GB201000225D0 - Smart sensor - Google Patents

Smart sensor

Info

Publication number
GB201000225D0
GB201000225D0 GBGB1000225.1A GB201000225A GB201000225D0 GB 201000225 D0 GB201000225 D0 GB 201000225D0 GB 201000225 A GB201000225 A GB 201000225A GB 201000225 D0 GB201000225 D0 GB 201000225D0
Authority
GB
United Kingdom
Prior art keywords
smart sensor
smart
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1000225.1A
Other versions
GB2464016B (en
GB2464016A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Warwick
Original Assignee
University of Warwick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Warwick filed Critical University of Warwick
Priority to GB1000225A priority Critical patent/GB2464016B/en
Priority claimed from GB0505192A external-priority patent/GB2422017B/en
Publication of GB201000225D0 publication Critical patent/GB201000225D0/en
Publication of GB2464016A publication Critical patent/GB2464016A/en
Application granted granted Critical
Publication of GB2464016B publication Critical patent/GB2464016B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
GB1000225A 2005-03-15 2005-03-15 Smart sensors Active GB2464016B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1000225A GB2464016B (en) 2005-03-15 2005-03-15 Smart sensors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1000225A GB2464016B (en) 2005-03-15 2005-03-15 Smart sensors
GB0505192A GB2422017B (en) 2005-01-10 2005-03-15 Smart Sensors

Publications (3)

Publication Number Publication Date
GB201000225D0 true GB201000225D0 (en) 2010-02-24
GB2464016A GB2464016A (en) 2010-04-07
GB2464016B GB2464016B (en) 2010-07-28

Family

ID=41819057

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1000225A Active GB2464016B (en) 2005-03-15 2005-03-15 Smart sensors

Country Status (1)

Country Link
GB (1) GB2464016B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109564180A (en) * 2016-05-31 2019-04-02 Ams传感器英国有限公司 Environment sensor system
CN115436436A (en) * 2022-11-03 2022-12-06 南京元感微电子有限公司 FET gas sensor and processing method thereof

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2872882B1 (en) 2012-07-16 2018-10-31 SGX Sensortech SA Micro-hotplate device and sensor comprising such micro-hotplate device
US8802568B2 (en) 2012-09-27 2014-08-12 Sensirion Ag Method for manufacturing chemical sensor with multiple sensor cells
US11371951B2 (en) 2012-09-27 2022-06-28 Sensirion Ag Gas sensor comprising a set of one or more sensor cells
EP2762865A1 (en) 2013-01-31 2014-08-06 Sensirion Holding AG Chemical sensor and method for manufacturing such a chemical sensor
EP2762867B1 (en) 2013-01-31 2018-11-21 Sensirion AG Gas sensor with temperature control
EP2762866B1 (en) 2013-01-31 2017-08-09 Sensirion AG CMOS gas sensor and method for manufacturing the same
EP2833129B1 (en) 2013-07-30 2019-10-09 Sensirion AG Method and apparatus for analyzing a gas by a conductance-type particulate metal-oxide gas sensor
EP2975386B1 (en) 2014-07-14 2020-09-02 Sensirion AG Heater structure for a sensor device
CN106803506A (en) * 2015-01-29 2017-06-06 江西师范大学 CMOS gas sensors
GB2545426B (en) 2015-12-14 2021-08-04 Sciosense Bv Sensing Layer Formation
US10578572B2 (en) 2016-01-19 2020-03-03 Invensense, Inc. CMOS integrated microheater for a gas sensor device
TWI601686B (en) * 2016-08-03 2017-10-11 國立交通大學 Method for manufacturing semiconductor gas sensing device and semiconductor gas sensing device
US9927360B2 (en) * 2016-08-29 2018-03-27 Apple Inc. Electronic devices with environmental sensors
US10383967B2 (en) 2016-11-30 2019-08-20 Invensense, Inc. Substance sensing with tracers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0795625A1 (en) * 1996-03-11 1997-09-17 Tokyo Gas Co., Ltd. Thin film deposition method and gas sensor made by the method
GB2321336B (en) * 1997-01-15 2001-07-25 Univ Warwick Gas-sensing semiconductor devices
EP0882978A1 (en) * 1997-06-04 1998-12-09 STMicroelectronics S.r.l. Integrated semi-conductor device comprising a chemoresistive gas microsensor and manufacturing process thereof
JP4103027B2 (en) * 2000-10-04 2008-06-18 富士電機機器制御株式会社 Thin film gas sensor
DE10213805A1 (en) * 2001-03-28 2002-11-07 Denso Corp Gas sensor and method for manufacturing a gas sensor
JP4325133B2 (en) * 2001-08-27 2009-09-02 株式会社デンソー Gas sensor and manufacturing method thereof
JP2003294672A (en) * 2002-03-29 2003-10-15 Fuji Electric Co Ltd Thin film gas sensor and gas leakage detector
KR100529233B1 (en) * 2003-09-06 2006-02-24 한국전자통신연구원 Sensor and method for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109564180A (en) * 2016-05-31 2019-04-02 Ams传感器英国有限公司 Environment sensor system
CN115436436A (en) * 2022-11-03 2022-12-06 南京元感微电子有限公司 FET gas sensor and processing method thereof

Also Published As

Publication number Publication date
GB2464016B (en) 2010-07-28
GB2464016A (en) 2010-04-07

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732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

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732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

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