GB1544222A - Method of and apparatus for non-thermal electron beam processing of workpieces - Google Patents

Method of and apparatus for non-thermal electron beam processing of workpieces

Info

Publication number
GB1544222A
GB1544222A GB2766076A GB2766076A GB1544222A GB 1544222 A GB1544222 A GB 1544222A GB 2766076 A GB2766076 A GB 2766076A GB 2766076 A GB2766076 A GB 2766076A GB 1544222 A GB1544222 A GB 1544222A
Authority
GB
United Kingdom
Prior art keywords
workpieces
electron beam
beam processing
thermal electron
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2766076A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH, Carl Zeiss Jena GmbH filed Critical Jenoptik Jena GmbH
Priority to GB2766076A priority Critical patent/GB1544222A/en
Publication of GB1544222A publication Critical patent/GB1544222A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
GB2766076A 1976-07-02 1976-07-02 Method of and apparatus for non-thermal electron beam processing of workpieces Expired GB1544222A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2766076A GB1544222A (en) 1976-07-02 1976-07-02 Method of and apparatus for non-thermal electron beam processing of workpieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2766076A GB1544222A (en) 1976-07-02 1976-07-02 Method of and apparatus for non-thermal electron beam processing of workpieces

Publications (1)

Publication Number Publication Date
GB1544222A true GB1544222A (en) 1979-04-19

Family

ID=10263195

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2766076A Expired GB1544222A (en) 1976-07-02 1976-07-02 Method of and apparatus for non-thermal electron beam processing of workpieces

Country Status (1)

Country Link
GB (1) GB1544222A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2513425A1 (en) * 1981-09-22 1983-03-25 Thomson Csf DEVICE FOR ANGULAR LIMITATION IN A CHARGED PARTICLE BEAM SYSTEM
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
FR2513425A1 (en) * 1981-09-22 1983-03-25 Thomson Csf DEVICE FOR ANGULAR LIMITATION IN A CHARGED PARTICLE BEAM SYSTEM
EP0075504A1 (en) * 1981-09-22 1983-03-30 Thomson-Csf Angle limitation device in a charged-particles beam system
US4492870A (en) * 1981-09-22 1985-01-08 Thomson-Csf Angular limitation device in a charged particle beam system

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee