CA972429A - Plasma generator using microwave energy - Google Patents

Plasma generator using microwave energy

Info

Publication number
CA972429A
CA972429A CA133,459A CA133459A CA972429A CA 972429 A CA972429 A CA 972429A CA 133459 A CA133459 A CA 133459A CA 972429 A CA972429 A CA 972429A
Authority
CA
Canada
Prior art keywords
microwave energy
plasma generator
plasma
generator
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA133,459A
Other versions
CA133459S (en
Inventor
Carl F. Weissfloch
Renato G. Bosisio
Michael R. Wertheimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of CA972429A publication Critical patent/CA972429A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/25—Solid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/25—Solid
    • B29K2105/253—Preform
    • B29K2105/256—Sheets, plates, blanks or films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Lasers (AREA)
CA133,459A 1971-02-13 1972-01-28 Plasma generator using microwave energy Expired CA972429A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB461171A GB1367094A (en) 1971-02-13 1971-02-13 Plasma-generating apparatus and process

Publications (1)

Publication Number Publication Date
CA972429A true CA972429A (en) 1975-08-05

Family

ID=9780434

Family Applications (1)

Application Number Title Priority Date Filing Date
CA133,459A Expired CA972429A (en) 1971-02-13 1972-01-28 Plasma generator using microwave energy

Country Status (2)

Country Link
CA (1) CA972429A (en)
GB (1) GB1367094A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2408972A1 (en) * 1977-11-15 1979-06-08 Thomson Csf High flux plasma source and accelerator - use VHF magnetic field injected into slot structure via tapered waveguide and sealing window
DE2952046C2 (en) * 1979-12-22 1982-04-15 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Method and device for generating an electrical discharge in a gas flowing at supersonic speed
DE3244391A1 (en) * 1982-12-01 1984-06-07 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR COATING SUBSTRATES BY PLASMAPOLYMERISATION

Also Published As

Publication number Publication date
GB1367094A (en) 1974-09-18

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