GB201816975D0 - A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment - Google Patents

A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment

Info

Publication number
GB201816975D0
GB201816975D0 GBGB1816975.5A GB201816975A GB201816975D0 GB 201816975 D0 GB201816975 D0 GB 201816975D0 GB 201816975 A GB201816975 A GB 201816975A GB 201816975 D0 GB201816975 D0 GB 201816975D0
Authority
GB
United Kingdom
Prior art keywords
evacuating
pumps
vacuum chamber
radioactive environment
radioactive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1816975.5A
Other versions
GB2578293A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1816975.5A priority Critical patent/GB2578293A/en
Publication of GB201816975D0 publication Critical patent/GB201816975D0/en
Priority to PCT/GB2019/052946 priority patent/WO2020079428A1/en
Priority to EP19794211.3A priority patent/EP3867529A1/en
Publication of GB2578293A publication Critical patent/GB2578293A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00Diffusion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB1816975.5A 2018-10-18 2018-10-18 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment Withdrawn GB2578293A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1816975.5A GB2578293A (en) 2018-10-18 2018-10-18 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment
PCT/GB2019/052946 WO2020079428A1 (en) 2018-10-18 2019-10-16 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment
EP19794211.3A EP3867529A1 (en) 2018-10-18 2019-10-16 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1816975.5A GB2578293A (en) 2018-10-18 2018-10-18 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment

Publications (2)

Publication Number Publication Date
GB201816975D0 true GB201816975D0 (en) 2018-12-05
GB2578293A GB2578293A (en) 2020-05-06

Family

ID=64453921

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1816975.5A Withdrawn GB2578293A (en) 2018-10-18 2018-10-18 A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment

Country Status (3)

Country Link
EP (1) EP3867529A1 (en)
GB (1) GB2578293A (en)
WO (1) WO2020079428A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2576968B (en) 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB879823A (en) * 1959-08-14 1961-10-11 Balzers Hochvakuum Improvements in and relating to ultra-high vacuum pumping plants
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
DE4213763B4 (en) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
JPH06140193A (en) * 1992-10-21 1994-05-20 Mitsubishi Electric Corp Beam chamber for sr device
US8342813B2 (en) * 2008-03-28 2013-01-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
EP3427554B1 (en) * 2016-03-09 2020-05-27 ViewRay Technologies, Inc. Magnetic field compensation in a linear accelerator
US10550829B2 (en) 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump

Also Published As

Publication number Publication date
WO2020079428A1 (en) 2020-04-23
EP3867529A1 (en) 2021-08-25
GB2578293A (en) 2020-05-06

Similar Documents

Publication Publication Date Title
TWI800550B (en) Gas delivery system for high pressure processing chamber
SG11201912787RA (en) Gas delivery system for high pressure processing chamber
SG11201706348UA (en) System comprising a vacuum cleaner and a base station, vacuum cleaner, base station, and method for emptying a dust chamber of a vacuum cleaner
EP3365911A4 (en) Apparatus and method for loading a substrate into a vacuum processing module, apparatus and method for treatment of a substrate for a vacuum deposition process in a vacuum processing module, and system for vacuum processing of a substrate
MY183097A (en) Implant masking and alignment system with rollers
EP3487766A4 (en) Vacuum sealing system, apparatus, and method
GB2542967A (en) Improvements to halocarbon recycling methods and systems
PL3263238T3 (en) Zero liquid discharge exhaust gas processing system and method.
PL3903018T3 (en) Method for detecting leaks in a gas network under pressure or under vacuum and gas network
GB201816975D0 (en) A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment
IL288993A (en) Multiple vacuum chamber exhaust system and method of evacuating multiple vacuum chambers
PL3161318T3 (en) Method of pumping in a system of vacuum pumps and system of vacuum pumps
EP3669665A4 (en) Method for processing ginseng with ultra-high pressure
EP3581801A4 (en) Vacuum pump, rotary portion provided in vacuum pump, and unbalance correction method
EP3426887A4 (en) Mud pump and vacuum gas extraction system
EP3821183A4 (en) System including recovery pump and vacuum pump
GB2584428B (en) A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
GB2570503B (en) Turbomolecular pump and method of operation
IL289234A (en) Cyclic operating pumping method and system
EP3880970A4 (en) Apparatus and method for evacuating very large volumes
GB2587504B (en) Method for operating a vacuum pumping system and vacuum pumping system suitable for implementing such method
PL3891432T3 (en) Gas network and method for detecting obstructions in a gas network under pressure or under vacuum
PT3123030T (en) Method for pumping in a system of vacuum pumps and system of vacuum pumps
GB201905836D0 (en) High vacuum and ultra-high vacuum pumps
GB201814455D0 (en) Seals, vacuum systems with such seals and a method of manufacture of such seals

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)