GB202213602D0 - Method of coating a component for use in a CVD-reactor and component produced by the method - Google Patents

Method of coating a component for use in a CVD-reactor and component produced by the method

Info

Publication number
GB202213602D0
GB202213602D0 GBGB2213602.2A GB202213602A GB202213602D0 GB 202213602 D0 GB202213602 D0 GB 202213602D0 GB 202213602 A GB202213602 A GB 202213602A GB 202213602 D0 GB202213602 D0 GB 202213602D0
Authority
GB
United Kingdom
Prior art keywords
component
cvd
reactor
coating
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2213602.2A
Other versions
GB2612892A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Furnace Tech Ltd
Original Assignee
Advanced Furnace Tech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Furnace Tech Ltd filed Critical Advanced Furnace Tech Ltd
Publication of GB202213602D0 publication Critical patent/GB202213602D0/en
Publication of GB2612892A publication Critical patent/GB2612892A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
GB2213602.2A 2021-09-16 2022-09-16 Method of coating a component for use in a CVD-reactor and component produced by the method Pending GB2612892A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102021123986.9A DE102021123986A1 (en) 2021-09-16 2021-09-16 Process for coating a component in a CVD reactor and component produced by the process

Publications (2)

Publication Number Publication Date
GB202213602D0 true GB202213602D0 (en) 2022-11-02
GB2612892A GB2612892A (en) 2023-05-17

Family

ID=84817804

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2213602.2A Pending GB2612892A (en) 2021-09-16 2022-09-16 Method of coating a component for use in a CVD-reactor and component produced by the method

Country Status (2)

Country Link
DE (1) DE102021123986A1 (en)
GB (1) GB2612892A (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2559042C (en) * 2005-02-14 2011-03-08 Toyo Tanso Co., Ltd. Tantalum carbide-coated carbon material and production method thereof
DE102018128558A1 (en) 2018-11-14 2020-05-14 Aixtron Se Gas outlet device of a CVD reactor
CN112501584A (en) * 2020-11-13 2021-03-16 南昌大学 Composite coating based on graphite substrate and preparation method thereof
CN112374891B (en) * 2020-11-16 2021-11-23 南京工业大学 Graphite base plate surface gradient TaC coating
CN112680720B (en) 2020-12-07 2022-11-01 湖南德智新材料有限公司 Base plate with composite coating structure for MOCVD equipment and preparation method thereof

Also Published As

Publication number Publication date
DE102021123986A1 (en) 2023-03-16
GB2612892A (en) 2023-05-17

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