101077TA (en) Processing apparatus
EP4163047A4 (en) Processing apparatus
GB202400461D0 (en) Apparatus for processing a wafer-shaped article
GB202102290D0 (en) Apparatus for processing a wafer-shaped article
GB202016750D0 (en) Apparatus for processing a wafer-shaped article
GB202012725D0 (en) Apparatus for processing a wafer-shaped article
GB202318810D0 (en) Apparatus and method for processing a semiconductor substrate
GB202308567D0 (en) Apparatus for laser processing a material