GB201916479D0 - Inert gas recovery from a semiconductor manufacturing tool - Google Patents
Inert gas recovery from a semiconductor manufacturing toolInfo
- Publication number
- GB201916479D0 GB201916479D0 GBGB1916479.7A GB201916479A GB201916479D0 GB 201916479 D0 GB201916479 D0 GB 201916479D0 GB 201916479 A GB201916479 A GB 201916479A GB 201916479 D0 GB201916479 D0 GB 201916479D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- inert gas
- semiconductor manufacturing
- gas recovery
- manufacturing tool
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1916479.7A GB2588908B (en) | 2019-11-13 | 2019-11-13 | Inert gas recovery from a semiconductor manufacturing tool |
PCT/GB2020/052766 WO2021094709A1 (en) | 2019-11-13 | 2020-11-02 | Inert gas recovery from a semiconductor manufacturing tool |
TW109139760A TW202133918A (en) | 2019-11-13 | 2020-11-13 | Inert gas recovery from a semiconductor manufacturing tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1916479.7A GB2588908B (en) | 2019-11-13 | 2019-11-13 | Inert gas recovery from a semiconductor manufacturing tool |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201916479D0 true GB201916479D0 (en) | 2019-12-25 |
GB2588908A GB2588908A (en) | 2021-05-19 |
GB2588908B GB2588908B (en) | 2022-04-20 |
Family
ID=69062287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1916479.7A Active GB2588908B (en) | 2019-11-13 | 2019-11-13 | Inert gas recovery from a semiconductor manufacturing tool |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB2588908B (en) |
TW (1) | TW202133918A (en) |
WO (1) | WO2021094709A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7435660B2 (en) * | 2022-05-20 | 2024-02-21 | 栗田工業株式会社 | How to operate exhaust gas treatment equipment |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5262547A (en) * | 1990-10-31 | 1993-11-16 | The Boc Group, Inc. | Process for the production of petrochemicals |
AU7431198A (en) * | 1998-01-16 | 1999-08-02 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process and system for separation and recovery of perfluorocompound gases |
AU7185900A (en) * | 2000-01-14 | 2001-07-19 | Boc Group, Inc., The | Helium recovery process |
JP4212106B2 (en) * | 2005-04-19 | 2009-01-21 | オルガノ株式会社 | Gas separation device and gas separation method |
US7794523B2 (en) * | 2006-11-14 | 2010-09-14 | Linde Llc | Method for the recovery and re-use of process gases |
KR101596150B1 (en) * | 2014-07-18 | 2016-02-22 | 한서대학교 산학협력단 | Fluorine compound gas Treatment method and equipment using the same |
DE102014018883A1 (en) * | 2014-12-17 | 2016-06-23 | Linde Aktiengesellschaft | Combined membrane pressure swing adsorption process for the recovery of helium |
-
2019
- 2019-11-13 GB GB1916479.7A patent/GB2588908B/en active Active
-
2020
- 2020-11-02 WO PCT/GB2020/052766 patent/WO2021094709A1/en active Application Filing
- 2020-11-13 TW TW109139760A patent/TW202133918A/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2588908B (en) | 2022-04-20 |
GB2588908A (en) | 2021-05-19 |
WO2021094709A1 (en) | 2021-05-20 |
TW202133918A (en) | 2021-09-16 |
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