GB2015581B - Sputtering - Google Patents

Sputtering

Info

Publication number
GB2015581B
GB2015581B GB7908628A GB7908628A GB2015581B GB 2015581 B GB2015581 B GB 2015581B GB 7908628 A GB7908628 A GB 7908628A GB 7908628 A GB7908628 A GB 7908628A GB 2015581 B GB2015581 B GB 2015581B
Authority
GB
United Kingdom
Prior art keywords
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7908628A
Other versions
GB2015581A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Electronic Controls Ltd
Original Assignee
Ultra Electronic Controls Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronic Controls Ltd filed Critical Ultra Electronic Controls Ltd
Priority to GB7908628A priority Critical patent/GB2015581B/en
Publication of GB2015581A publication Critical patent/GB2015581A/en
Application granted granted Critical
Publication of GB2015581B publication Critical patent/GB2015581B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB7908628A 1977-12-12 1979-03-12 Sputtering Expired GB2015581B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7908628A GB2015581B (en) 1977-12-12 1979-03-12 Sputtering

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB5167277 1977-12-12
GB7908628A GB2015581B (en) 1977-12-12 1979-03-12 Sputtering

Publications (2)

Publication Number Publication Date
GB2015581A GB2015581A (en) 1979-09-12
GB2015581B true GB2015581B (en) 1982-02-10

Family

ID=26266917

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7908628A Expired GB2015581B (en) 1977-12-12 1979-03-12 Sputtering

Country Status (1)

Country Link
GB (1) GB2015581B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4290875A (en) * 1980-03-18 1981-09-22 Ultra Electronic Controls Limited Sputtering apparatus

Also Published As

Publication number Publication date
GB2015581A (en) 1979-09-12

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930312