CA972429A - Plasma generator using microwave energy - Google Patents
Plasma generator using microwave energyInfo
- Publication number
- CA972429A CA972429A CA133,459A CA133459A CA972429A CA 972429 A CA972429 A CA 972429A CA 133459 A CA133459 A CA 133459A CA 972429 A CA972429 A CA 972429A
- Authority
- CA
- Canada
- Prior art keywords
- microwave energy
- plasma generator
- plasma
- generator
- microwave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/25—Solid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/25—Solid
- B29K2105/253—Preform
- B29K2105/256—Sheets, plates, blanks or films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB461171A GB1367094A (en) | 1971-02-13 | 1971-02-13 | Plasma-generating apparatus and process |
Publications (1)
Publication Number | Publication Date |
---|---|
CA972429A true CA972429A (en) | 1975-08-05 |
Family
ID=9780434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA133,459A Expired CA972429A (en) | 1971-02-13 | 1972-01-28 | Plasma generator using microwave energy |
Country Status (2)
Country | Link |
---|---|
CA (1) | CA972429A (en) |
GB (1) | GB1367094A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2408972A1 (en) * | 1977-11-15 | 1979-06-08 | Thomson Csf | High flux plasma source and accelerator - use VHF magnetic field injected into slot structure via tapered waveguide and sealing window |
DE2952046C2 (en) * | 1979-12-22 | 1982-04-15 | Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn | Method and device for generating an electrical discharge in a gas flowing at supersonic speed |
DE3244391A1 (en) * | 1982-12-01 | 1984-06-07 | Leybold-Heraeus GmbH, 5000 Köln | DEVICE FOR COATING SUBSTRATES BY PLASMAPOLYMERISATION |
-
1971
- 1971-02-13 GB GB461171A patent/GB1367094A/en not_active Expired
-
1972
- 1972-01-28 CA CA133,459A patent/CA972429A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1367094A (en) | 1974-09-18 |
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