GB201916479D0 - Inert gas recovery from a semiconductor manufacturing tool - Google Patents

Inert gas recovery from a semiconductor manufacturing tool

Info

Publication number
GB201916479D0
GB201916479D0 GBGB1916479.7A GB201916479A GB201916479D0 GB 201916479 D0 GB201916479 D0 GB 201916479D0 GB 201916479 A GB201916479 A GB 201916479A GB 201916479 D0 GB201916479 D0 GB 201916479D0
Authority
GB
United Kingdom
Prior art keywords
inert gas
semiconductor manufacturing
gas recovery
manufacturing tool
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1916479.7A
Other versions
GB2588908B (en
GB2588908A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1916479.7A priority Critical patent/GB2588908B/en
Publication of GB201916479D0 publication Critical patent/GB201916479D0/en
Priority to PCT/GB2020/052766 priority patent/WO2021094709A1/en
Priority to TW109139760A priority patent/TW202133918A/en
Publication of GB2588908A publication Critical patent/GB2588908A/en
Application granted granted Critical
Publication of GB2588908B publication Critical patent/GB2588908B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

GB1916479.7A 2019-11-13 2019-11-13 Inert gas recovery from a semiconductor manufacturing tool Active GB2588908B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1916479.7A GB2588908B (en) 2019-11-13 2019-11-13 Inert gas recovery from a semiconductor manufacturing tool
PCT/GB2020/052766 WO2021094709A1 (en) 2019-11-13 2020-11-02 Inert gas recovery from a semiconductor manufacturing tool
TW109139760A TW202133918A (en) 2019-11-13 2020-11-13 Inert gas recovery from a semiconductor manufacturing tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1916479.7A GB2588908B (en) 2019-11-13 2019-11-13 Inert gas recovery from a semiconductor manufacturing tool

Publications (3)

Publication Number Publication Date
GB201916479D0 true GB201916479D0 (en) 2019-12-25
GB2588908A GB2588908A (en) 2021-05-19
GB2588908B GB2588908B (en) 2022-04-20

Family

ID=69062287

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1916479.7A Active GB2588908B (en) 2019-11-13 2019-11-13 Inert gas recovery from a semiconductor manufacturing tool

Country Status (3)

Country Link
GB (1) GB2588908B (en)
TW (1) TW202133918A (en)
WO (1) WO2021094709A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7435660B2 (en) * 2022-05-20 2024-02-21 栗田工業株式会社 How to operate exhaust gas treatment equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262547A (en) * 1990-10-31 1993-11-16 The Boc Group, Inc. Process for the production of petrochemicals
AU7431198A (en) * 1998-01-16 1999-08-02 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
AU7185900A (en) * 2000-01-14 2001-07-19 Boc Group, Inc., The Helium recovery process
JP4212106B2 (en) * 2005-04-19 2009-01-21 オルガノ株式会社 Gas separation device and gas separation method
US7794523B2 (en) * 2006-11-14 2010-09-14 Linde Llc Method for the recovery and re-use of process gases
KR101596150B1 (en) * 2014-07-18 2016-02-22 한서대학교 산학협력단 Fluorine compound gas Treatment method and equipment using the same
DE102014018883A1 (en) * 2014-12-17 2016-06-23 Linde Aktiengesellschaft Combined membrane pressure swing adsorption process for the recovery of helium

Also Published As

Publication number Publication date
GB2588908B (en) 2022-04-20
GB2588908A (en) 2021-05-19
WO2021094709A1 (en) 2021-05-20
TW202133918A (en) 2021-09-16

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