GB1542083A - Thin silicon semiconductor devices - Google Patents
Thin silicon semiconductor devicesInfo
- Publication number
- GB1542083A GB1542083A GB3597676A GB3597676A GB1542083A GB 1542083 A GB1542083 A GB 1542083A GB 3597676 A GB3597676 A GB 3597676A GB 3597676 A GB3597676 A GB 3597676A GB 1542083 A GB1542083 A GB 1542083A
- Authority
- GB
- United Kingdom
- Prior art keywords
- semiconductor devices
- silicon semiconductor
- thin silicon
- thin
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3597676A GB1542083A (en) | 1977-08-23 | 1977-08-23 | Thin silicon semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3597676A GB1542083A (en) | 1977-08-23 | 1977-08-23 | Thin silicon semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1542083A true GB1542083A (en) | 1979-03-14 |
Family
ID=10383583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3597676A Expired GB1542083A (en) | 1977-08-23 | 1977-08-23 | Thin silicon semiconductor devices |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1542083A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0181714A1 (en) * | 1984-10-24 | 1986-05-21 | Marconi Instruments Limited | Method of fabrication devices on semiconductor substrates |
-
1977
- 1977-08-23 GB GB3597676A patent/GB1542083A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0181714A1 (en) * | 1984-10-24 | 1986-05-21 | Marconi Instruments Limited | Method of fabrication devices on semiconductor substrates |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |