GB1367094A - Plasma-generating apparatus and process - Google Patents

Plasma-generating apparatus and process

Info

Publication number
GB1367094A
GB1367094A GB461171A GB461171A GB1367094A GB 1367094 A GB1367094 A GB 1367094A GB 461171 A GB461171 A GB 461171A GB 461171 A GB461171 A GB 461171A GB 1367094 A GB1367094 A GB 1367094A
Authority
GB
United Kingdom
Prior art keywords
gas
discharge
slow wave
wave structure
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB461171A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosisio R G
Weissfloch C F Wertheimer M R
Original Assignee
Bosisio R G
Weissfloch C F Wertheimer M R
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosisio R G, Weissfloch C F Wertheimer M R filed Critical Bosisio R G
Priority to GB461171A priority Critical patent/GB1367094A/en
Priority to CA133,459A priority patent/CA972429A/en
Publication of GB1367094A publication Critical patent/GB1367094A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/25—Solid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/25—Solid
    • B29K2105/253—Preform
    • B29K2105/256—Sheets, plates, blanks or films

Abstract

1367094 Discharge lamps; discharge treatmerit C F WEISSFLOCH M R WERTHEIMER and R G BOSISIO 7 Feb 1972 [13 Feb 1971] 4611/71 Headings H1D and H1X [Also in Division H5] Microwave energy is transmitted to a gas 7 using a slow wave structure 6 between the energy source 1 and the gas 7, the gas being at a controllable pressure and flow rate. The gas 7 flows through a container 8 in close proximity to the slow wave structure 6, which is a broad band, travelling wave structure, preferably of the strapped bar type, Figs. 4-6 (not shown). A vacuum pump 13 and flow regulator 15 control the gas flow. The unabsorbed energy is absorbed in a load 11. Container 8 is of quartz or other microwave-transparent material, and is cooled by a fan 18, or a cooling liquid. A double-walled radiation shield 9 is transparent and waterfilled. Container 8 is inclined at 3 to 10 degrees to the slow wave structure 6. Two structures 6, 61, may be used, Figs. 15, 22, 23, 26 (not shown). Slow wave structures of the comb-type, laddertype, zig-zag type and helical type may be used, Figs. 16-19 (not shown). Material in the form of a web, film, foil or plate is treated by the gas discharge, Figs. 22-25 (not shown), e.g. to improve the bonding and printing characteristics of fibres or a polyethylene film surface or to improve the dyeability and washability of polyester textile materials, or to reduce shrinkage of wool. Material in bulk form, e.g. granular or fibrous materials, may be treated by the discharge, Fig. 26 (not shown). Organic vapour may be treated to form a solid polymer film, e.g. for encapsulating electronic components. A CO 2 laser "pumping" embodiment is described, Fig. 27 (not shown). The gas discharge may be used as a light source, or a source of infra-red or ultra-violet radiation. Alternatively the discharge may effect chemical reactions of gaseous organic or inorganic compounds, e.g. cracking hydrocarbons. Reference is made to forming protective oxide or nitride layers on metals or semi-conductors, to chemical synthesis of hydrazine and acetylene, and to "crosslinking" applications. Gases used include nitrogen, oxygen, air, argon, helium, carbon monoxide, carbon dioxide, xenon and mixtures. Another possible use of the invention is in spectral analysis.
GB461171A 1971-02-13 1971-02-13 Plasma-generating apparatus and process Expired GB1367094A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB461171A GB1367094A (en) 1971-02-13 1971-02-13 Plasma-generating apparatus and process
CA133,459A CA972429A (en) 1971-02-13 1972-01-28 Plasma generator using microwave energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB461171A GB1367094A (en) 1971-02-13 1971-02-13 Plasma-generating apparatus and process

Publications (1)

Publication Number Publication Date
GB1367094A true GB1367094A (en) 1974-09-18

Family

ID=9780434

Family Applications (1)

Application Number Title Priority Date Filing Date
GB461171A Expired GB1367094A (en) 1971-02-13 1971-02-13 Plasma-generating apparatus and process

Country Status (2)

Country Link
CA (1) CA972429A (en)
GB (1) GB1367094A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2408972A1 (en) * 1977-11-15 1979-06-08 Thomson Csf High flux plasma source and accelerator - use VHF magnetic field injected into slot structure via tapered waveguide and sealing window
DE2952046A1 (en) * 1979-12-22 1981-07-09 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn METHOD FOR GENERATING DISCHARGE IN A GAS FLOWING AT SUPERVISOR SPEED
DE3244391A1 (en) * 1982-12-01 1984-06-07 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR COATING SUBSTRATES BY PLASMAPOLYMERISATION

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2408972A1 (en) * 1977-11-15 1979-06-08 Thomson Csf High flux plasma source and accelerator - use VHF magnetic field injected into slot structure via tapered waveguide and sealing window
DE2952046A1 (en) * 1979-12-22 1981-07-09 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn METHOD FOR GENERATING DISCHARGE IN A GAS FLOWING AT SUPERVISOR SPEED
DE3244391A1 (en) * 1982-12-01 1984-06-07 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR COATING SUBSTRATES BY PLASMAPOLYMERISATION

Also Published As

Publication number Publication date
CA972429A (en) 1975-08-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee