GB201913920D0 - Gas abatement apparatus - Google Patents

Gas abatement apparatus

Info

Publication number
GB201913920D0
GB201913920D0 GB201913920A GB201913920A GB201913920D0 GB 201913920 D0 GB201913920 D0 GB 201913920D0 GB 201913920 A GB201913920 A GB 201913920A GB 201913920 A GB201913920 A GB 201913920A GB 201913920 D0 GB201913920 D0 GB 201913920D0
Authority
GB
United Kingdom
Prior art keywords
abatement apparatus
gas abatement
gas
abatement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB201913920A
Other versions
GB2575742A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Edwards Japan Ltd
Original Assignee
Edwards Ltd
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd, Edwards Japan Ltd filed Critical Edwards Ltd
Publication of GB201913920D0 publication Critical patent/GB201913920D0/en
Publication of GB2575742A publication Critical patent/GB2575742A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23CMETHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C6/00Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion
    • F23C6/02Combustion apparatus characterised by the combination of two or more combustion chambers or combustion zones, e.g. for staged combustion in parallel arrangement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23DBURNERS
    • F23D23/00Assemblies of two or more burners
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/02Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/02Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/06Arrangements of devices for treating smoke or fumes of coolers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00Supplementary heating arrangements
    • F23G2204/10Supplementary heating arrangements using auxiliary fuel
    • F23G2204/103Supplementary heating arrangements using auxiliary fuel gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00Specific waste
    • F23G2209/14Gaseous waste or fumes
    • F23G2209/142Halogen gases, e.g. silane
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00Treatment devices
    • F23J2219/40Sorption with wet devices, e.g. scrubbers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00Treatment devices
    • F23J2219/80Quenching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
GB1913920.3A 2018-07-03 2018-08-30 Gas abatement apparatus Withdrawn GB2575742A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB1810916.5A GB201810916D0 (en) 2018-07-03 2018-07-03 Gas abatement apparatus
GB1814132.5A GB2575331B (en) 2018-07-03 2018-08-30 Gas abatement apparatus

Publications (2)

Publication Number Publication Date
GB201913920D0 true GB201913920D0 (en) 2019-11-13
GB2575742A GB2575742A (en) 2020-01-22

Family

ID=63143761

Family Applications (4)

Application Number Title Priority Date Filing Date
GBGB1810916.5A Ceased GB201810916D0 (en) 2018-07-03 2018-07-03 Gas abatement apparatus
GB1814132.5A Expired - Fee Related GB2575331B (en) 2018-07-03 2018-08-30 Gas abatement apparatus
GB1913920.3A Withdrawn GB2575742A (en) 2018-07-03 2018-08-30 Gas abatement apparatus
GB1913919.5A Withdrawn GB2582191A (en) 2018-07-03 2018-08-30 Gas abatement apparatus

Family Applications Before (2)

Application Number Title Priority Date Filing Date
GBGB1810916.5A Ceased GB201810916D0 (en) 2018-07-03 2018-07-03 Gas abatement apparatus
GB1814132.5A Expired - Fee Related GB2575331B (en) 2018-07-03 2018-08-30 Gas abatement apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB1913919.5A Withdrawn GB2582191A (en) 2018-07-03 2018-08-30 Gas abatement apparatus

Country Status (3)

Country Link
GB (4) GB201810916D0 (en)
TW (1) TW202005703A (en)
WO (1) WO2020008177A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU1451901A (en) * 1999-11-01 2001-05-14 James D. Getty Modular chemical abatement system and method for semiconductor manufacturing
US7021903B2 (en) * 2003-12-31 2006-04-04 The Boc Group, Inc. Fore-line preconditioning for vacuum pumps
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
US20100119984A1 (en) * 2008-11-10 2010-05-13 Fox Allen G Abatement system
KR101336614B1 (en) * 2012-02-13 2013-12-05 한국기초과학지원연구원 Apparatus for eliminating high-velocity, large-volume waste gases
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
KR101768920B1 (en) * 2015-01-30 2017-08-18 씨에스케이(주) Burner for Scrubber

Also Published As

Publication number Publication date
GB2575742A (en) 2020-01-22
GB2582191A (en) 2020-09-16
GB2575331A (en) 2020-01-08
GB201913919D0 (en) 2019-11-13
GB201814132D0 (en) 2018-10-17
GB201810916D0 (en) 2018-08-15
GB2575331B (en) 2020-12-30
TW202005703A (en) 2020-02-01
WO2020008177A1 (en) 2020-01-09

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20201022 AND 20201028

WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)