GB1478594A - Electronic storage tube target having a radiation insensitive layer - Google Patents
Electronic storage tube target having a radiation insensitive layerInfo
- Publication number
- GB1478594A GB1478594A GB2000174A GB2000174A GB1478594A GB 1478594 A GB1478594 A GB 1478594A GB 2000174 A GB2000174 A GB 2000174A GB 2000174 A GB2000174 A GB 2000174A GB 1478594 A GB1478594 A GB 1478594A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- insulating
- areas
- radiation
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 title abstract 3
- 230000005855 radiation Effects 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011810 insulating material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000005865 ionizing radiation Effects 0.000 abstract 1
- 230000014759 maintenance of location Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Semiconductor Memories (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43025774A | 1974-01-02 | 1974-01-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1478594A true GB1478594A (en) | 1977-07-06 |
Family
ID=23706754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2000174A Expired GB1478594A (en) | 1974-01-02 | 1974-06-07 | Electronic storage tube target having a radiation insensitive layer |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5530656B2 (enrdf_load_stackoverflow) |
| CA (1) | CA1044744A (enrdf_load_stackoverflow) |
| DE (1) | DE2420789C3 (enrdf_load_stackoverflow) |
| FR (1) | FR2256529B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1478594A (enrdf_load_stackoverflow) |
| IT (1) | IT1021128B (enrdf_load_stackoverflow) |
| NL (1) | NL7407172A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102244485B1 (ko) * | 2014-12-01 | 2021-04-26 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 제조 프로세스에 관련된 진단 정보를 획득하기 위한 방법 및 장치, 진단 장치를 포함하는 리소그래피 처리 시스템 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849378A (enrdf_load_stackoverflow) * | 1971-10-22 | 1973-07-12 | ||
| JPS49118366A (enrdf_load_stackoverflow) * | 1973-03-10 | 1974-11-12 |
-
1974
- 1974-04-08 CA CA197,028A patent/CA1044744A/en not_active Expired
- 1974-04-29 DE DE19742420789 patent/DE2420789C3/de not_active Expired
- 1974-05-09 JP JP5169574A patent/JPS5530656B2/ja not_active Expired
- 1974-05-15 FR FR7416924A patent/FR2256529B1/fr not_active Expired
- 1974-05-29 NL NL7407172A patent/NL7407172A/xx not_active Application Discontinuation
- 1974-06-07 GB GB2000174A patent/GB1478594A/en not_active Expired
- 1974-09-06 IT IT2700074A patent/IT1021128B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2256529B1 (enrdf_load_stackoverflow) | 1979-01-26 |
| JPS5530656B2 (enrdf_load_stackoverflow) | 1980-08-12 |
| NL7407172A (nl) | 1975-07-04 |
| DE2420789B2 (de) | 1979-12-06 |
| DE2420789C3 (de) | 1980-08-21 |
| CA1044744A (en) | 1978-12-19 |
| FR2256529A1 (enrdf_load_stackoverflow) | 1975-07-25 |
| JPS5099677A (enrdf_load_stackoverflow) | 1975-08-07 |
| IT1021128B (it) | 1978-01-30 |
| DE2420789A1 (de) | 1975-07-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4070578A (en) | Detector array and method | |
| EP1116047B1 (en) | Pixelated photon detector | |
| US6333504B1 (en) | Semiconductor radiation detector with enhanced charge collection | |
| US3614437A (en) | Neutron detection device for the position of beams of neutrons in space | |
| US3887810A (en) | Photon-multiplier imaging system | |
| GB1351421A (en) | Electron beam addressable semiconductor memory | |
| US6389103B2 (en) | Method and an apparatus for radiography and a radiation detector | |
| US3447043A (en) | Tunnel cathode in matrix form with integral storage feature | |
| GB1478594A (en) | Electronic storage tube target having a radiation insensitive layer | |
| US3890523A (en) | Vidicon target consisting of silicon dioxide layer on silicon | |
| GB1534795A (en) | Device for localizing light phenomena | |
| US4471270A (en) | Particle-impact localizing device, a cathode-ray oscilloscope and a pick-up tube comprising such a device | |
| US3693003A (en) | Storage target for an electron-beam addressed read, write and erase memory | |
| US3389382A (en) | Electron beam readout of stored information | |
| US3714439A (en) | Image comparison device and method | |
| US3329962A (en) | Solid state electron transducer apparatus | |
| GB1559728A (en) | Solid state body for detecting and locating the points of impact of ionising radiation | |
| US3517246A (en) | Multi-layered staggered aperture target | |
| US4048502A (en) | Electro-optical transducer | |
| US3541384A (en) | Image storage apparatus | |
| GB1385282A (en) | Iamge pick up devices | |
| Fourme | Position-sensitive gas detectors: MWPCs and their gifted descendants | |
| US3717766A (en) | Spark chamber radiation-detecting device | |
| US2686275A (en) | Art of storing or delaying the transmission of electrical signals | |
| US3046440A (en) | Signal storage arrangements |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |