GB2001471B - Apparatus for analysing a sample by bombardment with electromagnetic radiation - Google Patents

Apparatus for analysing a sample by bombardment with electromagnetic radiation

Info

Publication number
GB2001471B
GB2001471B GB7830281A GB7830281A GB2001471B GB 2001471 B GB2001471 B GB 2001471B GB 7830281 A GB7830281 A GB 7830281A GB 7830281 A GB7830281 A GB 7830281A GB 2001471 B GB2001471 B GB 2001471B
Authority
GB
United Kingdom
Prior art keywords
analysing
bombardment
sample
electromagnetic radiation
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7830281A
Other versions
GB2001471A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19772732961 external-priority patent/DE2732961A1/en
Priority claimed from DE2739829A external-priority patent/DE2739829C2/en
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB2001471A publication Critical patent/GB2001471A/en
Application granted granted Critical
Publication of GB2001471B publication Critical patent/GB2001471B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
GB7830281A 1977-07-21 1978-07-19 Apparatus for analysing a sample by bombardment with electromagnetic radiation Expired GB2001471B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19772732961 DE2732961A1 (en) 1977-07-21 1977-07-21 Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution
DE2739829A DE2739829C2 (en) 1977-09-03 1977-09-03 Arrangement for analyzing a sample layer by bombarding it with electromagnetic radiation

Publications (2)

Publication Number Publication Date
GB2001471A GB2001471A (en) 1979-01-31
GB2001471B true GB2001471B (en) 1982-03-10

Family

ID=25772374

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7830281A Expired GB2001471B (en) 1977-07-21 1978-07-19 Apparatus for analysing a sample by bombardment with electromagnetic radiation

Country Status (2)

Country Link
FR (1) FR2398300A1 (en)
GB (1) GB2001471B (en)

Also Published As

Publication number Publication date
FR2398300B3 (en) 1981-04-17
FR2398300A1 (en) 1979-02-16
GB2001471A (en) 1979-01-31

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19960719