GB1475671A - Positioning device - Google Patents
Positioning deviceInfo
- Publication number
- GB1475671A GB1475671A GB5211774A GB5211774A GB1475671A GB 1475671 A GB1475671 A GB 1475671A GB 5211774 A GB5211774 A GB 5211774A GB 5211774 A GB5211774 A GB 5211774A GB 1475671 A GB1475671 A GB 1475671A
- Authority
- GB
- United Kingdom
- Prior art keywords
- base
- coupling member
- doubling
- dec
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008878 coupling Effects 0.000 abstract 3
- 238000010168 coupling process Methods 0.000 abstract 3
- 238000005859 coupling reaction Methods 0.000 abstract 3
- 238000005452 bending Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
1475671 Piezoelectric positioning systems ELEKTROMAT VEB 2 Dec 1974 [4 Dec 1973] 52117/74 Heading H2A A piezoelectric positioning system comprises a bending element formed by two adhesively bonded piezoceramic plates. In the arrangement shown, a deflection element 2 comprises two adhesively bonded piezoceramic plates 6, a central electrode 9, and two outer electrodes 8, and has its ends supported in two blocks 3 mounted on a rigid base 5 by means of two leaf springs 4, and the electrodes are energized to cause the element to bend, thereby to move a coupling member 7 relative to the base 5. In the system of Fig. 2 (not shown), the deflection element (2) is mounted at one end only and the coupling member (7) is located at the other end. The system of Fig. 1 may be mounted as in Fig. 3A (not shown) with the base (5) fixed to a foundation (12), and with the coupling member (7) joined to a movable locating table (11), or as in Fig. 3B (not shown) wherein the base (5) is connected to a coarse adjusting device (13). The embodiments of Figs. 5A-5D (not shown) each include two deflection elements (2) either for doubling the displacement obtainable with one element (Figs. 5A, 5C), or for doubling the force obtainable with one element (Figs. 5B, 5D).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD175094A DD108172A1 (en) | 1973-12-04 | 1973-12-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1475671A true GB1475671A (en) | 1977-06-01 |
Family
ID=5493722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5211774A Expired GB1475671A (en) | 1973-12-04 | 1974-12-02 | Positioning device |
Country Status (6)
Country | Link |
---|---|
CS (1) | CS175816B1 (en) |
DD (1) | DD108172A1 (en) |
DE (1) | DE2452068A1 (en) |
FR (1) | FR2253281A1 (en) |
GB (1) | GB1475671A (en) |
SU (1) | SU646385A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3048631A1 (en) * | 1980-12-23 | 1982-07-22 | Siemens AG, 1000 Berlin und 8000 München | ACTUATOR WITH PIEZOCERAMIC BODY |
US4512036A (en) * | 1980-02-04 | 1985-04-16 | Herzl Laor | Piezoelectric apparatus for positioning optical fibers |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4520570A (en) * | 1983-12-30 | 1985-06-04 | International Business Machines Corporation | Piezoelectric x-y-positioner |
US4607461A (en) * | 1984-12-10 | 1986-08-26 | Charles Adams | Accurate positioning apparatus |
DE3509240A1 (en) * | 1985-03-14 | 1986-09-18 | Traub GmbH Maschinenfabrik, 7313 Reichenbach | DRIVE DEVICE FOR A TOOL CUTTER |
US5170277A (en) * | 1988-05-11 | 1992-12-08 | Symbol Technologies, Inc. | Piezoelectric beam deflector |
-
1973
- 1973-12-04 DD DD175094A patent/DD108172A1/xx unknown
-
1974
- 1974-11-02 DE DE19742452068 patent/DE2452068A1/en not_active Withdrawn
- 1974-12-02 GB GB5211774A patent/GB1475671A/en not_active Expired
- 1974-12-03 CS CS8265A patent/CS175816B1/cs unknown
- 1974-12-03 SU SU742083736A patent/SU646385A1/en active
-
1975
- 1975-01-29 FR FR7502827A patent/FR2253281A1/fr not_active Withdrawn
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4512036A (en) * | 1980-02-04 | 1985-04-16 | Herzl Laor | Piezoelectric apparatus for positioning optical fibers |
US4543663A (en) * | 1980-02-04 | 1985-09-24 | Herzl Laor | Piezoelectric apparatus for positioning optical fibers |
US4580292A (en) * | 1980-02-04 | 1986-04-01 | Herzl Laor | Communications exchange |
US4651343A (en) * | 1980-02-04 | 1987-03-17 | Herzl Laor | Piezoelectric apparatus for positioning optical fibers |
DE3048631A1 (en) * | 1980-12-23 | 1982-07-22 | Siemens AG, 1000 Berlin und 8000 München | ACTUATOR WITH PIEZOCERAMIC BODY |
Also Published As
Publication number | Publication date |
---|---|
FR2253281A1 (en) | 1975-06-27 |
DE2452068A1 (en) | 1975-06-05 |
CS175816B1 (en) | 1977-05-31 |
DD108172A1 (en) | 1974-09-05 |
SU646385A1 (en) | 1979-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |