GB1466375A - Two-axis photoelectric detector device - Google Patents

Two-axis photoelectric detector device

Info

Publication number
GB1466375A
GB1466375A GB2082074A GB2082074A GB1466375A GB 1466375 A GB1466375 A GB 1466375A GB 2082074 A GB2082074 A GB 2082074A GB 2082074 A GB2082074 A GB 2082074A GB 1466375 A GB1466375 A GB 1466375A
Authority
GB
United Kingdom
Prior art keywords
signals
photoelectric detector
detector device
quadrative
axis photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2082074A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1466375A publication Critical patent/GB1466375A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Control Or Security For Electrophotography (AREA)
  • Microscoopes, Condenser (AREA)
GB2082074A 1973-05-12 1974-05-10 Two-axis photoelectric detector device Expired GB1466375A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48052129A JPS5246694B2 (fr) 1973-05-12 1973-05-12

Publications (1)

Publication Number Publication Date
GB1466375A true GB1466375A (en) 1977-03-09

Family

ID=12906250

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2082074A Expired GB1466375A (en) 1973-05-12 1974-05-10 Two-axis photoelectric detector device

Country Status (3)

Country Link
JP (1) JPS5246694B2 (fr)
DE (1) DE2422749C2 (fr)
GB (1) GB1466375A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3135180A1 (de) * 1981-09-05 1983-04-14 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zum linearen fuehren eines abtasters

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE843902C (de) * 1949-11-18 1952-07-14 Genevoise Instr Physique Verfahren zur photoelektrischen Messung der Lage eines Strichs einer Gradteilung und Vorrichtung zur Ausuebung des Verfahrens
CH484416A (de) * 1965-04-24 1970-01-15 Leitz Ernst Gmbh Optisches Messgerät
DE1773965B1 (de) * 1968-08-01 1971-03-25 Leitz Ernst Gmbh Vorrichtung zum erzeugen eines schwingenden lichtbuendels

Also Published As

Publication number Publication date
DE2422749A1 (de) 1974-11-28
JPS503652A (fr) 1975-01-16
DE2422749C2 (de) 1982-07-01
JPS5246694B2 (fr) 1977-11-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee