GB1603359A - Masks for use in copying processes - Google Patents
Masks for use in copying processes Download PDFInfo
- Publication number
- GB1603359A GB1603359A GB18659/78A GB1865978A GB1603359A GB 1603359 A GB1603359 A GB 1603359A GB 18659/78 A GB18659/78 A GB 18659/78A GB 1865978 A GB1865978 A GB 1865978A GB 1603359 A GB1603359 A GB 1603359A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- carrier film
- light
- mask
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 43
- 230000008569 process Effects 0.000 title claims description 31
- 239000002131 composite material Substances 0.000 claims description 24
- 239000011888 foil Substances 0.000 claims description 13
- 239000000975 dye Substances 0.000 claims description 9
- 239000004411 aluminium Substances 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000011368 organic material Substances 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 claims description 5
- 229920000728 polyester Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 101
- 239000010408 film Substances 0.000 description 51
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- -1 polyethylenes Polymers 0.000 description 8
- 229920003023 plastic Polymers 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical group CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000004922 lacquer Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000013039 cover film Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- JOOXCMJARBKPKM-UHFFFAOYSA-N 4-oxopentanoic acid Chemical compound CC(=O)CCC(O)=O JOOXCMJARBKPKM-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 229940081735 acetylcellulose Drugs 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229920002301 cellulose acetate Polymers 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 150000008049 diazo compounds Chemical class 0.000 description 2
- 239000012954 diazonium Substances 0.000 description 2
- 150000001989 diazonium salts Chemical class 0.000 description 2
- 230000032050 esterification Effects 0.000 description 2
- 238000005886 esterification reaction Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- PHIQPXBZDGYJOG-UHFFFAOYSA-N sodium silicate nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Na+].[Na+].[O-][Si]([O-])=O PHIQPXBZDGYJOG-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- NLWCWEGVNJVLAX-UHFFFAOYSA-N 1-methoxy-2-phenylbenzene Chemical compound COC1=CC=CC=C1C1=CC=CC=C1 NLWCWEGVNJVLAX-UHFFFAOYSA-N 0.000 description 1
- HTQNYBBTZSBWKL-UHFFFAOYSA-N 2,3,4-trihydroxbenzophenone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 1
- LXFQSRIDYRFTJW-UHFFFAOYSA-N 2,4,6-trimethylbenzenesulfonic acid Chemical compound CC1=CC(C)=C(S(O)(=O)=O)C(C)=C1 LXFQSRIDYRFTJW-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical compound [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 1
- PUBJVUBFNXEGAU-UHFFFAOYSA-N 6-(1-hydroxyethoxy)hexan-1-ol Chemical compound CC(O)OCCCCCCO PUBJVUBFNXEGAU-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical group CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000004826 Synthetic adhesive Substances 0.000 description 1
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000227 bioadhesive Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- KDTAEYOYAZPLIC-UHFFFAOYSA-N coumarin 152 Chemical compound FC(F)(F)C1=CC(=O)OC2=CC(N(C)C)=CC=C21 KDTAEYOYAZPLIC-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229960004592 isopropanol Drugs 0.000 description 1
- 229940040102 levulinic acid Drugs 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 1
- 235000019799 monosodium phosphate Nutrition 0.000 description 1
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical class [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- KJIFKLIQANRMOU-UHFFFAOYSA-N oxidanium;4-methylbenzenesulfonate Chemical compound O.CC1=CC=C(S(O)(=O)=O)C=C1 KJIFKLIQANRMOU-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- IOVGROKTTNBUGK-SJCJKPOMSA-N ritodrine Chemical compound N([C@@H](C)[C@H](O)C=1C=CC(O)=CC=1)CCC1=CC=C(O)C=C1 IOVGROKTTNBUGK-SJCJKPOMSA-N 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- UJPWWRPNIRRCPJ-UHFFFAOYSA-L strontium;dihydroxide;octahydrate Chemical compound O.O.O.O.O.O.O.O.[OH-].[OH-].[Sr+2] UJPWWRPNIRRCPJ-UHFFFAOYSA-L 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- ASTWEMOBIXQPPV-UHFFFAOYSA-K trisodium;phosphate;dodecahydrate Chemical compound O.O.O.O.O.O.O.O.O.O.O.O.[Na+].[Na+].[Na+].[O-]P([O-])([O-])=O ASTWEMOBIXQPPV-UHFFFAOYSA-K 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/90—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof prepared by montage processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/62—Holders for the original
- G03B27/6207—Holders for the original in copying cameras
- G03B27/6242—Masks; Overlays; Transparent carriers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Holders For Sensitive Materials And Originals (AREA)
Description
(54) IMPROVEMENTS IN AND RELATING TO MASKS FOR USE
IN COPYING PROCESSES (71) We, HOECHST AKTrENGEsELLscHAFT, a Body Corporate organised according to the laws of the Federal Republic of CGermany, of 6lsU 1-rank- furt/Mam 80, Postfach 800320, Federal
Republic of Germany, do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the follow- ing statement :- This invention relates to a copying process using a mask and to the production of a mask.
Areas ot masters to be copied may be masked in reproduction techniques, for example, when only parts of the masters are to be reproduced; the masters may be covered with one or more masks, so that only the area which is to be reproduced is left uncovered. For example, an image of which only particular parts are to be recorded by photographing may be covered by one or more masks or a printable film negative or a positive capable of transmitting actinic light may be covered if particular parts of it are not to be copied. Masks may alternatively, or in addition, serve to bring out or to subdue colours. The masks used in accordance with the invention may be used for any one or more of the above purposes.
In one previous proposal for a mask for use in reproduction techniques, the mask consists of a translucent carrier film provided with a layer of a light-reflecting or light-absorbing material, or of a material transmitting only light of particular wavelengths. This material is either a lacquer or a plastics film coated with a lightfiltering dyestuff, and it must be capable of being incised and of being stripped off from the carrier film.
In DE-AS No. 15 97 698 a mask is described for covering images to be reproduced, which is prepared from a coated transparent film having a covering layer of a thin plastics film resistant to moisture, to which a light-filtering dyestuff is applied.
This plastics film is jomed to the transparent film by means of an adhesive which bonds only lightly, and it may be incised with lines forming particular contours. When the part of the plastics film enclosed by an incised line is peeled off from the transparent film the adhesive adheres to the plastics film.
The plastics film constituting the covering layer is either dyed throughout or it is coated with an appropriate dyestuff; it is also possible for the adhesive to comprise a dye.
Composite systems comprising engravable or etchable layers have been proposed for use other than as masks. Thus DE-AS
No. 12 22 372, for example, describes a material composed of at least one metal layer, if appropriate on a carrier of, for example, glass or synthetic resin, to which a light-sensitive layer of polyvinyl butyral is applied. For sensitizing, a chromate, a dichromate or a diaozium salt is added to the light-sensitive layer, and following exposure the unexposed areas may be removed by washing them away. The field of application mentioned is the preparation of printing plates.
The inscribable drawing material disclosed in DE-OS No. 15 11 286 consists of a support and a writing layer onto which a covering of a thin metal layer is deposited.
The metal layer may, in addition, be coated with a light-sensitive copying layer. Drawing materials of this kind may be used for drawing and mapping, for drawing of printed circuits, and for reproducing. The term "inscribable"or"engravable"is used in the
Offenlegungsschrift to denote"inscribable by incising, suitable for cutting out, strippable and pelable". In this case, the metal layer should be thinner than in a laminated metal foil, as it should be translucent when placed on a work-table which is illuminated from below. However, it should also be possible to inscribe the material by means of a photoresist process, in particular, when the metal layer is provided with a lightsensitive copying layer.
DE-OS No. 15 22 452 discloses a method for preparing a master on a support of glass, plastics, marble or similar material, in which a coating layer consisting of metal or a dyestuff is applied to the support and is covered with a light-sensitive layer. The lightsensitive layer is exposed and is subsequently treated with a developer or a solvent to remove the unexposed areas. The areas of the coating layer bared in this manner are removed by treating them with an acid or a solvent. Finally, the support bared in particular areas is given a mat surface using an acid, or it is engraved or coated with a metal or a dyestuff layer.
DE-OS No. 26 20 961 describes a material for producing metal images, which material comprises a support, a light-sensitive resin layer and a layer of an aluminium/iron alloy interposed between the support and the resin layer. This material is in particular, used for the production of screen and line images.
The drawing material described in US-PS
No. 2,999, 016 has a good dimensional stablility and is, for example, composed of a polyester film, an engraving layer opaque to actinic light and a light-sensitive layer. The engraving layer may consist of an organic material or of metal which is applied by vacuum metallization or by deposition from a chemical solution. The areas of the metal layer which are no longer covered after an exposure and development of the lightsensitive layer may be removed by means of chemical solutions. This drawing material may, for example, be used for the production of templates suitable for factory operations and for aircraft construction.
In the materials and methods previously proposed as masks for masters to be copied the following disadvantages are, among others, encountered: when the masks consisting solely of organic materials are used several times their dimensions may change to an unacceptable extent; an exact transfer of register marks is either not possible or is possible only to a limited extent; and in repeatedly used masks the light-filtering effect of the lacquers and dyestuffs applied to carrier films may change to such an extent that the master is no longer sufficiently protected against the action of the actinic light.
The present invention provides a copying process in which at least one part of the master to be copied is masked with a mask prepared from a composite material comprising a carrier film comprising polymeric organic material, the carrier film being capable of transmitting actinic light, a metallic layer which is substantially opaque to actinic light, and a light-sensitive layer, the mask having been prepared by imagewise exposing the light-sensitive layer under an original, developing the exposed light-sensitive layer to yield a visible image, and using the developed light-sensitive layer as a guide for removal by mechanical means of at least one portion of the metallic layer.
The invention also provides a process for preparing a mask which comprises imagewise exposing under an original a composite material comprising a carrier film comprising polymeric organic material, the carrier film being capable of transmitting actinic light, a metallic layer which is substantially opaque to actinic light and can be stripped off the carrier film, and a light-sensitive layer on the side of the metallic layer remote from the carrier film, developing the exposed light-sensitive layer to yield a visible image, making one or more incisions in the metallic layer using the image so produced as a guide, and stripping from the carrier film at least one area of the metallic layer defined by the one or more incisions, and a mask made by such a process.
The invention further provides a copying process in which at least one individual area of a master is covered by means of a mask prepared from a composite material includmg a carrier film capable of transmitting actinic light and an opaque cover film which may be stripped off from the carrier film and may be engraved with lines to form particular contours. The mask used for covering the master consists of at least one stripped off part of the cover film or of that part of the composite material which remains after particular areas of the cover film have been stripped off. In this process, the mask is prepared of a composite material comprising, in the order given, a polymeric organic carrier film, a metallic cover foil, and a lightsensitive layer which is imagewise exposed under a master; the exposed light-sensitive layer is developed to yield a positive or a negative visible image; particular contours corresponding to a desired area of the image produced in this manner are incised into the cover foil; and at least one area of the cover foil enclosed by such an incised line is stripped off from the carrier film.
The composite material used in accordance with the invention comprises a carrier film substantially consisting of an organic polymer, a metallic cover layer, and a lightsensitive layer, and it preferably has the form ot a plate, a sheet or a thin tilm. As tar as possible, the polymeric organic carrier film should not be affected or should be affected to a minor degree by incisions provided in the metallic layer in accordance with the present invention. For special purposes, the carrier film may be dyed; it must transmit actinic light and may, for example, comprise cellulose acetate, a polyalkyl acrylate, a polycarbonate, polyethylenes polypropylene or. preferably, a polyester, for example polyethylene terephthalate. The carrier layer may be manufactured by any suitable method. Advantageously, the carrier fi !... has a thickness of from 100 to 50 hum.
The metallic layer is a layer comprising at least one metal and is preferably such that it can be stripped off (that is, peeled off) the carrier film, and it must be substantially opaque to actinic light. In addition, the metallic layer must be such that it can be incised with linear contours. Suitable mater ials for metallic layers in accordance with the invention are, for example, chromium, copper, nickel, gold, silver and, advantage ously, aluminium. The metals may be deposited on the carrier film by, for example, vacuum metallizing, spraying, chemical deposition, or by an electrolytic process.
Preferably they are applied in the form of a ready-made foil which is laminated to the carrier film. If appropriate, the adhesion of the metallic layer to the carrier film may be improved by special measures. Measures which may be used for improving the adhesion include a previous surface treatment of the carrier film by physical or chemical means, for example, roughening, etching, or irradiating, or the use of synthetic or natural adhesives which may be such that they are not only activated by the application of heat or pressure. When applying a metallic layer to the carrier film it is also possible to use a heat-sealable intermediate layer, for example, a polyethylene film, or a carrier film which is already provided with a heat sealable lacquer coating to be positioned between the carrier layer and the metallic layer, or a carrier film which is heat-sealable without special pretreatment or which may be laminated by the application of pressure; the material of the carrier film may also be extruded on the metal layer. Any other suitable method may be used for the manufacture of a composite material comprising the polymeric organic carrier film and the metal layer. The metallic layer preferably has a thickness of from 10 to 50 ym.
In principle, all layers which, upon exposure and, if necessary, subsequent development and/or fixing, yield a visible image of sufficient contrast are suitable as lightsensitive layers for use in accordance with the invention. Suitable layers include layers containing silver halides, used in many fields of application, and various other lightsensitive layers, for example those described in"Light-Sensitive Systems"by Jaromir
Kosar, John Wiley & Sons, Inc., New York, 1965. The latter layers include colloid layers containing chromates and dichromates (Kosar, Chapter 2); layers containing unsaturated compounds, in which these compounds are isomerized, transposed, cyclized or crosslinked upon exposure (Kosar,
Chapter 4); layers containing photopolymerizable compounds, in which monomers or prepolymers polymerize upon exposure, if necessary, with the aid of an initiator (Kosar, Chapter 5); diazo layers (which are preferred for use in accordance with the present invention) in which, for example, in a positive process, particles of diazonium salts not exposed to light form a dyestuff with a coupling component, and the particles exposed to light form a colourless compound which is not capable of coupling, or in which, for example, in a negative process, diazo compounds are decomposed under the influence of light and form a dyestuff with particles not decomposed by light, or in which nitrogen bubbles generated during decomposition of the diazo compound cause a turbidity (Kosar, Chapter 6) ; and diazo layers contained in presensitized print- ing plates, which layers are also preferable for use in accordance with the invention and which comprise, for example, o-diazoquinones, for example naphthoquinone diazides, p-diazoquinones, and diazonium salt condensates (Kosar, Chapter 7).
A preferred method of preparing and using a mask in accordance with the present invention is as follows:
-The composite material comprising the carrier film, the metallic layer and the lightsensitive layer is exposed under a master from the side of the light-sensitive layer.
Normally, a printable master is used, for example a negative or a positive film. The size of the area to be exposed on the composite material should appropriately correspond to the size of the masked image to be produced in the last ste for example, on a printing plate or on a light-sensitive paper for the production of paper images. Any register marks or other auxiliary marks which are, for example, important to the operator in the reprographic process may be transferred at the same time;
-the exposed light-sensitive layer is then developed to yield a positive or a negative image, and it is fixed, if necessary;
-through the image produced in this manner particular contours are cut into the metallic layer, for example, by means of a knife or an engraving tool ;
-one (or more) partial area (s) of the metallic layer, for example, by means of a knife or an engraving tool ;
-one (or more) partial area (s) of the metallic layer enclosed by the engraved line (s) is/are stripped from the carrier film;
-depending on the field of application, either the stripped area (s) of the metallic layer or the part of the composite material remaining after particular areas of the metallic layers have been stripped off is/are used as mask (s) for covering the corresponding areas of the master;
-the image is then produced from the masked master, with the masked parts of the master missing on the image;
-the mask may be stored and re-used.
The invention makes it possible to provide masks which even in case of repeated use show an adequate storability and dimensional stability, which allow an exact transfer of register marks, and which remain opaque to actinic light even after frequent exposures.
If the copying process of the invention is carried out, for example in automatic printing machines, for example a step-and-repeat printing machine, a mask is required which may be held by suction and is easily detachable (for example releasable) from suction device. For this purpose, the composite material comprising a carrier film, a metallic layer, and a light-sensitive layer may, additionally, be provided with a frame comprising a metal foil, the frame being applied to the side of the carrier film facing away from the light-sensitive layer. This frame normally covers only the marginal area, so that it does not mask any image areas of the master.
The following Examples illustrate the invention. In the Examples, percentages are by weight. The relationship between parts by weight and parts by volume corresponds to the relationship between kilograms and litres.
Example I The composite material for use in preparing a mask comprises a 0.15 mm thick polyethylene terephthalate film (the carrier film) the surfaces of which are treated to render them antistatic, a 0.03 mm thick aluminium layer applied to the carrier layer by means of an acrylic resin adhesive, and a light-sensitive layer sprayed on to the metallic layer in the form of a lacquer composed of 70 parts by weight of methyl acetate, 30 parts by weight of ethanol, 5 parts by volume of water, 0.6 part by weight of 1- diazo-2-napthol-4-sulphonic acid, 0.6 part by weight of resorcinol, 0.6 part by weight of glycol methyl phthalate, 5 parts by weight of ethylene glycol monomethyl ether and 5 parts by weight of acetyl cellulose.
The diazo layer is imagewise exposed under an original and the exposed layer is developed by applying a 10 per cent strength aqueous monoethanolamine soluton. The further process steps of incising and stripping are as described above. The mask so produced may be used as described above.
Example 2
The composite material for use in preparing a mask comprises a 0.20 mm thick cellulose triacetate film with smooth surfaces, a 0.20 mm thick copper layer laminated to it, and a light-sensitive layer produced by whirler coating of the copper layer and subsequent drying of a mixture having the following composition: 1.4 parts by weight of a polymer of methyl methacrylate and methacrylic acid having an average molecular weight of 40, 000 and an acid number of 90 to 115, 1.4 parts by weight of 1,1,1trimethylol-ethane-triacrylate, 0.2 part by weight of 1, 6-dihydroxy-ethoxy-hexane, 0.05 part by weight of a photoinitiator and 13 parts by weight of ethylene glycol monethyl ether. The photopolymer layer is imagewise exposed under an original and the exposed layer is developed by wiping over with a developer which has a pH value of 11.3 and is composed of 15 parts by weight of sodium metasilicate nonahydrate, 3 parts by weight of polyglycol, 0.6 part by weight of levulinic acid and 0.3 part by weight of strontium hydroxide octahydrate in 1000 parts by weight of water; it is then rinsed with water and fixed with 1 per cent strength phosphoric acid. The further process steps of incising and stripping are as described above. The mask so produced may be used as described above.
Example 3
The composite material for use in preparing a mask comprises a 0.15 mm thick polyethylene terephthalate film with a smooth surface (the carrier film), a 0.04 mm thick tin layer applied to the carrier layer by means of an acrylic resin, and a lightsensitive layer applied to the tin layer by coating with doctor knife and subsequent drying of a mixture having the following composition: 0.9 part by weight of the esterification product of 1 mole of 2,4dihydroxy benophenone and 2 moles of the chloride of naphthoquinone- (1, 2)-diazide - (2)-5-sulphonic acid, 0.7 part by weight of the esterification product of 1 mole of 2,2'-dihydroxy-dinaphthyl- (1,1')methane and 2 moles of the chloride of naphthoquinone- (1, 2)-diazide- (2)-5sulphonic acid, 5.7 parts by weight of a Novolak resin (softening range 112 to 119 C, contents of phenolic OH groups 14 percent by weight), 0.06 part by weight of 2, 3,4-trihydroxy benzophenone, 0.15 part by weight of Crystal Violet, 0.08 part by weight of Sudan Yellow GGN (C. I. 11, 021), 80 parts by weight of ethylene glycol monomethyl ether and 15 parts by weight of butyl acetate. The quinone diazide layer is imagewise exposed and the exposed layer is developed using a solution of 5. 3 parts by weight of sodium metasilicate nonahydrate, 3.4 parts by weight of sodium orthophosphate dodecahydrate and 0.3 part by weight of sodium dihydrogen phosphate in 91 parts by weight of water. The further process steps of incising and stripping are as described above. The mask so produced may be used as described above.
Example 4
The composite material for use in prepar ing a mask comprises a U. t mm th'... aluminium frame, a 0.25 mm thick cellulose triacetate film (the carrier film) the surfaces of which are treated to render them antista- tic, a 0.01 mm thick aluminium layer lami- nated to the film, and a light-sensistive layer produced on the aluminium layer by coating with a doctor knife and subsequent drying of a mixture of the following I. 4 parts by weight of a mixed condensate of 1 mole of 3-methoxy-diphenylamine-4diazonium sulphate and I mole of 4,4'-bismethoxy methyl diphenylether prepared in 85 per cent strength aqueous phosphoric acid and precipitated as the mesitylene sulphonate, 0.2 part by weight of p-toluene sulphonic acid monohydrate, 3 parts by weight of a resin of polyvinyl butyral con taining 69 to 71 per cent of polyvinyl butyral units, 1 per cent of polyvinyl acetate units and 24 to 27 per cent of polyvinylalcohol units (the viscosity of a 6 per cent strength solution at 20 C is 4 to 6 cP), 80 parts by volume of ethylene glycol monomethyl ether and 20 parts by volume of butyl aceate. The diazo mixed condensate layer is imagewise exposed and the exposed layer is developed using a mixture of 50 parts by weight of water, 15 parts by weight of isop ropanol, 20 parts by weight of n-propanol, 12. 5 parts by weight of n-propyl-acetatew 1.5 parts by weight of polyacrylic acid and 1.5 parts by weight of acetic acid. The further process steps of incising and stripping are as described above. The mask so produced may be used as described above.
Claims (1)
- WHAT WE CLAIM IS :- 1. A copying process in which at least one part of the master to be copied is masked with a mask prepared from a composite material comprismg a carrier film comprising polymeric organic material, the carrier film being capable of transmitting actinic light, a metallic layer which is substantially opaque to actinic light, and a light-sensitive layer, the mask having been prepared by imagewise exposing the lightsensitive layer under an original, developing the exposea ugnt-sensmve iayer to yield a visible image, and using the developed light-sensitive layer as a guide for removal by mechanical means of at least one portion of the metallic layer.2. A process for preparing a mask which comprises imagewise exposing under an original a composite material comprising a carrier film comprising polymeric organic material, the carrier film being capable of transmitting actinic light, a metallic layer which is substantially opaque to actinic light and can be stripped off the carrier film, and a light-sensitive layer on the side of the metallic layer remote from the carrier layer, developing the exposed light-sensitive layer to yield a visible image, making one or more incisions in the metallic layer using the image so produced as a guide, and stripping from the carrier film at least one area of the metallic layer defined by the one or more incisions.3. A process as claimed in claim I or claim 2, wherein the carrier film comprises a polyester.4. A process as claimed in any one of claims 1 to 3, wherein the carrier film comprises a dyestuff. t. A process as oatmeo in any one ot claims 1 to 4, wherein the carrier film has a thickness of from 100 to 250 Zm.6. A process as claimed in any one of claims 1 to 5, wherein the metallic layer comprises aluminium.7. A process as claimed in any one of claims 1 to 6, wherein the metallic layer has been applied to the carrier film in the form of a foil which is laminated to the carrier film.8. A process as claimed in any one of claims 1 to 7, wherein an adhesive is positioned between the carrier film and the metallic layer.9. A process as claimed in any one of claims 1 to 8, wherein a heat-sealable intermediate layer is positioned between the carrier film and the metallic layer.10. A process as claimed in any one of claims 1 to 9, wherein the metallic layer has a thickness of from 10 to 50 ; Lrp.11. A process as claimed in any one of claims 1 to 10, wherein the light-sensitive layer is a diazo layer.12. A process as claimed in any one of claims 1 to 11, wherein one or more register marks are transferred to the light-sensitive layer during imagewise exposure thereof.13. A process as claimed in any one of claims 1 to 12, wherein a frame comprising a metallic foil is arranged at the edge (s) of the carrier film on the side of the carrier film remote from the light-sensitive layer.14. A process as claimed in claim 1 or claim 2, wherein the composite material is substantially as described in any one of the Examples herein.15. A process as claimed in claim 2 carried out substantially as described herein.16. A mask whenever prepared by a process as claimed in any one of claims 2 to 15.17. A mask as claimed in claim 16, which comprises that part of the composite material which remains after the said at least one area of the cover foil has been stripped from the carrier film.18. A process as claimed in claim 1, wherein a mask as claimed in claim 16 is used.19. A process as claimed in any one of claims 1 to 14, wherein the mask comprises that part of the composite material which remains after removal of the said at least one portion of the metallic layer.20. A copying process in which at least one individual area of a copying master is covered using a mask prepared from a composite material comprising, in the order given, a polymeric organic carrier film capable of transmitting actinic light, an opaque metallic cover foil which may be stripped off from the carrier film and may be provided with linear incisions to form particular contours, and a light-sensitive layer, the mask having been prepared by imagewise exposing the composite material under an original, developing the exposed light-sensitive layer to yield a positive or a negative visible image, icising particular contours into the metallic cover foil corresponding to a desired area of the image thus produced, and stripping off from the carrier film at least one area of the metallic cover foil enclosed by such an incised line, the mask comprising at least one stripped off part of the metallic cover foil or that part of the composite material which remains after one or more areas of the metallic cover have been stripped off
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2721687A DE2721687C2 (en) | 1977-05-13 | 1977-05-13 | Process for covering master copies with masks |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1603359A true GB1603359A (en) | 1981-11-25 |
Family
ID=6008908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB18659/78A Expired GB1603359A (en) | 1977-05-13 | 1978-05-10 | Masks for use in copying processes |
Country Status (10)
Country | Link |
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AT (1) | ATA343478A (en) |
BE (1) | BE866970A (en) |
DE (1) | DE2721687C2 (en) |
ES (1) | ES469747A1 (en) |
FR (1) | FR2390755A1 (en) |
GB (1) | GB1603359A (en) |
IT (1) | IT7849293A0 (en) |
NL (1) | NL7805046A (en) |
SE (1) | SE7805429L (en) |
ZA (1) | ZA782739B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2132789A (en) * | 1982-11-24 | 1984-07-11 | Western Electric Co | Method of pattern generation |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE524656A (en) * | 1952-11-29 | |||
US2999016A (en) * | 1955-03-24 | 1961-09-05 | Keuffel & Esser Co | Drawing material |
US3151927A (en) * | 1962-05-18 | 1964-10-06 | Projected tracking display | |
DE1511286A1 (en) * | 1965-03-01 | 1969-06-26 | Keuffel & Esser Co | Writable drawing material |
DE1572097A1 (en) * | 1966-02-18 | 1970-02-19 | Keuffel & Esser Co | Photosensitive engraving layer material |
DE1522452A1 (en) * | 1966-06-22 | 1969-07-24 | Bassan Maurice | Process for producing an original on a glass base or the like. or any other material |
GB1206633A (en) * | 1967-06-30 | 1970-09-23 | Rank Xerox Ltd | Document presentation device |
DE1597698B1 (en) * | 1967-08-25 | 1970-02-12 | Claus Koenig | Mask for covering images to be reproduced |
CA993709A (en) * | 1971-01-21 | 1976-07-27 | Leo Roos | Composite, mask-forming photohardenable elements |
IT982883B (en) * | 1972-03-13 | 1974-10-21 | Somar Mfg | PHOTOSENSITIVE ELEMENT AND PROCEDURE TO MANUFACTURE NEGATIVE WITH THE WINDOW OPEN |
JPS5850342B2 (en) * | 1975-05-12 | 1983-11-10 | 富士写真フイルム株式会社 | Red-spotted moth |
-
1977
- 1977-05-13 DE DE2721687A patent/DE2721687C2/en not_active Expired
-
1978
- 1978-05-10 NL NL7805046A patent/NL7805046A/en not_active Application Discontinuation
- 1978-05-10 GB GB18659/78A patent/GB1603359A/en not_active Expired
- 1978-05-11 BE BE187615A patent/BE866970A/en not_active IP Right Cessation
- 1978-05-11 IT IT7849293A patent/IT7849293A0/en unknown
- 1978-05-11 AT AT783434A patent/ATA343478A/en not_active IP Right Cessation
- 1978-05-11 FR FR7813970A patent/FR2390755A1/en active Granted
- 1978-05-11 ES ES469747A patent/ES469747A1/en not_active Expired
- 1978-05-11 SE SE7805429A patent/SE7805429L/en unknown
- 1978-05-12 ZA ZA00782739A patent/ZA782739B/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2132789A (en) * | 1982-11-24 | 1984-07-11 | Western Electric Co | Method of pattern generation |
Also Published As
Publication number | Publication date |
---|---|
SE7805429L (en) | 1978-11-14 |
NL7805046A (en) | 1978-11-15 |
BE866970A (en) | 1978-11-13 |
DE2721687C2 (en) | 1986-11-20 |
ATA343478A (en) | 1983-12-15 |
IT7849293A0 (en) | 1978-05-11 |
ES469747A1 (en) | 1979-01-01 |
FR2390755B1 (en) | 1982-11-26 |
ZA782739B (en) | 1979-05-30 |
DE2721687A1 (en) | 1978-11-23 |
FR2390755A1 (en) | 1978-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |