GB1483647A - Charge transfer device - Google Patents

Charge transfer device

Info

Publication number
GB1483647A
GB1483647A GB3640574A GB3640574A GB1483647A GB 1483647 A GB1483647 A GB 1483647A GB 3640574 A GB3640574 A GB 3640574A GB 3640574 A GB3640574 A GB 3640574A GB 1483647 A GB1483647 A GB 1483647A
Authority
GB
United Kingdom
Prior art keywords
layer
charge
transfer
section
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3640574A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of GB1483647A publication Critical patent/GB1483647A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/762Charge transfer devices
    • H01L29/765Charge-coupled devices
    • H01L29/768Charge-coupled devices with field effect produced by an insulated gate
    • H01L29/76833Buried channel CCD
    • H01L29/76841Two-Phase CCD
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025Channel region of field-effect devices
    • H01L29/1062Channel region of field-effect devices of charge coupled devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

1483647 Charge-coupled devices HEWLETTPACKARD CO 19 Aug 1974 [24 Sept 1973] 36405/74 Heading H1K A charge-coupled device formed in a P-type substrate 11 has an N-type ion impanted surface layer 23, in which charge transfer actually occurs, and a plurality of shallower P-type ion-inplanted surface regions 25 located relative to the overlying 2-phase connected electrodes 17, 19, 21 so as to inpart directionality to the transfer of charges. An additional funtion of the regions 25 is to divert charge in the course of transfer between adjacent storage areas into the bulk of the layer 23, as shown by arrows 27, and away from the deleterious effect of trapping centres at the interface between the semiconductor and the insulation 13. The layer 23 serves to increase charge carrying capacity. Each electrode may include a first storage section 17A, &c., and a second transfer section, 17B &c., the two sections being separated by a second insulating layer 15 and each second section 17B overlying a corresponding P-type region 25, which region is formed by implantation through a masking layer constituted by the first electrode sections 17A, &c. The two sections 17A, 17B may be interconnected as shown, or the second section 17B may float electrically. Suitable materials are as follows: for the substrate 11, P-type Si, GaAs or GaP; as dopant for the layer 23, P, As or Sb; as dopant for the regions 25, B, Ga or In; as insulation 13, 15, SiO 2 , Si 3 N 4 or Al 2 O 3 ; as electrodes 17 &c., polysilicon or thin metal. Conductivity types may be reversed. Reference has been directed by the Comptroller to Specification 1,376,640.
GB3640574A 1973-09-24 1974-08-19 Charge transfer device Expired GB1483647A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US40045373A 1973-09-24 1973-09-24

Publications (1)

Publication Number Publication Date
GB1483647A true GB1483647A (en) 1977-08-24

Family

ID=23583680

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3640574A Expired GB1483647A (en) 1973-09-24 1974-08-19 Charge transfer device

Country Status (6)

Country Link
JP (1) JPS555867B2 (en)
DE (1) DE2441531A1 (en)
FR (1) FR2245088B3 (en)
GB (1) GB1483647A (en)
HK (1) HK69278A (en)
NL (1) NL7411365A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4216574A (en) * 1978-06-29 1980-08-12 Raytheon Company Charge coupled device
GB2033152A (en) * 1978-10-06 1980-05-14 Hughes Aircraft Co Heterojunction charge-coupled device
JPH03227027A (en) * 1990-01-31 1991-10-08 Matsushita Electron Corp Charge transfer device

Also Published As

Publication number Publication date
FR2245088A1 (en) 1975-04-18
NL7411365A (en) 1975-03-26
JPS5057780A (en) 1975-05-20
FR2245088B3 (en) 1976-10-22
HK69278A (en) 1978-12-01
JPS555867B2 (en) 1980-02-12
DE2441531A1 (en) 1975-03-27

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee