DE2732961A1 - Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution - Google Patents

Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution

Info

Publication number
DE2732961A1
DE2732961A1 DE19772732961 DE2732961A DE2732961A1 DE 2732961 A1 DE2732961 A1 DE 2732961A1 DE 19772732961 DE19772732961 DE 19772732961 DE 2732961 A DE2732961 A DE 2732961A DE 2732961 A1 DE2732961 A1 DE 2732961A1
Authority
DE
Germany
Prior art keywords
sample
region
conductive layer
potential
bombardment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19772732961
Other languages
German (de)
Inventor
Franz Prof Hillekamp
Raimund Prof Kaufmann
Rainer Dr Nietsche
Eberhard Dr Unsoeld
Rainer Dr Wechsung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE19772732961 priority Critical patent/DE2732961A1/en
Priority claimed from GB7830281A external-priority patent/GB2001471B/en
Publication of DE2732961A1 publication Critical patent/DE2732961A1/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers

Abstract

A sample is analysed by bombardment with electromagnetic radiation, causing it to emit particles which are subsequently analysed in a co-ordinated mass analyser, using appts. comprising an evacuated housing, a sample support within the housing and one or more layers of electrically conductive material in the region of the housing. The conductive layer and sample may be electrically insulated from other components in the region and can be maintained at the same potential, or the conducting material is itself insulated and, in operation, may be at a potential different to that of the sample. The layer(s) may, in operation, serve to trap ions or electrons formed by the irradiation and are so used to generate calibration signals. The conductive layer ensures a uniform potential distribution in the region of the sample, so that potential difference for all the ions emitted from the sample and accelerated towards the mass analyser is constant. The sample can be maintained at a desired potential, external interfering potentials are prevented from reaching the analysis site, and calibration signals can be generated.
DE19772732961 1977-07-21 1977-07-21 Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution Withdrawn DE2732961A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19772732961 DE2732961A1 (en) 1977-07-21 1977-07-21 Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19772732961 DE2732961A1 (en) 1977-07-21 1977-07-21 Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution
GB7830281A GB2001471B (en) 1977-07-21 1978-07-19 Apparatus for analysing a sample by bombardment with electromagnetic radiation
FR7821774A FR2398300B3 (en) 1977-07-21 1978-07-21

Publications (1)

Publication Number Publication Date
DE2732961A1 true DE2732961A1 (en) 1979-02-22

Family

ID=6014513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772732961 Withdrawn DE2732961A1 (en) 1977-07-21 1977-07-21 Sample analysis by bombardment with electromagnetic radiation - with conductive layer in region of sample for uniform potential distribution

Country Status (1)

Country Link
DE (1) DE2732961A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4232509A1 (en) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Measuring contaminants in containers,e.g. plastic bottles - involves using mass spectrometer with ionisation and photon stimulation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4232509A1 (en) * 1992-09-29 1994-03-31 Holstein & Kappert Maschf Measuring contaminants in containers,e.g. plastic bottles - involves using mass spectrometer with ionisation and photon stimulation

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Legal Events

Date Code Title Description
OGA New person/name/address of the applicant
8139 Disposal/non-payment of the annual fee