GB1448482A - Semiconductor devices - Google Patents
Semiconductor devicesInfo
- Publication number
- GB1448482A GB1448482A GB2150173A GB2150173A GB1448482A GB 1448482 A GB1448482 A GB 1448482A GB 2150173 A GB2150173 A GB 2150173A GB 2150173 A GB2150173 A GB 2150173A GB 1448482 A GB1448482 A GB 1448482A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- ohm
- region
- resistivity
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 229910000077 silane Inorganic materials 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28537—Deposition of Schottky electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/47—Schottky barrier electrodes
Abstract
1448482 Semi-conductor devices FERRANTI Ltd 3 May 1974 [5 May 1973] 21501/73 Heading H1K A semi-conductor device has a Schottky barrier 10 at the interface between one region 11 of monocrystalline silicon with a resistivity greater than 0À1 ohm-cm. and another region 13 of polycrystalline silicon with a resistivity less than 1À0 ohm-cm. The layer 13 is deposited from a reaction atmosphere including silane at 800‹ C. through an aperture 14 in a silicon oxide passivating layer 15 and preferably has a resistivity of 0À01 ohm-cm. The layer 13 may be of P-type conductivity and the region 11 of N- type or the layers may be of the same type. A deposited metal electrode 17 makes ohmic contact with the layer 13.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2150173A GB1448482A (en) | 1973-05-05 | 1973-05-05 | Semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2150173A GB1448482A (en) | 1973-05-05 | 1973-05-05 | Semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1448482A true GB1448482A (en) | 1976-09-08 |
Family
ID=10164008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2150173A Expired GB1448482A (en) | 1973-05-05 | 1973-05-05 | Semiconductor devices |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1448482A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2491260A1 (en) * | 1980-09-30 | 1982-04-02 | Nippon Telegraph & Telephone | COMPOSITE LAYER ELECTRODE AND SEMICONDUCTOR DEVICE PROVIDED WITH SAID ELECTRODE |
-
1973
- 1973-05-05 GB GB2150173A patent/GB1448482A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2491260A1 (en) * | 1980-09-30 | 1982-04-02 | Nippon Telegraph & Telephone | COMPOSITE LAYER ELECTRODE AND SEMICONDUCTOR DEVICE PROVIDED WITH SAID ELECTRODE |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |