GB1345093A - Repair of defects in patterned thin film layers - Google Patents
Repair of defects in patterned thin film layersInfo
- Publication number
- GB1345093A GB1345093A GB4496972A GB4496972A GB1345093A GB 1345093 A GB1345093 A GB 1345093A GB 4496972 A GB4496972 A GB 4496972A GB 4496972 A GB4496972 A GB 4496972A GB 1345093 A GB1345093 A GB 1345093A
- Authority
- GB
- United Kingdom
- Prior art keywords
- repair
- defects
- thin film
- film layers
- patterned thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18773971A | 1971-10-08 | 1971-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1345093A true GB1345093A (en) | 1974-01-30 |
Family
ID=22690259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4496972A Expired GB1345093A (en) | 1971-10-08 | 1972-09-29 | Repair of defects in patterned thin film layers |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4847284A (enrdf_load_stackoverflow) |
| DE (1) | DE2247368A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1345093A (enrdf_load_stackoverflow) |
| IT (1) | IT967781B (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5632777B2 (enrdf_load_stackoverflow) * | 1974-05-10 | 1981-07-30 | ||
| JPS56128946A (en) * | 1980-03-14 | 1981-10-08 | Fujitsu Ltd | Photomask correcting method |
| JPS599942A (ja) * | 1982-07-08 | 1984-01-19 | Mitsubishi Electric Corp | 配線パタ−ン形成法 |
-
1972
- 1972-09-22 IT IT2957572A patent/IT967781B/it active
- 1972-09-27 DE DE19722247368 patent/DE2247368A1/de active Pending
- 1972-09-29 GB GB4496972A patent/GB1345093A/en not_active Expired
- 1972-10-07 JP JP10104072A patent/JPS4847284A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IT967781B (it) | 1974-03-11 |
| DE2247368A1 (de) | 1973-04-12 |
| JPS4847284A (enrdf_load_stackoverflow) | 1973-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |