GB1459410A - Automatic polarization analysing device - Google Patents

Automatic polarization analysing device

Info

Publication number
GB1459410A
GB1459410A GB5849273A GB5849273A GB1459410A GB 1459410 A GB1459410 A GB 1459410A GB 5849273 A GB5849273 A GB 5849273A GB 5849273 A GB5849273 A GB 5849273A GB 1459410 A GB1459410 A GB 1459410A
Authority
GB
United Kingdom
Prior art keywords
null position
error signal
dead zone
drive
servos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5849273A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1459410A publication Critical patent/GB1459410A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Control Of Position Or Direction (AREA)
GB5849273A 1972-12-22 1973-12-18 Automatic polarization analysing device Expired GB1459410A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12824572A JPS5317312B2 (enrdf_load_html_response) 1972-12-22 1972-12-22

Publications (1)

Publication Number Publication Date
GB1459410A true GB1459410A (en) 1976-12-22

Family

ID=14980071

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5849273A Expired GB1459410A (en) 1972-12-22 1973-12-18 Automatic polarization analysing device

Country Status (3)

Country Link
JP (1) JPS5317312B2 (enrdf_load_html_response)
DE (1) DE2363684C3 (enrdf_load_html_response)
GB (1) GB1459410A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2271845A (en) * 1987-01-23 1994-04-27 British Aerospace Polarisation image detection systems

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3830398C2 (de) * 1988-09-07 1997-11-27 Bodenseewerk Perkin Elmer Co Antriebsvorrichtung zum Antreiben eines Schwingpolarisators

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2271845A (en) * 1987-01-23 1994-04-27 British Aerospace Polarisation image detection systems
GB2271845B (en) * 1987-01-23 1994-12-14 British Aerospace Polarisation image detection systems
US5396329A (en) * 1987-01-23 1995-03-07 British Aerospace Plc Polarisation image detection systems

Also Published As

Publication number Publication date
DE2363684A1 (de) 1974-06-27
JPS5317312B2 (enrdf_load_html_response) 1978-06-07
DE2363684C3 (de) 1979-03-15
DE2363684B2 (de) 1978-07-06
JPS4987344A (enrdf_load_html_response) 1974-08-21

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee